SC200D-22-M2/3 [MSYSTEM]

Single Loop Controller Series MULTI-FUNCTION PID CONTROLLER;


型号：	SC200D-22-M2/3
厂家：	M-SYSTEM
描述：	Single Loop Controller Series MULTI-FUNCTION PID CONTROLLER
文件：	总11页 (文件大小：419K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

MODEL: SC200D

(Language (Japanese or English) can be chosen by front

panel setting.)

Single Loop Controller Series

Configurator Interface (must be specified)

/1: Stereo jack

MULTI-FUNCTION PID CONTROLLER

(color LCD with touch-panel, Modbus/NestBus

communication, Pulse width output)

Terminal block (must be specified)

/T: Separable terminal

Other Options

blank: none

/Q: Option other than the above (specify the specification)

SPECIFICATIONS OF OPTION: Q (multiple selections)

COATING (For the detail, refer to M-System's web site.)

/C01: Silicone coating

144

(5.67)

/C02: Polyurethane coating

mm (inch)

/C03: Rubber coating

TERMINAL SCREW MATERIAL

/S01: Stainless steel

*Selectable with option code

MODEL: SC200D–[1][2]–[3][4]

FUNCTIONS & FEATURES

Functions & Features

ORDERING INFORMATION

• Code number: SC200D-[1][2]-[3][4]

Specify a code from below for each [1] through [4].

(e.g. SC200D-11-M2/3/E/1/T/Q)

• For control loops with final control elements driven by

electric actuators

• Color LCD with touch panel

•Five Operation views (digital display, bargraph, dual-loop

bargraph, short trend and user’s parameter table views)

• Enhanced screen functions for engineering (configuration,

programming and tuning views)

• Specify the specification for option code /Q

(e.g. /C01/S01)

• Universal input x 2 points, analog input x 4 points,

discrete input x 6 points, pulse input x 5 points, high speed

pulse input x 1 point

[1] DISCRETE OUTPUT

1: Relay contact

2: Photo MOSFET relay

• Current output (4 - 20 mA) x 2 points, voltage output (1 -

5 V) x 2 points, relay or photo-MOSFET relay output x 5

points

[2] MODBUS

1: Modbus-RTU

2: Modbus/TCP

• RUN contact output (relay) x 1 point

• I/O signals can be added with remote I/O modules

connected via NestBus peer-to-peer communication

• Computation cycle selectable between 100 msec. and 3

sec. (control cycle selectable between 1 and 64 times of the

computation cycle)

[3] POWER INPUT

AC Power

M2: 100 – 240 V AC (Operational voltage range 85 – 264 V, 50/60 Hz)

• Position input display

DC Power

• One control output with two modulated pulses (to increase

and to decrease)

R: 24 V DC

(Operational voltage range 24 V ±10 %, ripple 10 %p-p max.)

• Two PID function blocks

• Advanced computation and sequence control functions

• Auto-tuning function

[4] OPTIONS (multiple selections)

Housing Depth

• Parameter input and changing with touch panel

• Function parameter setting, list printing and data

downloading/uploading available with Loop Configuration

Builder Software (model: SFEW3E)

/3: 300 mm

/4: 400 mm

Language

blank: Japanese

/E: English

• Short trend export (CSV), display parameter setting,

saving and transfer with PC Configurator Software (model:

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 1/11

http://www.m-system.co.jp/

MODEL: SC200D

SCCFG)

operations, time functions, signal selection, limit, alarm and

other functions

• Control and supervision by SCADA software via

Modbus/TCP or RTU communication

• Selectable housing depth for ease of using existing wires

in replacement: 300 mm and 400 mm

• Separable two-piece terminal block

Sequence operation: Logic sequence and step sequence

(max. 1068 commands)

Computation cycle: 50 msec. to 3 sec. (control cycle

selectable among 1, 2, 4, 8, 16, 32 and 64 times of the

computation cycle)

Typical Applications

MV output range: -15 - +115 %

• Replacement of conventional controllers

• Panel operation for small-scale instrumentation

Parameter setting: With touch panel or PC (Loop

Configuration Builder Software model: SFEW3E)

Self diagnostics: CPU monitoring with a watchdog timer

RUN contact: OFF in error detected by diagnostic (including

NestBus)

RELATED PRODUCTS

• PC Configurator cable (model: COP-US)

• Loop configuration builder software (model: SFEW3E Ver.

1.100 or later)

Short trend

Storing interval: 1, 2, 5, 10, 20, 30 sec.,

1, 2, 5, 10, 30, 60 min.

• PC configurator software (model: SCCFG Ver.1.83 or later)

Builder software and configurator software are

downloadable at M-System’s web site.

Capacity: 400 points (display 200 points)

■ Display

Display device: 4.3-inch TFT LCD

ACCESSORIES

Display colors: 256

• Precision resistor module (model: REM4): 2

Resolution: 480 × 272 pixels

• Cold junction sensor: 2

Pixel pitch: 0.198 × 0.198 mm (128 × 128 DPI)

Backlight: LED

• Mounting brackets: 2

• Connector adapter: 1

Backlight life: Approx. 50 000 hours (at 50 % brightness)

Note: The backlight can be replaced in M-System factory.

The LCD must be replaced at the same time.

Screen saver standby time: 1 to 99 minutes

Scaling range: -32000 to +32000

GENERAL SPECIFICATIONS

Construction: Panel flush mounting

Degree of protection: IP55; ensured for the front panel of

the unit independently mounted to a panel

Connection

Decimal point position: 10-1, 10-2, 10-3, 10-4, 10-5 or none

Scale divisions: 2 to 10

Engineering unit indication: Max. 8 characters

Auto/Man indicator: Green/Amber LED

Terminal screws: M3.5 screw terminals (torque 1.0 N·m)

Terminal fixing screws: M4 screw terminals

(torque 1.2 N·m)

Ethernet: RJ-45 Modular Jack

Screw terminal

Terminal screws: Nickel-plated steel (standard) or stainless

steel

Terminal fixing screws: Chrome-plated steel

Housing material: Flame-resistant resin (gray), steel

Isolation: Pv1 to Pv2 to supply output to Ai1 or Ai2 or Ai3 or

Ai4 to Di1 or Di2 or Di3 or Di4 or Di5 or Pi1 or Pi2 or Pi3 or

Pi4 or Pi5 to Di6 or Pi6 to Mv1 to Mv2 to Ao1 or Ao2 to Do1

to Do2 to Do3 to Do4 to Do5 to Do6 to NestBus to Modbus-

RTU to Modbus/TCP to power to FG

PID control: Single loop, cascade, advanced

Proportional band (P): 1 to 1000 %

Integral time (I): 0.01 to 100 minutes

Derivative time (D): 0.01 to 10 minutes

Auto-tuning: Limit cycle method

Alarm: PV high & low, deviation, rate of change

Computation: 48 functions blocks available for arithmetic

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 2/11

http://www.m-system.co.jp/

MODEL: SC200D

Transfer rate: 10 / 100 Mbps, Auto Negotiation

FACTORY DEFAULT

Protocol: Modbus/TCP

■ LOOP 1

Data: RTU (binary)

P : 100%

I : No integral action

D : No derivative action

Connections: 2

Transmission media:

PID

G02

10BASE-T (STP cable, category 5)

100BASE-TX (STP cable, category 5e)

Max. segment length: 100 meters

Port number: 502

SEQ

G81

Reverse Action

Pv 1

Mv 1

(PV /MV

)

1 – 5 V DC

4 – 20 mA DC

IP address: 192.168.0.1 (factory setting)

AL1

AL2

SUPPLY OUTPUT

Output voltage:

■ LOOP 2

P : 100%

: No integral action

D : No derivative action

Position Input

24 V DC ±10 % with no load

18 V DC min. at 20 mA

Current rating: ≤ 22 mA DC

∙Shortcircuit protection

Current limited: Approx. 30 mA

PID

G03

SEQ

G81

Reverse Action

Ai 2

Pv 2

(PV /MV

Do 2

)

1 – 5 V

Do 1

AL3

AL4

INPUT SPECIFICATIONS

■ Pv1, Pv2 (universal input)

∙Current input: 4 – 20 mA DC with input resistance 250 Ω

(REM4)

*1. Factory default setting

Use Loop Configuration Builder Software (model: SFEW3E)

to modify setting.

∙Voltage input: -10 – +10 V DC

-1 – +1 V DC

0 – 10 V DC

EXTERNAL INTERFACE

■ NestBus

1 – 5 V DC

0 – 1 V DC

Configuration: Bus type multi-drop

Standard: Conforms to TIA/EIA-485-A

Transfer rate: 19.2 kbps

Input resistance: ≥ 1 MΩ

∙Thermocouple input: K, E, J, T, B, R, S, C, N, U, L, P, PR (See

Table 1)

Protocol: NestBus (M-System’s own protocol)

Max. transmission distance: 1 kilometer

Transmission media:

Input resistance: ≥ 30 kΩ

Burnout sensing: ≤ 0.3 µA

Burnout indication: 115 % of the measuring range (upscale)

∙RTD input: Pt100 (JIS ’97, IEC), Pt100 (JIS ’89), JPt100 (JIS

’89), Pt50Ω (JIS ’81), Ni100 (See Table 2)

Maximum lead wire resistance: 100 Ω per wire

Burnout indication: 115 % of the measuring range (upscale)

Sensing current: ≤ 1 mA

Shielded twisted-pair cable (CPEV-S 0.9 dia.)

Terminating resistor: incorporated

Address setting: 0 - F (16 nodes)

■ Modbus-RTU

Configuration: Half-duplex, asynchronous, no procedure

Standard: Conforms to TIA/EIA-485-A

Max. transmission distance: 500 meters

Transfer rate: 4800, 9600, 19.2 k, 38.4 k bps

Data bit: 8

∙Potentiometer input: Total resistance 100 Ω to 10 kΩ

Minimum span: 50 % of total resistance

Excitation: ≤ 0.6 V DC

■ Ai1, Ai2, Ai3, Ai4

Parity bit: Odd, even, none

∙Voltage input: 1 – 5 V DC

Max. node number: 15 (except the master)

Transmission media:

Input resistance: ≥ 1 MΩ

■ Pi1, Pi2, Pi3, Pi4, Pi5: Dry contact

(Di1 through Di5 are assigned to the same terminals

respectively.)

Shielded twisted-pair cable (CPEV-S 0.9 dia.)

Terminating resistor: incorporated

Node address setting: 1 - 247

Maximum frequency: 20 Hz

■ Modbus/TCP (Ethernet)

Minimum pulse width: 25 msec.

Common: Negative common per 5 points

Physical layer standard: IEEE 802.3u

Data link layer: 10BASE-T / 100BASE-TX

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 3/11

http://www.m-system.co.jp/

MODEL: SC200D

Sensing: Approx. 12 V DC, 6 mA

ON voltage/resistance: ≤ 2.25 V, ≤ 1.5 kΩ

OFF voltage/resistance: ≥ 11.25 V ≥ 15 kΩ

■ Pi6: Dry contact

OUTPUT SPECIFICATIONS

■ Mv1, Mv2

∙Current output: 4 – 20 mA DC

Load resistance: ≤ 600 Ω

(Di6 is assigned to the same terminal.)

Maximum frequency: 10 kHz

■ Ao1, Ao2

∙Voltage output: 1 – 5 V DC

Minimum pulse width: 0.05 msec.

Common: Negative common

Load resistance: ≥ 10 kΩ

■ Discrete Output

Sensing: Approx. 12 V DC, 12 mA

ON voltage/resistance: ≤ 2 V, ≤ 1.5 kΩ

OFF voltage/resistance: ≥ 11 V, ≥ 15 kΩ

Excitation: 12 V DC ±10%, 15 mA

Current limiting circuit: Approx. 30 mA

■ Di1, Di2, Di3, Di4, Di5: Dry contact

(Pi1 through Pi5 are assigned to the same terminals

respectively.)

(Do1 is used as increase pulse, and Do2 as decrease pulse.)

∙Do1, Do2, Do3, Do4, Do5, RUN contact (Do6): Relay

contact

Rated load: 250 V AC @1 A (cos ø = 1)

30 V DC @1 A (resistive load)

Maximum switching voltage: 250 V AC or 30 V DC

Maximum switching power: 250 VA (AC) or 60 W (DC)

Minimum load: 5 V DC @10 mA

Common: Negative common per 5 points

Sensing: Approx. 12 V DC, 6 mA

ON voltage/resistance: ≤ 2.25 V, ≤ 1.5 kΩ

OFF voltage/resistance: ≥ 11.25 V ≥ 15 kΩ

■ Di6: Dry contact

Mechanical life: 2 × 10 cycles

∙Do1, Do2, Do3, Do4, Do5: Photo MOSFET relay

Rating: 200 V AC/DC @0.5 A (resistive load)

ON resistance: 2.1 Ω

Maximum frequency: 10 Hz @24 V, 10 mA

ON delay time: ≤ 5.0 msec.

(Pi6 is assigned to the same terminal.)

Common: Negative common

OFF delay time: ≤ 3.0 msec.

Sensing: Approx. 12 V DC, 12 mA

ON voltage/resistance: ≤ 2 V, ≤ 1.5 kΩ

OFF voltage/resistance: ≥ 11 V, ≥ 15 kΩ

[Table 1 (Thermocouple input)]

INSTALLATION

Power input

∙AC:

USABLE

RANGE (°C)

CONFORMANCE

RANGE (°C)

Approx. 25 VA at 100 V AC

T/C

K (CA)

Approx. 40 VA at 240 V AC

-272 to +1472

-272 to +1100

-260 to +1300

-272 to +500

24 to 1920

-150 to +1370

-170 to +1000

-180 to +1200

-170 to +400

400 to 1760

200 to 1760

0 to 1760

•DC: ≤ 650 mA

E (CRC)

Operating temperature: -5 to +55°C (23 to 131°F)

Operating humidity: 5 to 90 %RH (non-condensing)

Mounting: Panel flush mounting (high-density mounting in

horizontal direction)

J (IC)

T (CC)

B (RH)

-100 to +1860

-52 to +2416

-272 to +1400

-252 to +700

-252 to +1000

-52 to +1496

-52 to +1860

Weight:

Approx. 2.0 kg (4.41 lb) for 300 mm depth type

Approx. 2.5 kg (5.51 lb) for 400 mm depth type

C (WRe 5-26)

0 to 2315

-130 to +1300

-200 to +600

-200 to +900

0 to 1395

PERFORMANCE

Accuracy

P (Platinel II)

(PR)

0 to 1760

DC input: ±0.1 % ±1 digit

Thermocouple input: ±1℃ ±1 digit

±2℃ ±1 digit for B, R, S, C and PR

RTD input: ±1℃ ±1 digit

Overrange input (out of the usable range) is handled as burnout.

[Table 2 (RTD input)]

USABLE

RANGE (°C)

CONFORMANCE

RANGE (°C)

RTD

Potentiometer input: ±0.2 % ±1 digit

DC output: ±0.1 %

Pt 100 (JIS ’97, IEC

Pt 100 (JIS ’89)

JPt 100 (JIS ’89)

Pt 50Ω (JIS ’81)

Ni 100

)

-240 to +900

-236 to +560

-236 to +700

-100 to +252

-200 to +850

-200 to +660

-200 to +510

-200 to +649

-80 to +250

Precision resistor module (REM4): ±0.1 %

Cold junction compensation:

±2°C at 25°C ±10°C

±4°C for S, R and PR

Overrange input (out of the usable range) is handled as burnout.

Temp. coefficient: ±0.015 %/°C (±0.008 %/°F)

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 4/11

http://www.m-system.co.jp/

MODEL: SC200D

DC input: ±0.015 %/°C (±0.008 %/°F)

Thermocouple input: ±0.015 %/°C (±0.008 %/°F)

RTD input: ±0.015 %/°C (±0.008 %/°F)

Potentiometer input: ±0.015 %/°C (±0.008 %/°F)

DC output: ±0.015 %/°C (±0.008 %/°F)

Precision resistor module (REM4): ±0.015 %/°C (±0.008

%/°F)

Line voltage effect: ±0.1 % over voltage range

Calendar clock accuracy: Monthly deviation 3 minutes at

25°C

RAM memory duration in power failure for hot start:

10 minutes assured

Insulation resistance: ≥ 100 MΩ with 500 V DC

Dielectric strength:

1500 V AC @ 1 minute

(Pv1 or supply output to Pv2 or Ai1 or Ai2 or Ai3 or Ai4 to

Di1 or Di2 or Di3 or Di4 or Di5 or Pi1 or Pi2 or Pi3 or Pi4 or

Pi5 to Di6 or Pi6 to Mv1 to Mv2 or Ao1 or Ao2 to Do1 to Do2

or Do3 or Do4 or Do5 or Do6 to NestBus to Modbus-RTU to

power to FG)

500 V AC @ 1 minute (Modbus/TCP to FG)

500 V AC @ 1 minute (Pv2 to Ai1 or Ai2 or Ai3 or Ai4)

500 V AC @ 1 minute (Mv2 to Ao1 or Ao2)

500 V AC @ 1 minute (Do2 to Do3 to Do4 to Do5 to Do6)

500 V AC @ 1 minute (Pv1 to supply output)

STANDARDS & APPROVALS

EU conformity:

EMC Directive

EMI EN 61000-6-4

EMS EN 61000-6-2

Low Voltage Directive

EN 61010-1

Measurement Category II (contact output)

Installation Category II (power)

Pollution degree 2

Input or output to contact output – Basic insulation (300

Input or output to power - Reinforced insulation (300 V)

RoHS Directive

EN 50581

Protection against access to the terminal blocks:

Finger protection (VDE 0660-514)

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 5/11

http://www.m-system.co.jp/

MODEL: SC200D

EXTERNAL VIEW

Auto/Man

1. TFT Color LCD with touch panel

Provides operation and engineering views to facilitate monitoring and setting

2. Configurator jack and cap

Connects with a PC where Loop Configuration Builder Software (model: SFEW3E) or PC configurator software (model: SCCFG)

is installed via a PC configurator cable (model: COP-US) and enables programming and parameter setting

3. MV value (DOWN) button

4. Acceleration button

(Accelerates MV signal’s changing speed by pressing simultaneously with MV value button)

5. MV value (UP) button

6. Auto / Man selector (changes the control mode for MV output)

COMMUNICATION CABLE CONNECTIONS

■ NestBus

SML

This unit

■ Modbus-RTU

R2K-1

RS-485

This unit

RS-232-C

*1. Internal terminating resistor is used when the device is at the end of a transmission line.

*2. Install shield cables to all sections and ground them at single point.

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 6/11

http://www.m-system.co.jp/

MODEL: SC200D

EXTERNAL DIMENSIONS & TERMINAL ASSIGNMENTS unit: mm (inch)

175 (6.89)

210 (8.27) max.

RJ-45 CONNECTOR

52–M3.5 SCREW

MOUNTING BRACKETS

TERMINAL COVER

4–M4 SCREW FOR

FIXING TERMINAL

Jack cap

1 (.04)

67.5 (2.66)

(.94)

*1. For Modbus/TCP only

*2. Option /3:

Option /4:

300 mm (11.81”)

400 mm (15.75”)

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 7/11

http://www.m-system.co.jp/

MODEL: SC200D

MOUNTING REQUIREMENTS unit: mm

■ PANEL CUTOUT unit: mm

• Single mounting

• Clustered mounting

68 ^+0.7

[68+72×(n - 1)] ⁺¹

n = number of units

Panel thickness 2.3 – 20

■ Caution

• IP55 is ensured for the front panel of the unit mounted independently according to a panel. Test the sealing at the mounting

surface once the device is installed.

• Set the unit on a vertical surface with its operation buttons at the lower side. Mounting in other directions may cause heat

built up inside the unit and shorten its life span or degrade its performance.

• Ensure that there is sufficient space for ventilation inside a panel. Do not install above the devices that generate high heat

such as heaters, transformers or resistors. Leave at least 30 mm (1.2 inch) space above, below and behind the unit for

maintenance purpose (e.g. wiring, removing or installing).

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 8/11

http://www.m-system.co.jp/

MODEL: SC200D

SCHEMATIC CIRCUITRY & CONNECTION DIAGRAM

Isolation

Shielded Twisted-pair Cable

−

To Other

NestBus

Devices

Discrete

Input

Circuit

Di 1 / Pi 1

Di 2 / Pi 2

Di 3 / Pi 3

Jumper*

SHLD

Isolation

Shielded Twisted-pair Cable

−

To Other

Modbus-RTU

Devices

Di 4 / Pi 4

Di 5 / Pi 5

−

Jumper*

SHLD

Isolation

Sensor

Excitation

SENSOR EXC

RJ-45 CONNECTOR Modbus/TCP

Di 6 / Pi 6

Do 1

Increase Pulse

Input

Circuit

INPUT

COM

Isolation

Do 2

Decrease Pulse

Digital

A/D

Converter

Computation

UNIVERSAL INPUT

Pv 1

Pv 2

Do 3

A/D

Converter

Do 4

UNIVERSAL INPUT

Isolation

Do 5

A/D

Converter

Ai 1

Ai 2

Ai 3

Ai 4

Do 6

RUN CONTACT

Isolation

Output

Driver

−

Mv 1

Mv 2

−

Output

Driver

−

Isolation

Excitation

Supply

–

Output

Driver

2-WIRE TRANSMITTER

PC CONFIGURATOR/

BUILDER SOFTWARE

Ao 1

Output

Driver

−

JACK

Ao 2

Display /

Setting

U (+)

V (–)

POWER

*1. Close across the terminals 27 – 28 when the unit is located at the end of a transmission line (= no cross-wiring).

*2. Close across the terminals 14 – 15 when the unit is located at the end of a transmission line (= no cross-wiring).

■ DISCRETE INPUT PULSE

■ UNIVERSAL INPUT CONNECTION E.G.

INPUT CONNECTION E.G.:

POTENTIOMETER

max.

RTD

+12V

–

2-Wire

XMTR

Dry contact

T/C

1 or 2kΩ

–

VOLT / CURRENT

INPUT

–

min.

CJC SENSOR

*3. Connect input resistor module (model: REM4) for current input.

*4. Connect CJC sensor for thermocouple input.

*5. Connect input resistor module (model: REM4).

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 9/11

http://www.m-system.co.jp/

MODEL: SC200D

SYSTEM CONFIGURATION EXAMPLES

■ SINGLE LOOP CONTROL

■ CASCADE CONTROL

Multi-Function PID Controller

Model: SC200D

Multi-Function PID Controller

Model: SC200D

Decrease

Pulse

Increase

Pulse

Decrease

Pulse

Relay Box

Position

Feedback

Increase

Pulse

Power

Supply

Power

Supply

Relay Box

Flow

Level

■ I/O EXPANDED VIA NESTBUS

NestBus

Multi-Function PID Controller

Model: SC200D

Multi-Function PID Controller

Model: SC200D

Remote I/O Module

Model: SML

PWR

RUN

Decrease

Pulse

Increase

Pulse

Decrease

Pulse

Increase

Pulse

Power

Supply

Power

Supply

Relay Box

■ CONTROL / SUPERVISION VIA MODBUS/TCP

SCADA System

Modbus/TCP

Ethernet Communication Adaptor

Model: 72EM2-M4

Multi-Function PID Controller

Model: SC200D

ETHERNET

RS-485

RUN

SEND

FIELD

CNFG

Decrease

Pulse

Increase

Pulse

Power

Supply

Relay Box

Modbus-RTU

Multi-Function PID Controller

Model: SC200D

Multi-Function PID Controller

Model: SC200D

Decrease

Pulse

Increase

Pulse

Decrease

Pulse

Increase

Pulse

Power

Supply

Power

Supply

Relay Box

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 10/11

http://www.m-system.co.jp/

MODEL: SC200D

■ CONTROL / SUPERVISION VIA MODBUS-RTU

SCADA System

RS-485/RS-232-C

Converter

Model: R2K-1

Modbus-RTU

Multi-Function PID Controller

Model: SC200D

Multi-Function PID Controller

Model: SC200D

Decrease

Pulse

Increase

Pulse

Decrease

Pulse

Increase

Pulse

Power

Supply

Power

Supply

Relay Box

Specifications are subject to change without notice.

SC200D SPECIFICATIONS

ES-6334 Rev.0 Page 11/11

http://www.m-system.co.jp/

SC200D-22-M2/3 [MSYSTEM]

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