KAE-04472-ABA-SD-EE [ONSEMI]

2096 (H) x 2096 (V) Interline Transfer EMCCD Image Sensor;
KAE-04472-ABA-SD-EE
型号: KAE-04472-ABA-SD-EE
厂家: ONSEMI    ONSEMI
描述:

2096 (H) x 2096 (V) Interline Transfer EMCCD Image Sensor

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KAE-04472  
2096 (H) x 2096 (V) Interline  
Transfer EMCCD Image Sensor  
The KAE−04472 Image Sensor is a 4.4 Mp, 4/3format, Interline  
Transfer EMCCD image sensor that provides exceptional imaging  
performance in extreme low light applications and enhanced near IR  
sensitivity. Each of the sensor’s four outputs incorporates both a  
conventional horizontal CCD register and a high gain EMCCD  
register. This image sensor is drop−in compatible with the  
KAE−04471 Image Sensor and provides enhanced NIR sensitivity.  
An intra-scene switchable gain feature samples each charge packet  
on a pixel-by-pixel basis. This enables the camera system to determine  
whether the charge will be routed through the normal gain output or  
the EMCCD output based on a user selectable threshold. This feature  
enables imaging in extreme low light, even when bright objects are  
within a dark scene, allowing a single camera to capture quality  
images from sunlight to starlight. The device is available in a PGA  
package with integrated thermoelectric cooler (TEC).  
www.onsemi.com  
Figure 1. KAE−04472 Interline  
Transfer EMCCD Image Sensor  
Table 1. GENERAL SPECIFICATIONS  
Parameter  
Typical Value  
Interline CCD; with EMCCD  
4.4 Megapixels  
Architecture  
Resolution  
Features  
Intra-Scene Switchable Gain  
Wide Dynamic Range  
Total Number of Pixels  
Number of Effective Pixels  
Number of Active Pixels  
Pixel Size  
2168 (H) × 2144 (V)  
2120 (H) × 2120 (V)  
2096 (H) × 2096 (V)  
7.4Ămm (H) × 7.4Ămm (V)  
15.51 mm (H) × 15.51 mm (V)  
21.93 mm (Diagonal)  
4/3Optical Format  
1:1  
Charge Domain Binning  
Low Noise Architecture  
Exceptional Low Light Imaging  
Global Shutter  
Active Image Size  
Excellent Image Uniformity and MTF  
Bayer Color Pattern and Monochrome  
Aspect Ratio  
Number of Outputs  
Charge Capacity  
1, 2, or 4  
40,000 electrons  
Applications  
Output Sensitivity  
Normal Gain, Intra-scene  
Scientific Imaging  
Medical Imaging  
Defense Imaging  
Surveillance  
33, 45ĂmV/e  
Quantum Efficiency  
Mono (500, 850, 920 nm) / R,G,B  
(50%, 16%, 8%) / 48%, 43%, 43%  
Read Noise (20 MHz)  
Normal Mode (1× Gain)  
Intra-scene Mode (20× Gain)  
Dark Current (−10°C)  
Photodiode, VCCD  
< 10 electrons rms  
< 1 electron rms  
Intelligent Transportation Systems  
< 0.1, 6 electrons/s  
ORDERING INFORMATION  
Dynamic Range  
Normal Mode (1× Gain)  
Intra-scene Mode (20× Gain)  
See detailed ordering and shipping information on page 2 of  
this data sheet.  
72 dB  
92 dB  
Charge Transfer Efficiency  
Blooming Suppression  
Smear  
0.999999  
> 300 X  
−110 dB  
Image Lag  
< 1 electron  
Maximum Data Rate  
40 MHz (HCCD, +20°C),  
20 MHz (EMCCD)  
Maximum Frame Rate  
24 fps (40 MHz HCCD),  
13.8 fps (20 MHz HCCD)  
Power Consumption (Intra-scene,  
15 fps)  
1300 mW  
NOTE: All Parameters are specified at T = −10°C unless otherwise noted.  
© Semiconductor Components Industries, LLC, 2017  
1
Publication Order Number:  
February, 2019 − Rev. 1  
KAE−04472/D  
KAE−04472  
ORDERING INFORMATION  
US export controls apply to all shipments of this product  
designated for destinations outside of the US and Canada,  
requiring ON Semiconductor to obtain an export license  
from the US Department of Commerce before image sensors  
or evaluation kits can be exported.  
Table 2. ORDERING INFORMATION − KAE−04472 IMAGE SENSOR  
Part Number  
Description  
Marking Code  
KAE−04472−ABA−SD−FA  
Monochrome, Microlens, PGA Package with Integrated TEC,  
Sealed MAR Cover Glass (No Coatings), Standard Grade  
KAE−04472−ABA  
Serial Number  
KAE−04472−ABA−SD−EE  
KAE−04472−FBA−SD−FA  
KAE−04472−FBA−SD−EE  
Monochrome, Microlens, PGA Package with Integrated TEC,  
Sealed MAR Cover Glass (No Coatings), Engineering Grade  
Color (Bayer RGB), Microlens, PGA Package with Integrated TEC,  
Sealed MAR Cover Glass (No Coatings), Standard Grade  
KAE−04472−FBA  
Serial Number  
Color (Bayer RGB), Microlens, PGA Package with Integrated TEC,  
Sealed MAR Cover Glass (No Coatings), Engineering Grade  
See the ON Semiconductor Device Nomenclature document (TND310/D) for a full description of the naming convention  
used for image sensors. For reference documentation, including information on evaluation kits, please visit our web site at  
www.onsemi.com.  
Warning  
The KAE−04472−ABA−SD and KAE−04472−FBA−SD  
packages have an integrated thermoelectric cooler (TEC)  
and have epoxy sealed cover glass. The seal formed is  
non−hermetic, and may allow moisture ingress over time,  
depending on the storage environment.  
As a result, care must be taken to avoid cooling the device  
below the dew point inside the package cavity, since this  
may result in condensation on the sensor.  
For all KAE−04472 configurations, no warranty,  
expressed or implied, covers condensation.  
www.onsemi.com  
2
KAE−04472  
DEVICE DESCRIPTION  
Architecture  
3
3
1079  
450  
450  
24  
1079  
450  
450  
24  
286  
286  
1
3
28  
8
1060  
1060  
8
28  
1
3
12  
12  
2
1
1
1
1
2
24 12  
2096 x 2096  
12 24  
2
2
12  
12  
3
3
1
28  
8
24  
450  
450  
1079  
1060  
286  
1060  
286  
24  
450  
450  
1079  
8
28 1  
3
3
Figure 2. Block Diagram  
www.onsemi.com  
3
KAE−04472  
3
3
1079  
450  
450  
24  
1079  
450  
450  
24  
286  
286  
1
3
28  
8
1060  
1060  
8
28  
1
3
12  
12  
2
1
1
2
24 12  
2096 x 2096  
12 24  
2
1
1
2
12  
12  
3
1
3
1
28  
8
24  
450  
450  
1079  
1060  
286  
1060  
286  
24  
450  
450  
1079  
8
28  
3
3
Figure 3. Block Diagram Showing Bayer Pattern  
Dark Reference Pixels  
Image Acquisition  
There are 12 dark reference rows at the top and bottom of  
the image sensor, as well as 24 dark reference columns on the  
left and right sides. However, the rows and columns at the  
perimeter edges should not be included in acquiring a dark  
reference signal, since they may be subject to some light  
leakage.  
An electronic representation of an image is formed when  
incident photons falling on the sensor plane create  
electron-hole pairs within the individual silicon  
photodiodes. These photoelectrons are collected locally by  
the formation of potential wells at each photo-site. Below  
photodiode saturation, the number of photoelectrons  
collected at each pixel is linearly dependent upon light level  
and exposure time and non-linearly dependent on  
wavelength. When the photodiodes charge capacity is  
reached, excess electrons are discharged into the substrate to  
prevent blooming.  
Active Buffer Pixels  
12 unshielded pixels adjacent to any leading or trailing  
dark reference regions are classified as active buffer pixels.  
These pixels are light sensitive but are not tested for defects  
and non-uniformities.  
www.onsemi.com  
4
KAE−04472  
Physical Description  
Pin Grid Array Configuration  
Output “D”  
Output “C”  
F
E
D
C
B
A
25 23 21 19  
17 15 13 11  
9
7
5
3
1
26 24 22 20 18 16 14 12 10  
8
6
4
2
Output “B”  
Output “A”  
Figure 4. PGA Package Pin Designations (Bottom View)  
Table 3. PIN DESCRIPTION  
Pin Number  
A2  
Label  
+9 V  
Description  
+9 V Supply  
A3  
VDD15ac  
VDD1a  
VOUT1a  
VDD2a  
VOUT2a  
H2La  
+15 V Supply  
A4  
Amplifier 1 Supply, Quadrant a  
Video Output 1, Quadrant a  
Amplifier 2 Supply, Quadrant a  
Video Output 2, Quadrant a  
A5  
A6  
A7  
A8  
HCCD Last Gate, Outputs 1, 2 and 3, Quadrant a  
Amplifier 3 Supply, Quadrant a  
Video Output 3, Quadrant a  
HCCD Phase 1, Quadrant a  
HCCD Phase 2, Quadrant a  
Ground  
A9  
VDD3a  
VOUT3a  
H1a  
A10  
A11  
A12  
A13  
A14  
H2a  
GND  
H2b  
HCCD Phase 2, Quadrant b  
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5
 
KAE−04472  
Table 3. PIN DESCRIPTION  
Pin Number  
A15  
A16  
A17  
A18  
A19  
A20  
A21  
A22  
A23  
A24  
A25  
A26  
B1  
Label  
H1b  
Description  
HCCD Phase 1, Quadrant b  
Video Output 3, Quadrant b  
Amplifier 3 Supply, Quadrant b  
VOUT3b  
VDD3b  
H2Lb  
HCCD Last Gate, Outputs 1, 2 and 3, Quadrant b  
Video Output 2, Quadrant b  
Amplifier 2 Supply, Quadrant b  
Amplifier 1 Output, Quadrant b  
Amplifier 1 Supply, Quadrant b  
+15 V Supply, Quadrants b and d  
+9 V Supply  
VOUT2b  
VDD2b  
VOUT1b  
VDD1b  
VDD15bd  
+9 V  
GND  
Ground  
TEC−  
GND  
Thermoelectric Cooler Negative Bias  
Ground  
B2  
ESD  
ESD  
B3  
V4B  
VCCD Bottom Phase 4  
B4  
GND  
Ground  
B5  
VSS1a  
RG1a  
RG23a  
GND  
Amplifier 1 Return, Quadrant a  
Amplifier 1 Reset, Quadrant a  
Amplifier 2 and 3 Reset, Quadrant a  
Ground  
B6  
B7  
B8  
B9  
H2BEMa  
H1BEMa  
H1Sa  
EMCCD Barrier Phase 2, Quadrant a  
EMCCD Barrier Phase 1, Quadrant a  
HCCD Storage Phase 1, Quadrant a  
HCCD Storage Phase 2, Quadrant a  
Ground  
B10  
B11  
B12  
B13  
B14  
B15  
B16  
B17  
B18  
B19  
B20  
B21  
B22  
B23  
B24  
B25  
B26  
C1  
H2Sa  
GND  
H2Sb  
HCCD Storage Phase 2, Quadrant b  
HCCD Storage Phase 1, Quadrant b  
EMCCD Barrier Phase 1, Quadrant b  
EMCCD Barrier Phase 2, Quadrant b  
Ground  
H1Sb  
H1BEMb  
H2BEMb  
GND  
RG23b  
RG1b  
VSS1b  
GND  
Amplifier 2 and 3 Reset, Quadrant b  
Amplifier 1 Reset, Quadrant b  
Amplifier 1 Return, Quadrant b  
Ground  
V4B  
VCCD Bottom Phase 4  
ESD  
ESD  
GND  
Ground  
TEC−  
GND  
Thermoelectric Cooler Negative Bias  
Ground  
C2  
ID  
Device ID  
C3  
V3B  
VCCD Bottom Phase 3  
C4  
V2B  
VCCD Bottom Phase 2  
C5  
V1B  
VCCD Bottom Phase 1  
C6  
H2Xa  
Floating Gate Exit HCCD Gate, Quadrant a  
HCCD Output 2 Selector, Quadrant a  
HCCD Output 3 Selector, Quadrant a  
EMCCD Storage Multiplier Phase 2, Quadrant a  
EMCCD Storage Multiplier Phase 1, Quadrant a  
C7  
H2SW2a  
H2SW3a  
H2SEMa  
H1SEMa  
C8  
C9  
C10  
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6
KAE−04472  
Table 3. PIN DESCRIPTION  
Pin Number  
C11  
C12  
C13  
C14  
C15  
C16  
C17  
C18  
C19  
C20  
C21  
C22  
C23  
C24  
C25  
C26  
D1  
Label  
H1Ba  
H2Ba  
SUB  
Description  
HCCD Barrier Phase 1, Quadrant a  
HCCD Barrier Phase 2, Quadrant a  
Substrate  
H2Bb  
H1Bb  
H1SEMb  
H2SEMb  
H2SW3b  
H2SW2b  
H2Xb  
V1B  
HCCD Barrier Phase 2, Quadrant b  
HCCD Barrier Phase 1, Quadrant b  
EMCCD Storage Multiplier Phase 1, Quadrant b  
EMCCD Storage Multiplier Phase 2, Quadrant b  
HCCD Output 3 Selector, Quadrant b  
HCCD Output 2 Selector, Quadrant b  
Floating Gate Exit HCCD Gate, Quadrant b  
VCCD Bottom Phase 1  
V2B  
VCCD Bottom Phase 2  
V3B  
VCCD Bottom Phase 3  
N/C  
No connect  
GND  
Ground  
TEC−  
N/C  
Thermoelectric Cooler Negative Bias  
No connect  
D2  
N/C  
No connect  
D3  
V3T  
VCCD Top Phase 3  
D4  
V2T  
VCCD Top Phase 2  
D5  
V1T  
VCCD Top Phase 1  
D6  
H2Xc  
Floating Gate Exit HCCD Gate, Quadrant c  
HCCD Output 2 Selector, Quadrant c  
HCCD Output 3 Selector, Quadrant c  
EMCCD Storage Phase 2, Quadrant c  
EMCCD Storage Phase 1, Quadrant c  
HCCD Barrier Phase 1, Quadrant c  
HCCD Barrier Phase 2, Quadrant c  
Substrate  
D7  
H2SW2c  
H2SW3c  
H2SEMc  
H1SEMc  
H1Bc  
D8  
D9  
D10  
D11  
D12  
D13  
D14  
D15  
D16  
D17  
D18  
D19  
D20  
D21  
D22  
D23  
D24  
D25  
D26  
E1  
H2Bc  
SUB  
H2Bd  
H1Bd  
H1SEMd  
H2SEMd  
H2SW3d  
H2SW2d  
H2Xd  
V1T  
HCCD Barrier Phase 2, Quadrant d  
HCCD Barrier Phase 1, Quadrant d  
EMCCD Storage Multiplier Phase 1, Quadrant d  
EMCCD Storage Multiplier Phase 2, Quadrant d  
HCCD Output 3 Selector, Quadrant d  
HCCD Output 2 Selector, Quadrant d  
Floating Gate Exit HCCD Gate, Quadrant d  
VCCD Top Phase 1  
V2T  
VCCD Top Phase 2  
V3T  
VCCD Top Phase 3  
VSUBREF  
GND  
Substrate Voltage Reference  
Ground  
TEC+  
N/C  
Thermoelectric Cooler Positive Bias  
No connect  
E2  
GND  
Ground  
E3  
V4T  
VCCD Top Phase 4  
E4  
GND  
Ground  
E5  
VSS1c  
RG1c  
Amplifier 1 Return, Quadrant c  
Amplifier 1 Reset, Quadrant c  
E6  
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7
KAE−04472  
Table 3. PIN DESCRIPTION  
Pin Number  
E7  
Label  
RG23c  
GND  
Description  
Amplifier 2 and 3 Reset, Quadrant c  
Ground  
E8  
E9  
H2BEMc  
H1BEMc  
H1Sc  
EMCCD Barrier Phase 2, Quadrant c  
EMCCD Barrier Phase 1, Quadrant c  
HCCD Storage Phase 1, Quadrant c  
HCCD Storage Phase 2, Quadrant c  
Ground  
E10  
E11  
E12  
E13  
E14  
E15  
E16  
E17  
E18  
E19  
E20  
E21  
E22  
E23  
E24  
E25  
E26  
F1  
H2Sc  
GND  
H2Sd  
HCCD Storage Phase 2, Quadrant d  
HCCD Storage Phase 1, Quadrant d  
EMCCD Barrier Phase 1, Quadrant d  
EMCCD Barrier Phase 2, Quadrant d  
Ground  
H1Sd  
H1BEMd  
H2BEMd  
GND  
RG23d  
RG1d  
VSS1d  
GND  
Amplifier 2 and 3 Reset, Quadrant d  
Amplifier 1 Reset, Quadrant d  
Amplifier 1 Return, Quadrant d  
Ground  
V4T  
VCCD Top Phase 4  
GND  
Ground  
GND  
Ground  
TEC+  
N/C  
Thermoelectric Cooler Positive Bias  
No connect  
F2  
V2B  
VCCD Bottom Phase 2  
F3  
ESD  
ESD  
F4  
VDD1c  
VOUT1c  
VDD2c  
VOUT2c  
H2Lc  
Amplifier 1 Supply, Quadrant c  
Video Output 1, Quadrant c  
Amplifier 2 Supply, Quadrant c  
Video Output 2, Quadrant c  
HCCD Last Gate, Outputs 1, 2 and 3, Quadrant c  
Amplifier 3 Supply, Quadrant c  
Video Output 3, Quadrant c  
HCCD Phase 1, Quadrant c  
HCCD Phase 2, Quadrant c  
Ground  
F5  
F6  
F7  
F8  
F9  
VDD3c  
VOUT3c  
H1c  
F10  
F11  
F12  
F13  
F14  
F15  
F16  
F17  
F18  
F19  
F20  
F21  
F22  
F23  
F24  
F25  
F26  
H2c  
GND  
H2d  
HCCD Phase 2, Quadrant d  
HCCD Phase 1, Quadrant d  
Video Output 3, Quadrant b  
Amplifier 3 Supply, Quadrant d  
HCCD Last Gate, Outputs 1, 2 and 3, Quadrant d  
Video Output 2, Quadrant d  
Amplifier 2 Supply, Quadrant d  
Amplifier 1 Output, Quadrant d  
Amplifier 1 Supply, Quadrant d  
ESD  
H1d  
VOUT3d  
VDD3d  
H2Ld  
VOUT2d  
VDD2d  
VOUT1d  
VDD1d  
ESD  
V2B  
VCCD Bottom Phase 2  
GND  
Ground  
TEC+  
Thermoelectric Cooler Positive Bias  
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8
KAE−04472  
Imaging Performance  
Table 4. TYPICAL OPERATION CONDITIONS  
(Unless otherwise noted, the Imaging Performance Specifications are measured using the following conditions.)  
Description  
Light Source (Note 1)  
Operation  
Condition  
Continuous Red, Green, Blue and IR LED Illumination  
Nominal Operating Voltages and Timing  
1. For monochrome sensor, only green LED light source is used.  
Table 5. PERFORMANCE PARAMETERS  
Test  
Temperature  
(5C)  
Sampling  
Plan  
Description  
Symbol  
Min.  
Nom.  
Max.  
Unit  
Maximum Photoresponse Nonlinearity  
(EMCCD gain = 1) (Note 2)  
NL  
2
%
Design  
Design  
Design  
Maximum Gain Difference Between  
Outputs (EMCCD gain = 1) (Note 6)  
DG  
10  
1
%
%
Maximum Signal Error due to Nonlin-  
earity Differences  
DNL  
(EMCCD gain = 1) (Note 2)  
Horizontal CCD Charge Capacity  
Vertical CCD Charge Capacity  
Photodiode Dark Current (Average)  
Vertical CCD Dark Current  
Image Lag  
H
V
50  
50  
ke  
Design  
Design  
Design  
Design  
Design  
Design  
Design  
Design  
Ne  
ke  
Ne  
I
0.1  
0.4  
3
e/p/s  
e/p/s  
e−  
−10  
−10  
PD  
Lag  
10  
Antiblooming Factor  
X
AB  
300  
1000  
−110  
9
Vertical Smear (Blue Light)  
Smr  
dB  
Read Noise (EMCCD Gain = 1)  
(Note 3)  
n
e−T  
e−rms  
Read Noise (EMCCD Gain = 20)  
< 1  
1.4  
e−rms  
dB  
EMCCD Excess Noise Factor  
(Gain = 20x)  
Design  
Design  
0
Dynamic Range (Gain = 1)  
(Notes 3, 4)  
DR  
72  
Dynamic Range (High Gain)  
60  
92  
dB  
dB  
Dynamic Range (Intra-scene)  
Output Amplifier Bandwidth (Note 5)  
f
250  
45  
MHz  
mV/e−  
Design  
Design  
−3db  
Output Amplifier Sensitivity  
(EMCCD Output)  
DV/DN  
Output Amplifier Sensitivity  
(Floating Gate Amplifier)  
DV/DN  
(FG)  
7.8  
mV/e−  
Design  
Design  
Quantum Efficiency (Monochrome,  
Peak)  
QE  
%
max  
Green (500 nm)  
NIR (850 nm)  
NIR (920 nm)  
50%  
16%  
8%  
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9
 
KAE−04472  
Table 5. PERFORMANCE PARAMETERS (continued)  
Test  
Temperature  
(5C)  
Sampling  
Plan  
Description  
Symbol  
QE  
Min.  
Nom.  
Max.  
Unit  
Quantum Efficiency (Color, Peak)  
Red (620 nm)  
Green (540 nm)  
%
Design  
max  
48%  
43%  
43%  
Blue (470 nm)  
Power  
W
Design  
4-output Mode  
(20MHz)  
(40MHz)  
0.7  
0.8  
2-output Mode  
(20MHz)  
(40MHz)  
0.5  
0.5  
1-output Mode  
(20MHz)  
(40MHz)  
0.4  
0.4  
2. Value is over the range of 10% to 90% of photodiode saturation.  
3. At 20 MHz.  
4. Uses 20 LOG (P /n  
)
Ne e−T  
5. Calculated from f  
= 1 / 2p * R  
* C  
where C  
= 5 pF.  
−3db  
OUT  
LOAD  
LOAD  
6. The output-to-output gain differences may be adjusted by independently adjusting the EMCCD amplitude for each output.  
Table 6. PERFORMANCE SPECIFICATIONS  
Test  
Temperature  
(5C)  
Sampling  
Plan  
Description  
Symbol  
Min.  
Nom.  
Max.  
2.0  
Unit  
mVpp  
%rms  
Dark Field Global Non-Uniformity  
DSNU  
Die  
Die  
−10  
Bright Field Global Non-Uniformity  
(Note 7)  
2.0  
5.0  
−10  
Bright Field Global Peak to Peak  
Non-Uniformity (Note 7)  
PRNU  
5.0  
1.0  
15.0  
2.0  
%pp  
Die  
Die  
−10  
−10  
Bright Field Center Non-Uniformity  
(Note 7)  
%rms  
Photodiode Charge Capacity (Note 8)  
P
40  
ke  
Die  
Die  
−10  
−10  
Ne  
Horizontal CCD Charge Transfer  
Efficiency  
HCTE  
0.999995  
0.999999  
Vertical CCD Charge Transfer  
Efficiency  
VCTE  
0.999995  
8.0  
0.999999  
10  
Die  
Die  
−10  
−10  
Output Amplifier DC Offset  
(VOUT2, VOUT3)  
V
V
12.0  
V
ODC  
Output Amplifier DC Offset (VOUT1)  
Output Amplifier Impedance  
7. Per color  
−0.5  
1.0  
2.5  
V
Die  
Die  
−10  
−10  
ODC  
R
140  
W
OUT  
8. The operating value of the substrate reference voltage, to reach the desired charge capacity, V , can be read from V  
.
AB  
SUBREF  
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KAE−04472  
TYPICAL PERFORMANCE CURVES  
Quantum Efficiency  
Monochrome and Color with Microlens  
0.6  
0.55  
0.5  
0.45  
0.4  
0.35  
0.3  
0.25  
0.2  
0.15  
0.1  
0.05  
0
Wavelength (nm)  
Figure 5. Monochrome Quantum Efficiency  
120  
100  
80  
Green  
Blue  
Red  
IR  
60  
40  
20  
0
−30  
−20  
−10  
0
10  
20  
30  
Horizontal Angle  
Figure 6. Angled Response for Monochrome Device  
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11  
KAE−04472  
0.6  
0.55  
0.5  
0.45  
0.4  
0.35  
0.3  
Red  
Green  
Blue  
0.25  
0.2  
0.15  
0.1  
0.05  
0
Wavelength (nm)  
Figure 7. Color Device Quantum Efficiency  
120  
100  
80  
Red  
Green  
Blue  
60  
40  
20  
0
−30  
−20  
−10  
0
10  
20  
30  
Angle (degrees)  
Figure 8. Horizontal Angled Response for Color Device  
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12  
KAE−04472  
Figure 9. Frame Rates vs. Clock Frequency  
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13  
KAE−04472  
DEFECT DEFINITIONS  
Table 7. DEFECT DEFINITIONS  
Description  
Definition  
Maximum Number Allowed  
Major Dark Field Defective Bright Pixel  
Defect 30 mV deviation from the mean, for all pixels  
40  
in the active image area.  
Major Bright Field Defective Dark Pixel  
Minor Dark Field Defective Bright Pixel  
12%  
Defect 15 mV deviation from the mean, for all pixels  
400  
8
in the active image area.  
Cluster Defect  
Column Defect  
A group of 2 to 10 contiguous major defective pixels,  
with no more than 2 adjacent defects horizontally.  
A group of more than 10 contiguous major dark  
defective pixels along a single column or 10 contiguous  
bright defective pixels along a single column.  
0
9. Low exposure dark column defects are not counted at temperatures above −10°C  
10.For the color device, a bright field defective pixel deviates by 12% with respect to pixels of the same color.  
11. Column and cluster defects are separated by no less than 2 good pixels in any direction (excluding single pixel defects).  
Absolute Maximum Ratings  
Absolute maximum rating is defined as a level or  
condition that should not be exceeded at any time per the  
description. If the level or the condition is exceeded, the  
device will be degraded and may be damaged. Operation at  
these values will reduce MTTF.  
Table 8. ABSOLUTE MAXIMUM RATINGS  
Description  
Symbol  
Minimum  
Maximum  
Unit  
°C  
Operating Temperature Range (Note 12)  
T
OP  
−50  
−10  
+60  
0
Parameter Specification Temperature Range (Note 13)  
Output Bias Current, Total for Each Output (Note 14)  
12.Device degradation is not evaluated outside of this temperature range.  
T
%
PSR  
OUT  
I
−8  
mA  
13.The device will operate effectively within the specified temperature range, but the performance may not meet those given in the tables  
“PERFORMANCE PARAMETERS” and “PERFORMANCE SPECIFICATIONS”. In particular, noise performance may be higher at  
temperatures above the range given here, and charge transfer efficiency may be lower for temperatures below the range given here.  
14.Shorting the output pins to ground or any low impedance source should be avoided during operation This action will result in irreparable  
damage to the device, and is not covered by the device warranty.  
Table 9. ABSOLUTE MAXIMUM VOLTAGE RATINGS BETWEEN PINS AND GROUND  
Description  
Minimum  
−0.4  
Maximum  
17.5  
Unit  
V
VDD2(a,b,c,d), VDD3(a,b,c,d)  
VDD1(a,b,c,d), VOUT1(a,b,c,d)  
V1B, V1T  
−0.4  
7.0  
V
ESD – 0.4  
ESD – 0.4  
–0.4  
ESD + 22.0  
ESD + 14.0  
+10  
V
V2B, V2T, V3B, V3T, V4B, V4T  
V
H1(a,b,c,d), H2(a,b,c,d)  
H1S(a,b,c,d), H2S(a,b,c,d)  
H1B(a,b,c,d), H2B(a,b,c,d)  
H1BEM(a,b,c,d), H2BEM(a,b,c,d)  
H2SW2(a,b,c,d), H2SW3(a,b,c,d)  
H2L(a,b,c,d)  
V
H2X(a,b,c,d)  
RG1(a,b,c,d), RG23(a,b,c,d)  
H1SEM(a,b,c,d), H2SEM(a,b,c,d)  
ESD  
−0.4  
−9.0  
6.5  
+20  
0.0  
40  
V
V
V
SUB (Notes 15 and 16)  
15.Refer to Application Note Using Interline CCD Image Sensors in High Intensity Visible Lighting Conditions.  
16.The measured value for VSUBREF is a diode drop higher than the recommended minimum VSUB bias.  
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KAE−04472  
GUIDELINES FOR OPERATION  
Power Up and Power Down Sequence  
GND at all times. The SUBREF pin will not become valid  
until VDD15ac and VDD15bd have been powered.  
The SUB pin should be at least 4 V before powering up  
VDD2(a,b,c,d) and VDD3(a,b,c,d).  
SUB and ESD power up first, then power up all other  
biases in any order. No pin may have a voltage less than ESD  
at any time. All HCCD pins must be greater than or equal to  
V+  
VDD  
SUB  
VDD1 and HCCD high  
time  
VCCD Low  
ESD  
V−  
Figure 10. Power Up and Power Down Sequence  
Table 10. DC BIAS OPERATING CONDITIONS  
Maximum  
DC Current  
Description  
Pins  
Symbol  
Min.  
Nom.  
Max.  
Unit  
Output Amplifier Return  
Output Amplifier Supply  
Output Amplifier Supply  
VSS1(a,b,c,d)  
VDD1(a,b,c,d)  
VSS1  
VDD1  
VDD  
−8.3  
4.5  
−8.0  
5.0  
−7.7  
6.0  
V
V
V
4 mA  
15 mA  
VDD2(a,b,c,d),  
VDD3(a,b,c,d)  
+14.7  
+15.0  
+15.3  
18.0 mA  
Supply Voltage  
(Note 17)  
VDD15ac,  
VDD15bd  
VDD15  
+14.7  
+15.0  
+15.3  
V
9 mA  
Ground  
GND  
SUB  
GND  
0.0  
6.0  
0.0  
0.0  
V
V
17.0 mA  
Substrate  
(Notes 18 and 19)  
VSUB  
VSUBREF  
− 0.5  
VSUBREF  
+ 28  
Up to 1 mA  
(Determined by  
Photocurrent)  
ESD Protection Disable  
Output Bias Current  
ESD  
ESD  
−8.3  
2.0  
−8.0  
2.5  
−7.7  
5.0  
V
2 mA  
VOUT1(a,b,c,d),  
VOUT2(a,b,c,d),  
VOUT3(a,b,c,d)  
I
mA  
OUT  
17.VDD15ac and VDDD15bd bias pins must be maintained at 15 V during operation.  
18.For each image sensor, the voltage output on the VSUBREF pin is programmed to be one diode drop, 0.5 V, above the nominal VSUB voltage.  
So, the applied VSUB should be one diode drop (0.5 V) lower than the VSUBREF value measured on the device, when VDD2(a,b,c,d) and  
VDD3(a,b,c,d) are at the specified voltage. This value corresponds to the VAB printed on the label for each sensor and applies to operation  
at 0_C. (For other temperatures, there is a temperature dependence of approximately 0.01 V/degree.) It is noted that VSUBREF is unique  
to each image sensor and may vary from 6.5 to 10.0 V. In addition, the output impedance of VSUBREF is approximately 100 k.  
19.Caution: The EMCCD register must NOT be clocked while the electronic shutter pulse is high.  
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KAE−04472  
AC Operating Conditions  
Clock Levels  
Table 11. CLOCK LEVELS  
HCCD and RG  
Low Level  
Nominal  
Amplitude  
Nominal  
Low  
High  
Low  
High  
Pin  
Function  
H2B(a,b,c,d)  
H1B(a,b,c,d)  
H2S(a,b,c,d)  
H1S(a,b,c,d)  
Reversible HCCD Barrier 2  
Reversible HCCD Barrier 1  
Reversible HCCD Storage 2  
Reversible HCCD Storage 1  
HCCD Switch 2 and 3  
−0.2  
−0.2  
−0.2  
−0.2  
−0.2  
0.0  
0.0  
0.0  
0.0  
0.0  
+0.2  
+0.2  
+0.2  
+0.2  
+0.2  
3.1  
3.1  
3.1  
3.1  
3.1  
3.3  
3.3  
3.3  
3.3  
3.3  
3.6  
3.6  
3.6  
3.6  
3.6  
H2SW2(a,b,c,d),  
H2SW3(a,b,c,d)  
H2L(a,b,c,d)  
HCCD Last Gate  
−0.2  
−0.2  
0.0  
0.0  
Cap  
Cap  
0.0  
0.0  
0.0  
0.0  
+0.2  
+0.2  
3.1  
6.2  
3.1  
3.1  
4.6  
4.6  
8.0  
8.0  
3.3  
6.6  
3.3  
3.3  
5.0  
5.0  
3.6  
7.0  
H2X(a,b,c,d)  
Floating Gate Exit  
Floating Gate Reset  
Floating Diffusion Reset  
Multiplier Barrier 1  
Multiplier Barrier 2  
Multiplier Storage 1  
Multiplier Storage 2  
RG1(a,b,c,d)  
3.6  
RG23(a,b,c,d)  
H1BEM(a,b,c,d)  
H2BEM(a,b,c,d)  
H1SEM(a,b,c,d)  
H2SEM(a,b,c,d)  
3.6  
−0.2  
−0.2  
−0.3  
−0.3  
+0.2  
+0.2  
+0.3  
+0.3  
5.4  
5.4  
18.0  
18.0  
20.HCCD Operating Voltages. There can be no overshoot on any horizontal clock below −0.4 V: the specified absolute minimum. The H1SEM  
and H2SEM clock amplitudes need to be software programmable independently for each quadrant to adjust the charge multiplier gain.  
21.Reset Clock Operation: The RG1, RG23 signals must be capacitive coupled into the image sensor with a 0.01 mF to 0.1 mF capacitor.  
The reset clock overshoot can be no greater than 0.3 V, as shown in Figure 11, below.  
3.1 V Minimum  
0.3 V Maximum  
Figure 11. RG Clock Overshoot  
Clock Capacitances  
Pin  
H1SEMa  
H2SEMa  
H1BEMa  
H2BEMa  
H1a  
pF  
45  
45  
45  
45  
65  
65  
75  
75  
75  
75  
Pin  
H1SEMb  
H2SEMb  
H1BEMb  
H2BEMb  
H1b  
pF  
45  
45  
45  
45  
65  
65  
75  
75  
75  
75  
Pin  
H1SEMc  
H2SEMc  
H1BEMc  
H2BEMc  
H1c  
pF  
45  
45  
45  
45  
65  
65  
75  
75  
75  
75  
Pin  
H1SEMd  
H2SEMd  
H1BEMd  
H2BEMd  
H1d  
pF  
45  
45  
45  
45  
65  
65  
75  
75  
75  
75  
H2a  
H1Sa  
H2b  
H1Sb  
H2c  
H1Sc  
H2d  
H1Sd  
H2Sa  
H1Ba  
H2Ba  
H2Sb  
H1Bb  
H2Bb  
H2Sc  
H1Bc  
H2Bc  
H2Sd  
H1Bd  
H2Bd  
NOTE: The capacitances of all other HCCD pins is 15 pF or less.  
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KAE−04472  
H1SEMa  
H2SEMa  
high  
low  
+18 V  
H1SEMb  
H2SEMb  
high  
low  
4 Output  
DAC  
A
B
C
D
H1SEMc  
H2SEMc  
high  
low  
H1SEMd  
H2SEMd  
high  
low  
Figure 12. EMCCD Clock Adjustable Levels  
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17  
KAE−04472  
For the EMCCD clocks, each quadrant must have  
independently adjustable high levels. All quadrants have  
a common low level of GND. The high level adjustments  
must be software controlled to balance the gain of the four  
outputs.  
+3.3 V  
0 to 75 W  
RG1 Clock  
Generator  
RG1  
0.01 to 0.1 mF  
+3.3 V  
RG2,3 Clock  
Generator  
RG23  
0.01 to 0.1 mF  
Figure 13. Reset Clock Drivers  
The reset clock drivers must be coupled by capacitors to  
the image sensor. The capacitors can be anywhere in the  
range 0.01 to 0.1 mF. The damping resistor values would  
vary between 0 and 75 W depending on the layout of the  
circuit board.  
Table 12. VCCD  
Pin  
Function  
Low  
−8.0  
−0.2  
8.5  
Nominal  
−8.0  
High  
−6.0  
+0.2  
12.5  
V1T, V1B, V2T, V2B, V3T, V3B, V4T, V4B  
V1T, V1B, V2T, V2B, V3T, V3B, V4T, V4B  
V1T, V1B  
Vertical CCD Clock, Low Level  
Vertical CCD Clock, Mid Level  
0.0  
rd  
Vertical CCD Clock, High (3 ) Level  
9.0  
22.The Vertical CCD operating voltages. The VCCD low level will be −8.0 V for operating temperatures of −10°C and above. Below −10°C the  
VCCD low level should be increased for optimum noise performance.  
Table 13. ELECTRONIC SHUTTER PULSE  
Pin  
Function  
Low  
High  
SUB  
Electronic Shutter  
VSUBREF − 0.5  
VSUBREF + 28  
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KAE−04472  
Device Identification  
The device identification pin (DevID) may be used to  
determine which ON Semiconductor 5.5 micron pixel  
interline CCD sensor is being used.  
Table 14. DEVICE IDENTIFICATION VALUES  
Maximum  
DC Current  
Description  
Pins  
Symbol  
Min.  
Nom.  
Max.  
Unit  
Device Identification (Notes 23, 24 and 25)  
ID  
ID  
63,000  
70,000  
84,000  
W
0.3 mA  
23.Nominal value subject to verification and/or change during release of preliminary specifications.  
24.If the Device Identification is not used, it may be left disconnected.  
25.After Device Identification resistance has been read during camera initialization, it is recommended that the circuit be disabled to prevent  
localized heating of the sensor due to current flow through the R_DeviceID resistor.  
Recommended Circuit  
V1  
V2  
R_External  
DevID  
ADC  
R_DeviceID  
GND  
KAE−04472  
Figure 14. Device Identification Recommended Circuit  
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KAE−04472  
THEORY OF OPERATION  
Image Acquisition  
Photo  
diode  
Figure 15. An Illustration of Two Columns and Three Rows of Pixels  
This image sensor is capable of detecting up to 40,000  
The VCCD is shielded from light by metal to prevent  
detection of more photons. For very bright spots of light,  
some photons may leak through or around the metal light  
shield and result in electrons being transferred into the  
VCCD. This is called image smear.  
electrons with a small signal noise floor of 1 electron all  
within one image. Each 7.4 mm square pixel, as shown in  
Figure 15 above, consists of a light sensitive photodiode and  
a portion of the vertical CCD (VCCD). Not shown is  
a microlens positioned above each photodiode to focus light  
away from the VCCD and into the photodiode. Each photon  
incident upon a pixel will generate an electron in the  
photodiode with a probability equal to the quantum  
efficiency.  
The photodiode may be cleared of electrons (electronic  
shutter) by pulsing the SUB pin of the image sensor up to  
a voltage of 30 V to 40 V (VSUBREF + 22 to VSUBREF  
+ 28 V) for a time of at least 2.5 ms. When the SUB pin is  
above 30 V, the photodiode can hold no electrons, and the  
electrons flow downward into the substrate. When the  
voltage on SUB drops below 30 V, the integration of  
electrons in the photodiode begins. The HCCD clocks  
should be stopped when the electronic shutter is pulsed, to  
avoid having the large voltage pulse on SUB coupling into  
the video outputs and altering the EMCCD gain.  
Image Readout  
At the start of image readout, the voltage on the V1T and  
V1B pins is pulsed from 0 V up to the high level for at least  
1 ms and back to 0 V, which transfers the electrons from the  
photodiodes into the VCCD. If the VCCD is not empty, then  
the electrons will be added to what is already in the VCCD.  
The VCCD is read out one row at a time. During a VCCD  
row transfer, the HCCD clocks are stopped. All gates of type  
H1 stop at the high level and all gates of type H2 stop at the  
low level. After a VCCD row transfer, charge packets of  
electrons are advanced one pixel at a time towards the output  
amplifiers by each complimentary clock cycle of the H1 and  
H2 gates.  
The charge multiplier has a maximum charge handling  
capacity (after gain) of 20,000 electrons. This is not the  
average signal level. It is the maximum signal level.  
Therefore, it is advisable to keep the average signal level at  
15,000 electrons or less to accommodate a normal  
distribution of signal levels. For a charge multiplier gain of  
20x, no more than 15,000/20 = 750 electrons should be  
allowed to enter the charge multiplier. Overfilling the charge  
multiplier beyond 20,000 electrons will shorten its useful  
operating lifetime.  
It should be noted that there are certain conditions under  
which the device will have no anti-blooming protection:  
when the V1T and V1B pins are high, very intense  
illumination generating electrons in the photodiode will  
flood directly into the VCCD.  
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KAE−04472  
To prevent overfilling the charge multiplier,  
a non-destructive floating gate output amplifier (VOUT1) is  
provided on each quadrant of the image sensor as shown in  
Figure 16 below.  
To VOUT2  
VOUT1  
3 Clock Cycles  
1 Clock Cycle  
8 Clock Cycles  
Empty Pixels  
1 Clock  
Cycle  
28 Clock Cycles  
Empty Pixels  
24 Clock Cycles  
From the Dark  
VCCD Columns  
From the Photo-active  
VCCD Columns  
SW  
FG  
Charge Transfer  
2316 Clock Cycles  
To the Charge  
Multiplier and  
VOUT3  
Figure 16. The Charge Transfer Path of One Quadrant  
The non-destructive floating gate output amplifier is able  
to sense how much charge is present in a charge packet  
without altering the number of electrons in that charge  
packet. This type of amplifier has a low charge-to-voltage  
The transfer sequence of a charge packet through the  
floating gate amplifier is shown in Figure 17 below.  
The time steps of this sequence are labeled A through D, and  
are indicated in the timing diagram shown as Figure 18.  
The RG1 gate is pulsed high during the time that the H2X  
gate is pulsed high. This holds the floating gate at a constant  
voltage so the H2X gate can pull the charge packet out of the  
floating gate. The RG1 pulse should be at least as wide as the  
H2X pulse, and the H2X pulse width should be at least 12 ns.  
The rising edge of H2X relative to the falling edge of H1S  
is critical, specifically, the H2X pulse cannot begin its rising  
edge transition until the H1S edge is less than 0.4 V. If the  
H2X rising edge comes too soon then there may be some  
backward flow of charge for signals above 10,000 electrons.  
conversion gain (about 7.8 mV/e ) and high noise (about  
42 electrons), but it is being used only as a threshold  
detector, and not an imaging detector. Even with  
42 electrons of noise, it is adequate to determine whether  
a charge packet is greater than or less than the recommended  
threshold of 120 electrons.  
After one row has been transferred from the VCCD into  
the HCCD, the HCCD clock cycles should begin. After 8  
clock cycles, the first dark VCCD column pixel will arrive  
at VOUT1. After another 24 (34 total) clock cycles, the first  
photo-active charge packet will arrive at VOUT1.  
VDD1  
Floating Gate Amp  
VRef  
VOUT1  
RG1  
H2  
H1  
H2X  
OG1  
H2L  
H1S  
A
B
C
D
Channel  
Potential  
NOTE: The differently shaded rectangles represent two separate charge packets. The direction of charge transfer is from right to left.  
Gates after H2X are connected to H1 or H2. Gates before H2X are connected to H1S or H2S.  
Figure 17. Charge Package Transfer Sequence through the Floating Gate Amplifier  
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KAE−04472  
A
B
C
D
H1S, H1  
H2S, H2L, H2  
H2X  
RG1  
VOUT1  
Signal  
Figure 18. Timing Signals that Control the Transfer of Charge through the Floating Gate Amplifier  
The charge packet is transferred under the floating gate on  
the falling edge of H2L. When this transfer takes place the  
floating gate is not connected to any voltage source.  
The presence of charge under the gate causes a change in  
voltage on the floating gate according to V = Q/C, where Q  
is the size of the charge packet and C is the capacitance of  
and dynamically alter the timing on H2SW2 and H2SW3. To  
route a charge packet to the charge multiplier (VOUT3),  
H2SW2 is held at GND and H2SW3 is clocked with the  
same timing as H2 for that one clock cycle. To route a charge  
packet to the low gain output amplifier (VOUT2), H2SW3  
is held at GND and H2SW2 is clocked with the same timing  
as H2S for that one clock cycle.  
the floating gate. With an output sensitivity of 7.8 mV/e ,  
When operating the device at maximum (40 MHz) data  
rate, all the charge must be routed through the low gain  
amplifier (VOUT2). This is best accomplished with the  
floating gate reset (RG1) held at its high level while clocking  
the HCCD, and the H2X gate clocked with the same timing  
as H2S and H2B. During the line timing patterns L1 or L2,  
the RG1 gate should be clocked low. There is a diode on the  
sensor that sets the DC offset of the RG1 gate when it is  
clocked low. If the RG1 is not clocked low once per line then  
the RG1 DC offset will drift. This timing scheme is  
represented in the diagram shown below:  
each electron on the floating gate would give a 7.8 mV  
change in VOUT1 voltage. Therefore if the decision  
threshold is to only allow charge packets of 126 electrons or  
less into the charge multiplier, this would correspond to  
120 × 7.8 = 936 mV. If the video output is less than 936 mV,  
then the camera must set the timing of the H2SW2 and  
H2SW3 pins to route the charge packet to the charge  
multiplier. This action must take place 28 clock cycles after  
the charge packet was under the floating gate amplifier.  
The 28 clock cycle delay is to allow for pipeline delays of the  
A/D converter inside the analog front end. The timing  
generator must examine the output of the analog front end  
40 MHz Floating Gate Bypass Timing  
40 MHz Floating Gate Bypass Timing  
3.3 V  
3.3 V  
H1  
H1  
0.0 V  
0.0 V  
3.3 V  
0.0 V  
3.3 V  
0.0 V  
H2S  
H2SW2  
H2S  
H2SW2  
6.0 V  
6.0 V  
H2X  
H2X  
0.0 V  
0.0 V  
3.3 V  
3.3 V  
RG1  
RG1  
0.0 V  
0.0 V  
Figure 19. 40 MHz Floating Gate Bypass Timing  
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KAE−04472  
EMCCD OPERATION  
H1BEM H2SEM  
H2BEM H1SEM H1BEM H2SEM H2BEM H1SEM  
A
B
C
D
NOTE: Charge flows from right to left.  
Figure 20. The Charge Multiplication Process  
The charge multiplication process, shown in Figure 20  
above, begins at time step A, when an electron is held under  
the H1SEM gate. The H2BEM and H1BEM gates block the  
electron from transferring to the next phase until the H2SEM  
has reached its maximum voltage. When the H2BEM is  
clocked from 0 to +5 V, the channel potential under H2BEM  
increases until the electron can transfer from H1SEM to  
H2SEM. When the H2SEM gate is above 10 V, the electric  
field between the H2BEM and H2SEM gates gives the  
electron enough energy to free a second electron which is  
collected under H2SEM. Then the voltages on H2BEM and  
H2SEM are both returned to 0 V at the same time that  
H1SEM is ramped up to its maximum voltage. Now the  
process can repeat again with charge transferring into the  
H1SEM gate.  
The alignment of clock edges is shown in Figure 21.  
The rising edge of the H1BEM and H2BEM gates must be  
delayed until the H1SEM or H2SEM gates have reached  
their maximum voltage. The falling edge of H1BEM and  
H2BEM must reach 0 V before the H1SEM or H2SEM  
reach 0 V. There are a total of 1,800 charge multiplying  
transfers through the EMCCD on each quadrant.  
www.onsemi.com  
23  
 
KAE−04472  
A
B
C
D
H2  
100%  
H2SEM  
H2BEM  
0%  
100%  
H1SEM  
H1BEM  
0%  
Figure 21. The Timing Diagram for Charge Multiplication  
The amount of gain through the EMCCD will depend on  
temperature and H1SEM and H2SEM voltage as shown in  
Figure 22. Gain also depends on substrate voltage, as shown  
in Figure 23, and on the input signal, as shown in Figure 24.  
1000  
100  
10  
1
12.0  
12.5  
13.0  
13.5  
14.0  
14.5  
15.0  
15.5  
16.0  
EMCCD Clock Amplitude (V)  
NOTE: This figure represents data from only one example image sensor, other image sensors will vary.  
Figure 22. The Variation of Gain vs. EMCCD High Voltage and Temperature  
www.onsemi.com  
24  
 
KAE−04472  
14.8  
14.7  
14.6  
14.5  
14.4  
14.3  
14.2  
14.1  
14.0  
13.9  
6
7
8
9
10  
11  
12  
V
SUB  
NOTE: EMCCD gain is not constant with substrate voltage.  
Figure 23. The Requirement EMCCD Voltage for Gain of 20x vs. Substrate Voltage  
22  
21  
20  
19  
18  
17  
0
50  
100  
150  
200  
250  
300  
Signal (e )  
NOTE: The EMCCD voltage was set to provide 20x gain with an input of 180 electrons.  
Figure 24. EMCCD Gain vs. Input Signal  
If more than one output is used, then the EMCCD high  
unpredictably from one image sensor to the next, as in  
Figure 25. Because of this, the gain vs. voltage relationship  
must be calibrated for each image sensor, although within  
each quadrant, the H1SEM and H2SEM high level voltage  
should be equal.  
level voltage must be independently adjusted for each  
quadrant. This is because each quadrant will require  
a slightly different voltage to obtain the same gain. In  
addition, the voltage required for a given gain differs  
www.onsemi.com  
25  
KAE−04472  
1000  
100  
10  
1
12.0  
12.5  
13.0  
13.5  
14.0  
14.5  
15.0  
15.5  
16.0  
EMCCD Clock Amplitude (V)  
Figure 25. An Example Showing How Two Image Sensors Can Have Different Gain vs. Voltage Curves  
The effective output noise of the image sensor is defined  
as the noise of the output signal divided by the gain. This is  
measured with zero input signal to the EMCCD. Figure 26  
shows the EMCCD by itself has a very low noise that goes  
as the noise at gain = 1 divided by the gain. The EMCCD has  
very little clock-induced charge and does not require  
elaborate sinusoidal waveform clock drivers. Simple square  
wave clock drivers with a resistor between the driver and  
sensor for a small RC time constant are all that is needed.  
However, the pixel array may acquire spurious charge as  
a function of VCCD clock driver characteristics.  
10  
1
0.1  
1
10  
100  
1000  
EMCCD Gain  
NOTE: The data represented by this chart includes noise from dark current and spurious charge generation.  
Figure 26. EMCCD Output Noise vs. EMCCD Gain in Single Output Mode from −305C to +105C  
Because of these pixel array noise sources, it is  
recommended that the maximum gain used be 100x, which  
typically gives a noise floor between 0.4e and 0.6e at −10°C.  
Using higher gains will provide limited benefit and will  
degrade the signal to noise ratio due to the EMCCD excess  
noise factor and spurious charge in the VCCD. Furthermore,  
the image sensor is not limited by dark current noise sources  
when the temperature is below −10°C. Therefore, cooling  
below −10°C will not provide a significant improvement to  
the noise floor, with the negative consequence that lower  
temperatures increase the probability of poor charge  
transfer.  
CAUTION: The EMCCD should not be operated near  
saturation for an extended period, as this  
may result in gain aging and permanently  
reduce the gain. It should be noted that  
device degradation associated with gain  
aging is not covered under the device  
warranty.  
www.onsemi.com  
26  
 
KAE−04472  
Operating Temperature  
Charge Switch Threshold  
The reasons for lowering the operating temperature are to  
reduce dark current noise and to reduce image defects.  
The average dark signal from the VCCD and photodiodes  
The floating gate output amplifier (VOUT1) is used to  
select the routing of a pixel charge packet at the charge  
switch. Pixels with large signals should be routed to the  
normal floating diffusion amplifier at VOUT2. Pixels with  
small signals should be routed to the EMCCD and VOUT3.  
The routing of pixels is controlled by the timing on H2SW2  
and H2SW3. The optimum signal threshold for that  
transition between VOUT2 and VOUT3 is approximately  
must be less than 1e in order to have a total system noise less  
than 1e when using the EMCCD. The recommended  
operating temperature is −10°C. This represents the best  
compromise of low noise performance vs. complexity of  
cooling the image sensor. Operation below −30°C is not  
recommended, and temperatures below −30°C may result in  
poor charge transfer in the HCCD. Operation above 0°C  
may result in excessive dark current noise.  
3 times the floating gate amplifier noise, or 126 e . Sending  
signals larger than 126 e into the EMCCD will produce  
images with lower signal to noise ratio than if they were read  
out of the normal floating diffusion output of VOUT2.  
www.onsemi.com  
27  
KAE−04472  
TIMING DIAGRAMS  
Pixel Timing  
50 ns  
H2S, H2L, H2  
H1S, H1  
H2X  
RG1  
RG23  
H2SEM  
H2BEM  
H1SEM  
H1BEM  
NOTE: The minimum time for one pixel is 50 ns.  
Figure 27. Pixel Timing Pattern P1  
Black, Clamp, VOUT1, VOUT2, and VOUT3  
Alignment at Line Start  
The black level clamping operation of the analog front end  
(AFE) should take place within the first 28 clock cycles of  
every row. This applies to all modes of operation.  
Charge Binning  
The KAE−04471 sensor has an option to bin charge 2x2  
or 4x4 at a horizontal clock rate of 20 MHz to give binned  
pixel output rate of 10 MHz or 5 MHz.  
VCCD Timing  
Vertical Transfer Times and Pulse Widths  
Table 15. TIMING DEFINITIONS  
Symbol  
Definition  
VCCD Transfer Time A  
Min  
1.2  
1.2  
2.0  
3.0  
Nominal  
1.2  
Max  
2.0  
Unit  
ms  
T
VA  
T
VB  
VCCD Transfer Time B  
1.2  
4.0  
ms  
T
SUB  
Electronic Shutter Pulse  
2.5  
10.0  
5.0  
ms  
T
3
Photodiode to VCCD Transfer Time  
3.0  
ms  
www.onsemi.com  
28  
KAE−04472  
Clock Edge Alignments for V1, V2, V3, V4  
V1B, V1T  
V2B, V4T  
V3B, V3T  
V4B, V2T  
T
VB  
T
VB  
T
VB  
T
VB  
T
VB  
T
VA  
T
VA  
T
3
T
VA  
T
VA  
Figure 28. Timing Pattern F1. VCCD Frame Timing to Transfer Charge from Photodiodes to the VCCD  
when Using the Bottom HCCD Outputs A or B  
V1B  
V2B, V3T  
V3B, V4T  
V4B  
V1T  
V2T  
T
VB  
T
VB  
T
VB  
T
VB  
T
VB  
T
VA  
T
VA  
T
3
T
VA  
T
VA  
Figure 29. Timing Pattern F2. VCCD Frame Timing to Transfer Charge from Photodiodes to the VCCD  
when Using All Four Outputs in Quad Output Mode  
www.onsemi.com  
29  
KAE−04472  
V1B, V1T  
V2B, V4T  
V3B, V3T  
V4B, V2T  
T
VB  
T
VB  
T
VB  
T
VB  
T
VA  
T
VA  
T
VA  
T
VA  
Figure 30. Line Timing L1. VCCD Line Timing to Transfer One Line of Charge from VCCD to the HCCD  
when Using the Bottom HCCD Outputs A or B in Single or Dual Output Modes  
V1B, V2T  
V2B, V3T  
V3B, V4T  
V4B, V1T  
T
VB  
T
VB  
T
VB  
T
VB  
T
VA  
T
VA  
T
VA  
T
VA  
Figure 31. Line Timing L2. VCCD Line Timing to Transfer One Line of Charge from the VCCD to the HCCD  
when Using All Four Outputs in Quad Output Mode  
www.onsemi.com  
30  
KAE−04472  
Electronic Shutter  
V
AB  
+ V  
ES  
V
SUB  
V
AB  
3.3 V  
0 V  
HCCD  
VCCD  
0 V  
−8 V  
T
VB  
T
SUB  
T
VB  
Last HCCD  
Clock Edge  
First VCCD  
Clock Edge  
Figure 32. Electronic Shutter Timing Pattern S1  
CAUTION: The EMCCD register must not be clocked  
while the electronic shutter pulse is high.  
HCCD and EMCCD Clocks for Electronics Shutter  
The HCCD and EMCCD clocks must be static during the  
frame, line, and electronic shutter timing sequences.  
Table 16. HCCD AND EMCCD CLOCKS FOR ELECTRONICS SHUTTER  
Clocks  
State  
High  
Low  
H1S, H1, H1SEM, H1BEM  
H2S, H2, H2SW, H2L, H2X, H2SEM, H2BEM  
HCCD Timing  
To reverse the direction of charge transfer in a Horizontal  
CCD, the timing patterns of the H1B and H2B inputs of that  
HCCD are exchanged. If a HCCD is not used, all of its gates  
are to be held at the high level.  
Table 17. HCCD TIMING  
Mode  
HCCD a, b Timing  
H1Ba = H2Bb = H1Sa = H1Sb  
HCCD c, d Timing  
Single  
3.3 V  
H2Ba = H1Bb = H2Sa = H2Sb  
Dual  
H1Ba = H1Bb = H1Sa = H1Sb  
H2Ba = H2Bb = H2Sa = H2Sb  
3.3 V  
Quad  
H1Ba = H1Bb = H1Sa = H1Sb  
H2Ba = H2Bb = H2Sa = H2Sb  
H1Bc = H1Bd = H1Sc = H1Sd  
H2Bc = H2Bd = H2Sc = H2Sd  
Table 18. FRAME RATES  
Single  
Dual (Left/Right)  
6.9  
Dual (Top/Bottom)  
Quad  
Unit  
fps  
3.7  
7.4  
13.8  
www.onsemi.com  
31  
KAE−04472  
Image Exposure and Readout  
The flowchart for image exposure and readout is shown in  
the figure below. The electronic shutter timing may be  
omitted to obtain an exposure time equal to the image read  
out time. NEXP is the number of lines exposure time and NV  
is the number of VCCD clock cycles (row transfers).  
Table 19. IMAGE READOUT TIMING  
Mode  
Single  
NH  
NV  
Line Timing  
Frame Timing  
2316  
1158  
2316  
1158  
2144  
2144  
1072  
1072  
L1  
L1  
L2  
L2  
F1  
F1  
F2  
F2  
Dual (Left/Right)  
Dual (Top/Bottom)  
Quad  
Frame Timing  
Line Timing  
Pixel Timing  
Line Timing  
Pixel Timing  
Repeat NH Times  
Repeat NH Times  
Repeat NV − NEXP  
Times  
Repeat NEXP Times  
Electronic Shutter  
Timing  
Figure 33. The Image Readout Timing Flow Chart  
www.onsemi.com  
32  
KAE−04472  
Long Integrations and Readout  
For extended integrations the output amplifiers need to be  
powered down. When powered up, the output amplifiers  
emit near infrared light that is sensed by the photodiodes. It  
will begin to be visible in images of 30 second integrations  
or longer.  
Stop all VCCD clocks at  
the V (−8 V) level.  
LOW  
Pulse the electronic shutter on V  
empty all photodiodes.  
to  
SUB  
Integration begins on the falling edge of  
the electronic shutter pulse.  
Set VDD = +5.0 V  
Set VDD1 = 0.0 V  
Set VSS1 = 0.0 V  
Wait…  
Set VDD = +15.0 V  
Set VSS1 = −8.0 V  
Set VDD1 = +5.0 V  
Begin normal line timing  
Repeat for at least 6000  
lines in single or dual  
output mode, 3000 lines  
in quad output mode.  
Read out the photodiodes  
and one image.  
Figure 34. Timing Flow Chart for Long Integration Time  
To power down the output amplifiers set VDD1 and VSS1  
powered. The HCCD and EMCCD may be continue to clock  
during integration. If they are stopped during integration  
then the EMCCD should be re-started at +7 V amplitude to  
flush out any undesired signal before increasing the voltage  
to charge multiplying levels.  
to 0 V, and VDD2(a,b,c,d) and VDD3(a,b,c,d) to +5 V.  
VDD must not be set to 0 V during the integration of an  
image. During the time the VDD supply is reduced to +5 V  
the VDD15 pin is to be kept at +15 V. The substrate voltage  
reference output SUBV will be valid as long as VDD15 is  
www.onsemi.com  
33  
KAE−04472  
THERMOELECTRIC COOLER  
Representative performance plots for the TEC are shown  
below:  
of a PWM controller) to maintain the cold side (sensor side)  
temperature at 0°C, while the input signal to the EMCCD  
registers was 20 mV, the EMCCD gains were set to 20X, and  
the horizontal clock rate was 20 MHz. For these conditions,  
the recommended maximum input current (Imax) is 1.1 A,  
requiring an input voltage (Vmax) of 11.2 V. Lower cold side  
temperatures may have different optimum operating  
conditions.  
Performance Plots of Integrated TECs  
For the performance plots below, the thermoelectric  
cooler (TEC) was in a dry package cavity, sealed under  
nitrogen. The ambient temperature was 27°C. The TEC  
controller was operated in DC mode (maximum pulse width  
ΔT and Voltage vs. Current  
70.0  
60.0  
50.0  
40.0  
30.0  
20.0  
10.0  
0.0  
Cooling System Thermal Resistance = 0.0 °C/W  
(Maximum Performance)  
Cooling System Thermal Resistance = 0.3 °C/W  
Cooling System Thermal Resistance = 0.6 °C/W  
Cooling System Thermal Resistance = 0.9 °C/W  
0.00  
0.20  
0.40  
0.60  
0.80  
1.00  
1.20  
1.40  
1.60  
16.0  
14.0  
12.0  
10.0  
8.0  
6.0  
4.0  
2.0  
0.0  
0.00  
0.20  
0.40  
0.60  
0.80  
1.00  
1.20  
1.40  
1.60  
Operating Current [A]  
Figure 35. Performance Plots of Integrated TECs  
The plot shown below separately shows the dependence  
of cooling performance (DT) on the thermal resistance of the  
cooling system.  
www.onsemi.com  
34  
KAE−04472  
70  
60  
50  
40  
30  
20  
10  
0
y = -19.3x + 61.7  
0.0  
0.5  
1.0  
1.5  
2.0  
2.5  
Cooling System Thermal Resistance [K/W] (Cooling source at 27C)  
Figure 36. Maximum DT vs. Cooling System Thermal Resistance  
The thermoelectric cooler has an on−board thermistor.  
The current model has 3% tolerance and 10 kW (Ro) at  
25°C (298°K, To). Its performance is shown in the plot  
below and follows the equation, where T = temperature in  
°K, over the range of 233°K to 398°K, and R = thermistor  
T
resistance in ohms.  
360  
340  
320  
300  
280  
260  
240  
220  
200  
100  
1,000  
10,000  
100,000  
1,000,000  
Resistance [W]  
Figure 37. Thermistor Resistance vs. Temperature  
1
T +  
3
NJ
Nj
(7.96E * 4) ) (2.67E * 4) * ln(RT) ) (1.21E * 7) * (ln(RT))  
www.onsemi.com  
35  
KAE−04472  
STORAGE AND HANDLING DETAILS  
For information on charge binning please download the  
KAE−04471 Charge Binning Application Note  
(AND9597/D) from www.onsemi.com.  
For quality and reliability information, please download  
the Quality & Reliability Handbook (HBD851/D) from  
www.onsemi.com.  
For information on Storage, ESD prevention, cover glass  
care, and cleanliness, please download the Image Sensor  
Handling and Best Practices Application Note  
(AN52561/D) from www.onsemi.com.  
Please note that CCD products are not shipped or stored  
in Moisture Barrier Bags (MBB), and Moisture Sensitivity  
Level (MSL) ratings are not specified.  
For information on device numbering and ordering codes,  
please download the Device Nomenclature technical note  
(TND310/D) from www.onsemi.com.  
For information on Standard terms and Conditions of  
Sale, please download Terms and Conditions from  
www.onsemi.com.  
For information on soldering recommendations, please  
download the Soldering and Mounting Techniques  
Reference  
Manual  
(SOLDERRM/D)  
from  
www.onsemi.com.  
www.onsemi.com  
36  
KAE−04472  
MECHANICAL INFORMATION  
Figure 38. Completed Assembly (1 of 3)  
www.onsemi.com  
37  
KAE−04472  
Figure 39. Completed Assembly (2 of 3)  
www.onsemi.com  
38  
KAE−04472  
Figure 40. Completed Assembly (3 of 3)  
www.onsemi.com  
39  
KAE−04472  
Cover Glass  
(20.30 SQ) SQ  
A−ZONE  
4X (C0.50)  
4X (R0.30)  
28.50 SQ  
16X (C0.20)  
0.95 0.05  
NCO−150HB EPOXY  
THICKNESS: 0.14 0.04  
NOTES:  
1. DUST, SCRATCH, INCLUSION DEFECT SPEC: 10m m MAX (A−ZONE).  
2. GLASS MATERIAL: SCHOTT D263T eco.  
3. ANTI−REFLECTION COATINGS ON BOTH SIDES OF SUBSTRATE TO MEET THE FOLLOWING  
MINIMUM TRANSMISION SPECIFICATIONS:  
365 nm  
Tabs > 50%  
Tabs > 97%  
Tabs > 85%  
Tave > 88%  
400−900 nm  
900−1100 nm  
900−1100 nm  
4. EPOXY IS B−STAGED FORM (REF. KSD−248−0109, SPEC KSD−241−0009)  
5. ALL CONTAMINATION OUTSIDE THE A−ZONE MUST BE REMOVABLE WITH N2 AT 40 PSI.  
0.50mm, Y[ 0.50mm, Z[  
6. EDGE CHIPS: X[  
0.48mm.  
Figure 41. Cover Glass  
www.onsemi.com  
40  
KAE−04472  
Figure 42. Cover Glass Transmission  
ON Semiconductor and  
are trademarks of Semiconductor Components Industries, LLC dba ON Semiconductor or its subsidiaries in the United States and/or other countries.  
ON Semiconductor owns the rights to a number of patents, trademarks, copyrights, trade secrets, and other intellectual property. A listing of ON Semiconductor’s product/patent  
coverage may be accessed at www.onsemi.com/site/pdf/Patent−Marking.pdf. ON Semiconductor reserves the right to make changes without further notice to any products herein.  
ON Semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does ON Semiconductor assume any liability  
arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation special, consequential or incidental damages.  
Buyer is responsible for its products and applications using ON Semiconductor products, including compliance with all laws, regulations and safety requirements or standards,  
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KAE−04472/D  

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VISHAY