935321189117 [NXP]
Peizoresistive Sensor;型号: | 935321189117 |
厂家: | NXP |
描述: | Peizoresistive Sensor 传感器 换能器 |
文件: | 总22页 (文件大小:477K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
Pressure
MPXV4006
Rev 3, 1/2009
Freescale Semiconductor
+
Integrated Silicon Pressure Sensor
MPXV4006
Series
Integrated
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
Pressure Sensor
0 to 6 kPa (0 to 0.87 psi)
0.2 to 4.8 V Output
The MPXV4006 series piezoresistive transducers are state-of-the-art
monolithic silicon pressure sensors designed for the appliance, consumer,
health care and industrial market. The analog output can be read directly into
the A/D input of Freescale microcontrollers. This transducer combines
advanced micromachining techniques, thin-film metallization, and bipolar
processing to provide an accurate, high level analog output signal that is
proportional to the applied pressure. The axial port has been modified to
accommodate industrial grade tubing.
Application Examples
•
•
•
•
Washing Machine Water Level
Measurement (Reference AN1950)
Ideally Suited for Microprocessor or
Microcontroller-Based Systems
Features
Appliance Liquid Level and Pressure
Measurement
•
•
•
•
•
2.5% Maximum Error over +10°C to +60°C with Auto Zero
5% Maximum Error over +10°C to +60°C without Auto Zero
Durable Thermoplastic (PPS) Package
Respiratory Equipment
Available in Surface Mount (SMT) or Through-Hole (DIP) Configurations
Available with Standard Fluorosilicone Gel or Media Resistant Gel
ORDERING INFORMATION
# of Ports
Pressure Type
Option
Device
Package
Options
Case
No.
Device Name
Surface Through-
Marking
None Single Dual Gauge Differential Absolute
Mount
Hole
Small Outline Package (Media Resistant Gel) (MPVZ4006 Series)
MPVZ4006GW6U
MPVZ4006GW7U
MPVZ4006G6U
MPVZ4006G6T1
MZ4006GW
MZ4006GW
MPVZ4006G
MPVZ4006G
Rail
Rail
Rail
1735
1560
482
•
•
•
•
•
•
•
•
•
•
•
•
Tapeand
Reel
482
MPVZ4006G7U
MPVZ4006G
Rail
482B
•
•
•
•
Small Outline Package (MPXV4006 Series)
MPXV4006GC6U
MPXV4006G
MPXV4006G
Rail
482A
482A
•
•
•
•
•
•
MPXV4006GC6T1
Tapeand
Reel
MPXV4006GC7U
MPXV4006GP
MPXV4006DP
MPXV4006G
MPXV4006GP
MPXV4006DP
Rail
Tray
Tray
482C
1369
1351
•
•
•
•
•
•
•
•
© Freescale Semiconductor, Inc., 2006-2009. All rights reserved.
Pressure
SMALL OUTLINE PACKAGE SURFACE MOUNT
MPVZ4006G6U/T1
CASE 482-01
MPVZ4006GW6U
CASE 1735-01
MPXV4006GC6U/C6T1
CASE 482A-01
MPXV4006DP
CASE 1351-01
MPXV4006GP
CASE 1369-01
SMALL OUTLINE PACKAGE THROUGH-HOLE
MPXV4006GC7U
CASE 482C-03
MPVZ4006GW7U
CASE 1560-02
MPVZ4006G7U
CASE 482B-03
MPXV4006
Sensors
2
Freescale Semiconductor
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
Pressure Range
POP
0
—
6.0
kPa
612
mm H2O
Supply Voltage(1)
Supply Current
Full Scale Span(2)
Offset(3)(5)
VS
IS
4.75
—
5.0
—
5.25
10
Vdc
mAdc
V
VFSS
Voff
V/P
—
4.6
—
0.152
—
0.265
0.378
—
V
Sensitivity
766
mV/kPa
7.511
mV/mm H2O
Accuracy(4)(5)
(10 to 60°C)
—
—
—
—
—
—
±2.46
±5.0
%VFSS with
auto zero
%VFSS without
auto zero
1. Device is ratiometric within this specified excitation range.
2. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure, at 25°C.
Offset Stability:
Output deviation, after 1000 temperature cycles, -30 to 100°C, and 1.5 million pressure cycles, with
minimum rated pressure applied.
TcSpan:
TcOffset:
Output deviation over the temperature range of 10° to 60°C, relative to 25°C.
Output deviation with minimum pressure applied, over the temperature range of 10° to 60°C, relative to 25°C.
5. Auto Zero at Factory Installation: Due to the sensitivity of the MPXV4006, external mechanical stresses and mounting position can affect the
zero pressure output reading. To obtain the 2.46% FSS accuracy, the device output must be “autozeroed'' after installation. Autozeroing is
defined as storing the zero pressure output reading and subtracting this from the device's output during normal operations. The specified
accuracy assumes a maximum temperature change of ±5°C between autozero and measurement.
MPXV4006
Sensors
Freescale Semiconductor
3
Pressure
Maximum Ratings
Table 2. Maximum Ratings(1)
Parametrics
Symbol
Pmax
Tstg
Value
24
Units
kPa
°C
Maximum Pressure (P1 > P2)
Storage Temperature
-30° to +100°
+10° to +60°
Operating Temperature
TA
°C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
VS
2
Gain Stage #2
Thin Film
4
Vout
and
Ground
Reference
Shift Circuitry
Temperature
Compensation
and
Sensing
Element
Gain Stage #1
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
for small outline package device
3
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
MPXV4006
Sensors
Freescale Semiconductor
4
Pressure
On-Chip Temperature Compensation and Calibration
The performance over temperature is achieved by
integrating the shear-stress strain gauge, temperature
compensation, calibration and signal conditioning circuitry
onto a single monolithic chip.
Figure 2 illustrates the Differential or Gauge configuration
in the basic chip carrier (Case 482). A gel die coat isolates the
die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPXV4006/MPVZ4006 series sensor operating
characteristics are based on use of dry air as pressure media.
Media, other than dry air, may have adverse effects on sensor
performance and long-term reliability. Internal reliability and
qualification test for dry air, and other media, are available
from the factory. Contact the factory for information regarding
media tolerance in your application.
Figure 3 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D input
of a microprocessor or microcontroller. Proper decoupling of
the power supply is recommended.
Figure 4 and Figure 5 shows the sensor output signal
relative to pressure input. Typical, minimum and maximum
output curves are shown for operation over a temperature
range of 10°C to 60°C using the decoupling circuit shown in
Figure 3. The output will saturate outside of the specified
pressure range.
Fluorosilicone
Gel Die Coat
Stainless
Steel Cap
Die
+5 V
P1
Wire
OUTPUT
Vout
Thermoplastic
Case
Bond
Vs
IPS
Lead
Frame
1.0 μF
0.01 μF
GND
470 pF
P2
Differential Sensing
Element
Die Bond
Figure 3. Recommended Power Supply Decoupling
and Output Filtering Recommendations
(For additional output filtering, please refer to
Application Note AN1646.)
Figure 2. Cross Sectional Diagram SOP
(not to scale)
5.0
5.0
Transfer Function (kPa):
out = VS*[(0.1533*P) + 0.053] ± 2.46% VFSS
Transfer Function (kPa):
4.5
4.0
3.5
3.0
2.5
2.0
1.5
1.0
4.5
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
0
V
V
out = VS*[(0.1533*P) + 0.053] ± 5.0% VFSS
VS = 5.0 Vdc
TEMP = 10 to 60°C
VS = 5.0 Vdc
TEMP = 10 to 60°C
TYPICAL
MAX
MAX
TYPICAL
MIN
MIN
0.5
0
0
2.0
4.0
6.0
0
2.0
4.0
6.0
Differential Pressure (kPa)
Differential Pressure (kPa)
Figure 4. Output versus Pressure Differential
at ±5.0% VFSS (without auto zero, Note 5 in
Operating Characteristics)
Figure 5. Output versus Pressure Differential
at ±2.46% VFSS (with auto zero, Note 5 in
Operating Characteristics)
MPXV4006
Sensors
Freescale Semiconductor
5
Pressure
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing a gel die coat which
isolates the die from the environment. The pressure sensor is
designed to operate with positive differential pressure
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Table 3. Pressure (P1)/Vacuum (P2) Side Identification Table
Part Number
MPVZ4006GW6U
Case Type
1735-01
1560-02
482-01
Pressure (P1) Side Identifier
Vertical Port Attached
Vertical Port Attached
Stainless Steel Cap
MPVZ4006GW7U
MPVZ4006G6U/T1
MPVZ4006G7U
MPXV4006GC6U/T1
MPXV4006GC7U
MPXV4006GP
482B-03
482A
Stainless Steel Cap
Vertical Port Attached
Vertical Port Attached
Side with Port Attached
Side with Part Marking
482C-03
1369-01
1351-01
MPXV4006DP
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total
design. The footprint for the surface mount packages must be
the correct size to ensure proper solder connection interface
between the board and the package. With the correct
footprint, the packages will self align when subjected to a
solder reflow process. It is always recommended to design
boards with a solder mask layer to avoid bridging and
shorting between solder pads.
0.100 TYP
2.54
0.660
16.76
0.060 TYP 8X
1.52
0.300
7.62
inch
mm
0.100 TYP 8X
2.54
Figure 6. SOP Footprint (Case 482)
MPXV4006
Sensors
6
Freescale Semiconductor
Pressure
CASE 1351-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
Freescale Semiconductor
7
Pressure
CASE 1351-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
8
Freescale Semiconductor
Pressure
CASE 1369-01
ISSUE B
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
Freescale Semiconductor
9
Pressure
CASE 1369-01
ISSUE B
SMALL OUTLINE PACKAGE
MPXV4006
10
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
-A-
D 8 PL
0.25 (0.010)
4
1
M
S
S
A
T
B
5
8
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
-B-
G
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
INCHES
MIN MAX
MILLIMETERS
S
N
DIM
A
B
C
D
G
H
J
K
M
N
MIN
10.54
10.54
5.38
MAX
10.79
10.79
5.84
0.415 0.425
0.415 0.425
0.212 0.230
0.038 0.042
0.100 BSC
0.96
1.07
2.54 BSC
0.002 0.010
0.009 0.011
0.061 0.071
0.05
0.23
1.55
0˚
0.25
0.28
1.80
7˚
H
C
J
0˚
7˚
-T-
0.405 0.415
0.709 0.725
10.29
18.01
10.54
18.41
SEATING
PLANE
S
PIN 1 IDENTIFIER
K
M
CASE 482-01
ISSUE O
SMALL OUTLINE PACKAGE
-A-
NOTES:
4
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
5
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE
MOLD PROTRUSION.
-B-
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
G
8
D 8 PL
1
M
S
S
A
0.25 (0.010)
T B
INCHES
MILLIMETERS
DIM MIN MAX MIN
MAX
10.79
10.79
5.59
DETAIL X
A
B
C
D
G
J
K
M
N
S
0.415
0.425 10.54
0.425 10.54
S
N
0.415
0.210
0.026
0.220
0.034
5.33
0.66
PIN 1 IDENTIFIER
0.864
0.100 BSC
2.54 BSC
0.009
0.100
0˚
0.011
0.120
15˚
0.23
2.54
0˚
0.28
3.05
15˚
C
0.405
0.540
0.415 10.29
0.560 13.72
10.54
14.22
SEATING
PLANE
-T-
K
M
J
DETAIL X
CASE 482B-03
ISSUE B
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
Freescale Semiconductor
11
Pressure
PACKAGE DIMENSIONS
–A–
D 8 PL
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4
M
S
S
0.25 (0.010)
T
B
A
5
N
–B–
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT.
G
INCHES
MILLIMETERS
8
1
DIM
A
B
C
D
MIN
MAX
0.425
0.425
0.520
0.042
MIN
10.54
10.54
12.70
0.96
MAX
10.79
10.79
13.21
1.07
0.415
0.415
0.500
0.038
S
W
G
H
J
K
M
N
S
V
W
0.100 BSC
2.54 BSC
0.002
0.009
0.061
0
0.010
0.011
0.071
7
0.05
0.23
1.55
0
0.25
0.28
1.80
7
V
0.444
0.709
0.245
0.115
0.448
0.725
0.255
0.125
11.28
18.01
6.22
2.92
11.38
18.41
6.48
3.17
C
H
J
–T–
SEATING
PLANE
PIN 1 IDENTIFIER
M
K
CASE 482A-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
Freescale Semiconductor
12
Pressure
PACKAGE DIMENSIONS
CASE 1560-02
ISSUE C
SMALL OUTLINE PACKAGE
MPXV4006
13
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
CASE 1560-02
ISSUE C
SMALL OUTLINE PACKAGE
MPXV4006
14
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
CASE 1560-02
ISSUE C
SMALL OUTLINE PACKAGE
MPXV4006
15
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
CASE 1735-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
16
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
CASE 1735-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
17
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
CASE 1735-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
18
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
–A–
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT.
6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
4
5
8
N
–B–
D 8 PL
G
M
S
S
INCHES
MILLIMETERS
0.25 (0.010)
T
B
A
1
DIM
A
B
C
D
MIN
MAX
0.425
0.425
0.520
0.034
MIN
10.54
10.54
12.70
0.66
MAX
10.79
10.79
13.21
0.864
0.415
0.415
0.500
0.026
DETAIL X
S
W
G
J
K
M
N
S
0.100 BSC
2.54 BSC
0.009
0.100
0
0.011
0.120
15
0.23
2.54
0
0.28
3.05
15
PIN 1
IDENTIFIER
V
0.444
0.540
0.245
0.115
0.448
0.560
0.255
0.125
11.28
13.72
6.22
2.92
11.38
14.22
6.48
3.17
C
V
W
SEATING
PLANE
–T–
K
M
J
DETAIL X
CASE 482C-03
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
19
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
2 PLACES 4 TIPS
0.006 (0.15) C A
B
E
A
GAGE
PLANE
e
5
4
1
e/2
.014 (0.35)
θ
L
A1
D
F
DETAIL G
8
NOTES:
8X b
0.004 (0.1)
1. CONTROLLING DIMENSION: INCH.
2. INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M, 1994.
3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE
MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR
PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152)
PER SIDE.
4. DIMENSION "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR
PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM.
STYLE 1:
PIN 1. GND
STYLE 2:
PIN 1. N/C
2. Vs
M
C
A
B
2. +Vout
3. Vs
3. GND
4. Vout
5. N/C
6. N/C
7. N/C
8. N/C
4. -Vout
5. N/C
6. N/C
7. N/C
8. N/C
E1
B
INCHES
DIM MIN MAX
0.370
A1 0.002
MILLIMETERS
MIN MAX
N
T
∅
A
0.390
0.010
0.042
0.485
0.700
0.485
9.39
0.05
0.96
9.91
0.25
1.07
b
D
E
0.038
0.465
0.680
11.81 12.32
17.27 17.78
11.81 12.32
2.54 BSC
E1 0.465
M
A
e
F
K
L
M
N
P
T
θ
0.100 BSC
0.240
0.115
0.040
0.270
0.160
0.009
0.110
0˚
0.260
0.135
0.060
0.290
0.180
0.011
0.130
7˚
6.10
2.92
1.02
6.86
4.06
0.23
2.79
0˚
6.60
3.43
1.52
7.37
4.57
0.28
3.30
7˚
8X
0.004 (0.1)
K
P
DETAIL G
SEATING
PLANE
C
CASE 1351-01
ISSUE O
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
Freescale Semiconductor
20
Pressure
PACKAGE DIMENSIONS
2 PLACES 4 TIPS
0.008 (0.20) C A
B
E
A
GAGE
PLANE
e
5
4
1
e/2
.014 (0.35)
θ
L
A1
D
F
DETAIL G
8
NOTES:
1. CONTROLLING DIMENSION: INCH.
2. INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M, 1994.
3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE
MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR
PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152)
PER SIDE.
4. DIMENSION "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR
PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM.
8X b
0.004 (0.1)
M
C
A
B
E1
B
INCHES
DIM MIN MAX
0.300
A1 0.002
MILLIMETERS
MIN
7.11
MAX
7.62
0.25
N
T
∅
A
0.330
0.010
0.042
0.485
K
0.05
0.96
b
D
E
0.038
0.465
0.717 BSC
1.07
12.32
11.81
18.21 BSC
E1 0.465
0.485
11.81
2.54 BSC
12.32
A
M
e
F
K
L
M
N
P
T
θ
0.100 BSC
0.245
0.120
0.061
0.270
0.080
0.009
0.115
0˚
0.255
0.130
0.071
0.290
0.090
0.011
0.125
7˚
6.22
3.05
1.55
6.86
2.03
0.23
2.92
0˚
6.47
3.30
1.80
7.36
2.28
0.28
3.17
7˚
8X
0.004 (0.1)
P
DETAIL G
SEATING
PLANE
C
CASE 1369-01
ISSUE O
SMALL OUTLINE PACKAGE
MPXV4006
Sensors
Freescale Semiconductor
21
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