MPX5999 [MOTOROLA]

X-ducer SILICON PRESSURE SENSORS; X -能器硅压力传感器


型号：	MPX5999
厂家：	MOTOROLA
描述：	X-ducer SILICON PRESSURE SENSORS X -能器硅压力传感器传感器压力传感器
文件：	总6页 (文件大小：88K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

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by MPX5999D/D

SEMICONDUCTOR TECHNICAL DATA

X–ducer

SILICON

PRESSURE SENSORS

The MPX5999D piezoresistive transducer is a state–of–the–art pressure sensor

designed for a wide range of applications, but particularly for those employing a

microcontroller or microprocessor with A/D inputs. This patented, single element

X–ducer combines advanced micromachining techniques, thin–film metallization and

bipolar semiconductor processing to provide an accurate, high level analog output signal

that is proportional to applied pressure.

Figure 1 shows a block diagram of the internal circuitry integrated on the stand–alone

sensing chip.

Features

BASIC CHIP

CARRIER ELEMENT

CASE 867–08, STYLE 1

•

Temperature Compensated Over 0 to 85°C

Ideally Suited for Microprocessor or Microcontroller–Based Systems

Patented Silicon Shear Stress Strain Gauge

Durable Epoxy Unibody Element

PIN NUMBER

N/C

out

Gnd

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect

to external circuitry or ground. Pin 1

is noted by the notch in the Lead.

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

X–ducer

SENSING

ELEMENT

out

GAIN STAGE #1

PINS 4, 5 AND 6 ARE NO CONNECTS

GND

Figure 1. Fully Integrated Pressure Sensor Schematic

(1)

MAXIMUM RATINGS

Parametrics

(2)

Symbol

Value

4000

Unit

kPa

°C

Overpressure (P1 > P2)

max

(2)

Burst Pressure (P1 > P2)

burst

6000

Storage Temperature

Operating Temperature

stg

–40° to +150

–40° to +125

°C

1. T = 25°C unless otherwise noted. Maximum Ratings apply to Case 867–08 only.

2. Extended exposure at the specified limits may cause permanent damage or degradation to the device.

3. This sensor is designed for applications where P1 is always greater than, or equal to P2.

Senseon and X–ducer are trademarks of Motorola, Inc.

(Replaces MPX5999)

Motorola Sensor Device Data

Motorola, Inc. 1997

OPERATING CHARACTERISTICS (V = 5.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

—

Max

1000

5.25

Unit

kPa

(1)

Pressure Range

(2)

Supply Voltage

4.75

—

5.0

7.0

0.2

4.7

4.5

—

Vdc

Supply Current

mAdc

Vdc

(3)

Zero Pressure Offset

(0 to 85°C)

off

0.088

4.587

—

0.313

4.813

—

(4)

Full Scale Output (0 to 85°C)

FSO

Vdc

(5)

Full Scale Span

Sensitivity

(0 to 85°C)

FSS

Vdc

V/P

—

mV/kPa

(6)

Accuracy

—

± 2.5

—

FSS

(7)

Response Time

—

1.0

0.1

Output Source Current at Full Scale Output

(8)

—

O+

Warm–Up

—

Sec

MECHANICAL CHARACTERISTICS

Characteristic

Symbol

Min

—

Typ

4.0

—

Max

—

Unit

Weight, Basic Element (Case 867)

Cavity Volume

—

Grams

—

0.01

0.001

Volumetric Displacement

—

NOTES:

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V ) is defined as the output voltage at the minimum rated pressure.

off

4. Full Scale Output (V

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

5. Full Scale Span (V

FSS

minimum rated pressure.

6. Accuracy (error budget) consists of the following:

•

Linearity:

Output deviation from a straight line relationship with pressure over the specified pressure range.

Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure

applied.

•

Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from the

minimum or maximum rated pressure, at 25°C.

•

TcSpan:

TcOffset:

Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative

to 25°C.

•

Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

, at 25°C.

FSS

7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

8. Warm–up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.

9. P2 max is 500 kPa.

Motorola Sensor Device Data

ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING

Figure 2 shows the sensor output signal relative to pres-

sure input. Typical, minimum and maximum output curves

are shown for operation over 0°C to 85°C. (Device output

may be nonlinear outside of the rated pressure range.)

The performance over temperature is achieved by integrat-

ing the shear–stress strain gauge, temperature compensa-

tion, calibration and signal conditioning circuitry onto a single

monolithic chip.

while allowing the pressure signal to be transmitted to the

silicon diaphragm.

The MPX5999D pressure sensor operating characteristics,

and internal reliability and qualification tests are based on use

of dry air as the pressure media. Media other than dry air may

have adverse effects on sensor performance and long–term

reliability. Contact the factory for information regarding media

compatibility in your application.

Figure 4 shows a typical decoupling circuit for interfacing

the output of the MPX5999D to the A/D microprocessor.

Proper decoupling of the power supply is recommended.

Figure 3 illustrates the differential or gauge configuration in

the basic chip carrier (Case 867). A fluoro silicone gel isolates

the die surface and wire bonds from harsh environments,

5.0

TRANSFER FUNCTION:

4.5

4.0

3.5

3.0

2.5

2.0

1.5

1.0

0.5

= V *(0.000901*P+0.04) ± ERROR

out

= 5.0 Vdc

TEMP = 0 to 85°C

TYPICAL

MAX

MIN

100 200 300 400 500 600 700 800 900 1000 1100

DIFFERENTIAL PRESSURE (kPa)

Figure 2. Output versus Pressure Differential

SILICONE

DIE COAT

STAINLESS STEEL

MPX5999D

OUTPUT

(PIN 1)

METAL COVER

DIE

A/D

WIRE BOND

50 pF

51 k

PROCESSOR

RTV DIE

BOND

LEAD

FRAME

THERMOPLASTIC CASE

Figure 3. Cross–Sectional Diagram

(Not to Scale)

Figure 4. Typical Decoupling Filter for Sensor to

Microprocessor Interface

Motorola Sensor Device Data

PRESSURE (P1) / VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor

pressure sensor is designed to operate with positive differen-

as the Pressure (P1) side and the Vacuum (P2) side. The

Pressure (P1) side is the side containing fluoro silicone gel

which protects the die from harsh media. The Motorola MPX

tial pressure applied, P1 > P2.

The Pressure (P1) side may be identified by using the

table below:

Pressure (P1)

Side Identifier

Part Number

Case Type

867–08

MPX5999D

Stainless Steel Cap

ORDERING INFORMATION

The MPX5999D pressure sensor is available as an element only.

MPX Series

Order Number

MPX5999D

Device Marking

Device Type

Basic Element

Options

Case Type

Differential

867–08

MPX5999D

Motorola Sensor Device Data

PACKAGE DIMENSIONS

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

POSITIVE PRESSURE

(P1)

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD

STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

–A–

INCHES

MILLIMETERS

DIM

MIN

MAX

0.630

0.534

0.220

0.033

0.064

MIN

15.11

13.06

5.08

0.68

1.22

MAX

16.00

13.56

5.59

0.84

1.63

0.595

0.514

0.200

0.027

0.048

PIN 1

SEATING

PLANE

–T–

0.100 BSC

2.54 BSC

0.014

0.695

0.016

0.725

0.36

0.40

17.65

18.42

D_{6 PL}

30 NOM

0.475

0.430

0.090

0.495

0.450

0.105

12.07

10.92

2.29

12.57

11.43

2.66

0.136 (0.005)

T A

STYLE 1:

PIN 1. VOUT

2. GROUND

3. VCC

4. V1

5. V2

6. VEX

CASE 867–08

ISSUE N

BASIC ELEMENT (A, D)

Motorola Sensor Device Data

Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding

the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and

specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola

datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”

must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of

others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other

applicationsintended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury

ordeathmayoccur. ShouldBuyerpurchaseoruseMotorolaproductsforanysuchunintendedorunauthorizedapplication,BuyershallindemnifyandholdMotorola

and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees

arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that

Motorola was negligent regarding the design or manufacture of the part. Motorola and

Opportunity/Affirmative Action Employer.

are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal

Mfax is a trademark of Motorola, Inc.

How to reach us:

USA/EUROPE/Locations Not Listed: Motorola Literature Distribution;

P.O. Box 5405, Denver, Colorado 80217. 303–675–2140 or 1–800–441–2447

JAPAN: Nippon Motorola Ltd.; Tatsumi–SPD–JLDC, 6F Seibu–Butsuryu–Center,

3–14–2 Tatsumi Koto–Ku, Tokyo 135, Japan. 81–3–3521–8315

Mfax : RMFAX0@email.sps.mot.com – TOUCHTONE 602–244–6609

ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park,

– US & Canada ONLY 1–800–774–1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852–26629298

INTERNET: http://motorola.com/sps

Motorola Sensor Device Data

MPX5999D/D

◊

MPX5999 [MOTOROLA]

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