D6F-PH [OMRON]
MEMS Differential Pressure Sensor; MEMS差压传感器
| 型号： | D6F-PH |
| 厂家： | 
OMRON ELECTRONICS LLC |
| 描述： | MEMS Differential Pressure Sensor |
| 文件： | 总6页 (文件大小：333K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
MEMS Differential Pressure Sensor
D6F-PH
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of ±±3 R.D.
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of bypass
configuration
• RoHS Compliant
Ordering Information
Measurement Range
0 to 250 Pa (0 to 1 in. H2O)
-50 to +50 Pa (± 0.2 in. H2O)
-500 to +500 Pa (± 2 in. H2O)
Applicable Fluid
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
Air
Note: The Sensor can be calibrated for different gas types. Consult Omron.
Characteristics
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
± 500 Pa
Measurement Range (See Note 1)
Calibration Gas (See Note 2)
Port Type
0 to 250 Pa
± 50 Pa
Air
Barb joint, Maximum outside diameter: 4.9mm
2.± to ±.6 VDC
Power Supply
Current Consumption
Resolution
6 mA max. with no load and VCC of ±.± V, GND=0 VDC, 25°C
12 bit
Zero Point Tolerance (See Note 4)
Span Tolerance (See Note 4)
Temperature Compensation
± 0.2 Pa
± ±3 R.D.
Yes
Span shift due to Temperature Variation
Response Time
± 0.53 R.D. per 10°C
25 ms typical at 12 bit resolution (50 ms max). The processing time is 6 ms typical at 12 bit resolution.
Gas Flow through Sensor (See Note 3)
Interface
≤ 6± mL/min
≤ 2± mL/min
≤ 100 mL/min
I2C
Case Material
PPS
Degree of Protection
Withstand Pressure
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
IEC IP40
10 kPa
-20 to 80°C (with no condensation or icing)
±5 to 853 RH (with no condensation or icing)
-40 to 80°C (with no condensation or icing)
±5 to 853 RH (with no condensation or icing)
Insulation Resistance
Dielectric Strength
Weight
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
5.2 g
Note: 1. At standard atmospheric pressure (101±.25 hPa).
2. Dry gas must not contain large particles, e.g., dust, oil or mist.
3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow
by differential pressure is shown in the “Engineering Data” section.
4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
MEMS Differential Pressure Sensor D6F-PH
1
Engineering Data
■ Output Characteristics
D6F-PH0025AD1
70000
60000
50000
40000
±0000
20000
10000
0
Differential
pressure
(Pa)
0
50
100
150
200
250
Output
(Hex)
1024
1±024
25024
±7024
49024
61024
(0x0400) (0x±2E0) (0x61C0) (0x90A0) (0xBF80) (0xEE60)
Differential pressure conversion formula:
DP = (Op - 1024) / 60000 x 250
DP = Differential pressure, OP = Output
0
50
100
150
200
250
Differential pressure (Pa)
D6F-PH0505AD3
70000
60000
50000
40000
±0000
20000
10000
0
Differential
pressure
(Pa)
50
-50
-30
-10
0
10
30
Output
(Hex)
1024
1±024
25024
±1024
±7024
49024
61024
(0x0400) (0x±2E0) (0x61C0) (0x79±0) (0x90A0) (0xBF80) (0xEE60)
Differential pressure conversion formula:
DP = (Op - 1024) / 60000 x 100 - 50
DP = Differential pressure, OP = Output
-50
-±0
-10
10
±0
50
Differential pressure (Pa)
D6F-PH5050AD3
70000
60000
50000
40000
±0000
20000
10000
0
Differential
pressure
(Pa)
500
-500
-300
-100
0
100
300
Output
(Hex)
1024
11024
1±024
16024
21024
±1024
61024
(0x0400) (0x2B10) (0x±2E0) (0x±E98) (0x5220) (0x79±0) (0xEE60)
Differential pressure conversion formula:
DP = (Op - 1024) / 60000 x 1000 - 500
DP = Differential pressure, OP = Output
-500
-±00
-100
100
±00
500
Note: Measurement conditions: Power supply voltage of ±.± ± 0.1 VDC, ambient tem-
Differential pressure (Pa)
perature of 25 ± 5°C, and ambient humidity of 253 to 753.
Relation Between Pressure and Flow Rate
Electrical Connection
VCC
50
40
pull-up resistor 2.2kΩ
±0
20
10
SDA
Sensor
(slave)
Master
0
GND
-10
-20
-±0
-40
-50
VCC ±.±V
SCL
-600
-400
-200
0
200
400
600
pull-up resistor 2.2kΩ
Pressure (Pa)
VCC
■ Communication
Method
I2C
Master/Slave
Slave / Address: HEX: 0x6C
BIN: 110_1100 (7bit)
Fast Mode 400kHz
Speed mode
Signals
SCL
Serial Clock
Data Signal
SDA
2
MEMS Differential Pressure Sensor D6F-PH
Dimensions
(unit: mm)
1.2
±.1
4:SCL
±:VCC
2:GND
1:SDA
22
2-
4
2- 4.9
2-
4
2-through hole
2
2-R2
±.7
Pin header : 8±0-80-004-±0-001101
4-2
4- 0.48
18
7.05
Low-pressure side
2-through hole 2.2
16.5
4-through hole 0.8
±-2
5.25
2-through hole
2
High-pressure side
Recommendation size for pin header installation (tolerances : ±0.1)
Precautions
!WARNING
!CAUTION
The D6F is built for use with general-purpose devices. In cases
such as those described below, where safety is required, imple-
ment measures to ensure the safety of the system and all devices,
such as fail-safe designs, redundancy designs, and regular main-
tenance.
Make sure that the power to all equipment is turned OFF before
you install the Sensor. Installing the Sensor while the power supply
is ON may result in electrical shock or abnormal operation.
• Safety devices for ensuring safety for persons
• Transportation equipment control and Automotive control (such
as applications to stop operation)
• Aviation and space equipment
• Nuclear power equipment
Do not use the D6F for applications in which D6F operation would
directly affect human life.
MEMS Differential Pressure Sensor D6F-PH
±
■ Correct Use
Fluids, Tubes, and Sensor Installation
Operating Environment
All Models
Do not use the Sensor in the following locations:
• Locations directly subject to heat radiated from heating equipment
• Locations subject to water or oil
(1) Use clean fluids. Dust and mist can affect the characteristics of
the Sensor or damage the Sensor. Install a filter and mist separator
on the upstream tube.
(Not required for the D6F-W@A1, D6F-P and D6F-PH.)
• Locations subject to direct sunlight
(2) Do not use combustible gases (e.g., hydrogen), corrosive gases
(e.g., chlorine, sulfur, acidic, or alkali gas), or other non-approved
fluids. They may damage the Sensor.
• Locations subject to intense temperature changes
• Locations subject to icing or condensation
• Locations subject to excessive vibration or shock
(±) The performance specifications that are given for the D6F do not
apply if any fluids other than the specified applicable fluid are used.
Countermeasures against Noise
Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
(4) Foreign matter in the tubes that are connected to the Sensor may
damage the Sensor. Prevent any foreign matter from entering the
tubes after the Sensor is removed from its packaging.
• Allow as much space as possible between the Sensor and
devices that generate high frequencies (such as high-frequency
welders and high-frequency sewing machines) or surges.
(5) Attach the tubes so that fluid flows only in the direction designated by
the “Hi/Low” pressure markings on the Sensor. Correct measurements
cannot be obtained if the fluid flows in the wrong direction.
• Attach surge absorbers or noise filters to noise-generating
devices that are near the Sensor (in particular, equipment with
inductance, such as motors, transformers, solenoids, and mag-
netic coils).
(6) We recommend that you install the tubes horizontally. If the tubes
are not installed horizontally, an error of ±13 FS or higher may
result. (This does not apply to the D6F-0±A±.)
(7) Install the Sensor on a flat surface. Incorrect installation may
damage the Sensor and make it impossible to obtain correct
measurements.
(It also helps to separate pipes and ducts, and to use shielded
cables.)
(8) After the Sensor is installed, check to confirm that it operates cor-
rectly.
Power Supply
• Do not directly solder power supply leads to the connector termi-
(9) Do not drop the Sensor, remove the cover, or attempt to
disassemble the Sensor in any way.
nals. Use only the appropriate connectors.
• Wire with the correct terminal names and polarities. Incorrect wiring
will cause failure of internal components.
D6F-PH0025AD1, D6F-PH0505AD3, and D6F-PH5050AD3
• When using a commercially available switching regulator, ground
(1) Depending on the ambient environment and installation location,
dust, dirt, and other foreign matter may come inside the Sensor and
block a part or all of the flow path or accumulate on internal
components. This may result in the Sensor not being able to perform
to the specifications given above. Always perform a pre-evaluation on
your actual equipment and be aware of the possible problems that
may occur before you use the Sensor with the actual equipment.
the FG (frame ground) and G (ground) terminals.
RoHS Directive
The RoHS mark is displayed on the packing of products for which the
six substances banned by the RoHS Directive have been abolished
(both in processing and in the electronic components mounted to the
PCBs).
(2) Attach all tubes so that the fluid flows only in the direction from
the positive side (+) to the negative side (-).
*RoHS marking may be terminated if it is later determined that
parts that were previously treated as RoHS compliant are not
compliant due to circumstances at the supplier of the parts.
(±) For PCB-mounting, perform terminal soldering only after the
Sensor is secured into place on the PCB.
(4) Use M1.8 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum torque of
0.±6 N·m.
RoHS Compliance Criteria
The following standards are used to determine RoHS compliance for
the six banned substances. (Items to which the RoHS Directive is not
applicable are not given.)
(5) The sensor output is minimally affected with the length of a tube.
The error is less than 13 with a tube (ID:4mm) length up to 800mm.
• Lead: 1,000 ppm max.
(6) Soldering
• Hexavalent chromium: 1,000 ppm max.
• Mercury: 1,000 ppm max.
• PBB: 1,000 ppm max.
• Please solder properly
• Do not use flow soldering
• Please solder after fixed on the circuit board by screw
• Please use a soldering iron
• Cadmium: 100 ppm max.
• PBDE: 1,000 ppm max.
Soldering condition
Pressure:
Temperature: ±50 °C
Time: Max.5s
Max.100gf
Gas Density and Atmospheric Pressure
Change of gas density affects the sensor output.
Change of atmospheric pressure is compensated by the following
formula:
(7) About handling
• The sensor is a precision device, and if large shock and load is
applied, it may cause a failure or characteristic change. Please
do not use the sensor which has experienced excessive shock
to the terminals, a damaged cover, or has fallen.
Dpeff = Dp x (Pstd / Pamb)
Dpeff: Effective differential pressure
Dp: Differential pressure of the sensor output
Pstd: Standard atmospheric pressure (1,01±.25 hPa)
Pamb: Actual ambient atmospheric pressure (hPa)
• The sensor shall only be handled in electrostatic discharge
protected areas (EPA) under protected and controlled condi-
tions.
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MEMS Differential Pressure Sensor D6F-PH
MEMO
MEMS Differential Pressure Sensor D6F-PH
5
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.0±9±7. To convert grams into ounces, multiply by 0.0±527.
OMRON ON-LINE
Global - http://www.omron.com
USA - http://www.components.omron.com
OMRON ELECTRONIC
COMPONENTS LLC
55 E. Commerce Drive, Suite B
Schaumburg, IL 6017±
847-882-2288
Cat. No. D6F-PH_E_ver.1
05/1±
Specifications subject to change without notice
Printed in USA
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MEMS Differential Pressure Sensor D6F-PH
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