MPXM2202DT1 [MOTOROLA]
200 KPA ON CHIP TEMPERATURE COMPENSATED & CALIBRATED SILICON PRESSURE SENSORS; 200 KPA片上温度补偿和校准的硅压力传感器
| 型号： | MPXM2202DT1 |
| 厂家： | 
MOTOROLA |
| 描述： | 200 KPA ON CHIP TEMPERATURE COMPENSATED & CALIBRATED SILICON PRESSURE SENSORS |
| 文件： | 总8页 (文件大小：248K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
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Freescale Semiconductor, Inc.
Order this document
by MPXM2202/D
SEMICONDUCTOR TECHNICAL DATA
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MP XM 2202
S ER I ES
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The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly
accurate and linear voltage output — directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Available in Easy-to-Use Tape & Reel
Ratiometric to Supply Voltage
MPAK PACKAGE
Gauge Ported & Non Ported Options
Application Examples
•
•
•
•
•
•
•
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
SCALE 1:1
CASE 1320
Altimeters
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
SCALE 1:1
V
S
CASE 1320A
3
T HI N FI L M
T EM P ER ATU R E
CO M PE N SATI O N
A ND
2
4
PIN NUMBER
X- du c e r
SE NSI NG
EL E ME NT
V
o
u
u
t
t
+
-
1
2
Gnd
+V
3
4
V
S
V
o
CAL IB R ATI O N
CI RC U IT RY
–V
out
out
1
G
N
D
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
REV 0
For More Information On This Product,
Motorola, Inc. 2001
Go to: www.freescale.com
Freescale Semiconductor, Inc.
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MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
400
Unit
kPa
°C
Maximum Pressure (P1 > P2)
Storage Temperature
P
max
T
stg
–40 to +125
–40 to +125
Operating Temperature
T
A
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristic
Symbol
Min
0
Typ
—
Max
200
16
Unit
kPa
Vdc
mAdc
mV
(1)
Pressure Range
P
OP
(2)
Supply Voltage
Supply Current
Full Scale Span
V
S
—
10
I
o
—
6.0
40
—
(3)
V
FSS
38.5
41.5
(4)
Offset
MPXM2202D/G Series
MPXM2202A Series
V
off
–1.0
–2.0
—
—
1.0
2.0
mV
Sensitivity
∆V/∆P
—
0.2
—
mV/kPa
(5)
Linearity
MPXM2202D/G Series
MPXM2202A Series
—
—
–0.6
–1.0
—
—
0.4
1.0
%V
FSS
(5)
Pressure Hysteresis (0 to 100 kPa)
—
—
—
—
±0.1
±0.5
—
—
—
%V
%V
%V
FSS
FSS
FSS
(5)
Temperature Hysteresis (–40°C to +125°C)
(5)
Temperature Effect on Full Scale Span
TCV
–2.0
–1.0
1000
1400
—
2.0
1.0
2500
3000
—
FSS
(5)
Temperature Effect on Offset
TCV
—
mV
off
Input Impedance
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
t
R
1.0
20
ms
ms
Warm–Up
—
—
—
—
(7)
Offset Stability
—
±0.5
—
%V
FSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
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LINEARITY
L
EA ST
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
S
Q
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A
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L
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A
S
T
S
Q
U
A
R
E
S
F
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A
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I
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P
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A
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F
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CU RV E
E
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A
A
T
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D
E
S
T
R
A
I
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H
DE VIATIO N
T
L IN E
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the cal-
culations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
E
S
N
D
A
P O IN T
T
T
R
I
G
H
L
I
N
E
F
I
T
O
F
F
S
E
T
5
0
1 00
0
P
R
E
S
SU
R
E
(
%
FUL L SC AL E )
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPXM2202 series at 25°C. The output
is directly proportional to the differential pressure and is es-
sentially a straight line.
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
V
T
=
1
0
V dc
S
40
35
30
25
20
15
10
5
0
= °
>
C2 5
P 2
A
P
1
TY P
S
P
A
N
M AX
RA NG E
)
(
T
Y
P
MI N
- ā5
a
O
FFS E T
k
P
0
2
5
5
0
5
7
5
1
0
.
0
5
1
25
1
5
0
5
1
75
2 00
2 9
7
.
2
1
4
2
1
.
7
P SI
P RE SS UR E
Figure 3. Output versus Pressure Differential
ORDERING INFORMATION
Case Type
1320
Device Type/Order No.
MPXM2202D
Options
Non–ported
MPXM2202DT1
MPXM2202GS
MPXM2202GST1
MPXM2202A
Non–ported, Tape and Reel
Ported
1320
1320A
1320A
1320
Ported, Tape and Reel
Non–ported
MPXM2202AT1
MPXM2202AS
Non–ported, Tape and Reel
Ported
1320
1320A
1320A
MPXM2202AST1
Ported, Tape and Reel
Motorola Sensor Device Data
3
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S ER IE S
PACKAGE DIMENSIONS
2X
0. 00 6 C A B
N O TE S :
1. D I MEN S IO N S A R E I N I N CH E S .
2. I N TE R PR E T D I MEN S IO N S A ND TO LE R AN C ES PE R
A SME Y 14. 5M-1 994.
3. D I MEN S IO N S "D " A ND "E 1" D O N O T IN C L U D E M O LD
F LAS H O R P R OT R U SI O N . MO LD F LASH O R
P RO T R U SI O N S H ALL N O T E XC E ED . 00 6" PE R SI D E.
4. A LL V ERT IC A L S U RFA C ES TO° MB EA XI M5 U M .
5. D I MEN S IO N S "b " D O ES N O T I N CL U D E D AM BAR
P RO T R U SI O N . A LLO WA BLE D AM BA R P RO T RU S IO N
S HA LL B E . 008 MA XI MU M .
E
e
PIN 4
e/2
S TY LE 1:
P IN 1. G ND
INCHES
PIN 1
b1
DIM MIN
MAX
. 165
. 010
. 018
. 130
. 255
. 485
. 335
2. +Vo ut
3. V s
4. -Vo ut
4X b
A
A1
b
. 155
. 002
. 014
. 120
. 245
. 475
. 325
M
0
.
0
04
C
A
B
M
0
.
0
0
4
C
A B
b1
D
E
E1
D
B
A
E1
e
. 050ꢀ B SC
. 025ꢀ B SC
. 038 . 048
e/2
L
°
0ꢀ ꢀ
°
7ꢀ ꢀ
θ
A
0 .0 04
.014
GAGE
PLANE
DETAIL E
SEATING
PLANE
C
A1
CASE 1320–02
ISSUE A
MPAK, STYLE 1
θ
L
DETAIL E
4
Motorola Sensor Device Data
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SE R I ES
PACKAGE DIMENSIONS (CONTINUED)
2X
0
.
0
0
6
C
A
B
E
.014
GAGE
PLANE
e
e/2
A1
θ
L
DETAIL E
N O TE S :
1. D I MEN S IO N S A R E I N I N CH E S .
4X b
2. I N TE R PR E T D I MEN S IO N S A ND TO L ER AN C ES PE R
A SME Y 14. 5M-1 994.
M
0
.0
0
4
C
A B
N
b1
3. D I MEN S IO N S "D " A ND "E 1" D O N O T IN C L U D E M O LD
F LAS H O R P R OT R U SI O N . MO LD FL ASH O R
P RO T R U SI O N S H ALL N O T E XC EED .0 0 6" PE R SI D E.
4. A LL V ERT IC A L S U RFA C ES TO° MBEAXI M5 U M .
5. D I MEN S IO N S "b " D O ES N O T IN C L U D E D AM BAR
P RO T R U SI O N . A LLO WA BLE D AM BAR PR O T RU S IO N
S HA LL B E . 008 MA XI MU M .
M
0
.
0
04
C A B
P
INCHES
DIM MIN
MAX
. 397
. 010
. 018
. 130
. 255
. 485
. 335
S
A
A1
b
. 377
. 002
. 014
. 120
. 245
. 475
. 325
b1
D
A
E
E1
e
DETAIL E
. 050ꢀ B SC
. 025ꢀ B SC
. 013
e/2
L
. 023
. 293
. 373
. 117
. 202
M
N
. 283
. 363
. 107
. 192
0
.
0
0
4
P
S
E1
B
D
A
°
0ꢀ ꢀ
°
7ꢀ ꢀ
θ
SEATING
PLANE
C
CASE 1320A–02
ISSUE O
MPAK, STYLE 1
Motorola Sensor Device Data
5
For More Information On This Product,
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Freescale Semiconductor, Inc.
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S ER IE S
NOTES
6
Motorola Sensor Device Data
For More Information On This Product,
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Freescale Semiconductor, Inc.
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SE R I ES
NOTES
Motorola Sensor Device Data
7
For More Information On This Product,
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
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E Motorola, Inc. 2001.
How to reach us:
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HOME PAGE: http://www.motorola.com/semiconductors/
For More Information On This Product,
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MPXM2202/D
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