MP3V5050VC6U [FREESCALE]

High Temperature Accuracy Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated; 高温度精度集成硅压力传感器片上信号调节,温度补偿和校准
MP3V5050VC6U
型号: MP3V5050VC6U
厂家: Freescale    Freescale
描述:

High Temperature Accuracy Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
高温度精度集成硅压力传感器片上信号调节,温度补偿和校准

传感器 压力传感器 温度补偿
文件: 总8页 (文件大小:92K)
中文:  中文翻译
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MP3V5050V  
Rev 1, 10/2008  
Freescale Semiconductor  
Technical Data  
High Temperature Accuracy  
Integrated Silicon Pressure Sensor  
On-Chip Signal Conditioned,  
Temperature Compensated and  
Calibrated  
The MP3V5050V sensor integrates on-chip, bipolar op amp circuitry and thin  
film resistor networks to provide a high output signal and temperature  
compensation. The small form factor and high reliability of on-chip integration  
make the Freescale Semiconductor, Inc. pressure sensor a logical and  
economical choice for the system designer.  
MP3V5050V  
Series  
INTEGRATED  
PRESSURE SENSOR  
–50 to 0 kPa (–7.25 to 0 psi)  
0.12 to 2.8 Volts Output  
SMALL OUTLINE PACKAGE  
The MP3V5050V piezoresistive transducer is a state-of-the-art, monolithic,  
signal conditioned, silicon pressure sensor. This sensor combines advanced  
micromachining techniques, thin film metallization, and bipolar semiconductor  
processing to provide an accurate, high level analog output signal that is  
proportional to applied pressure.  
Figure 1 shows a block diagram of the internal circuitry integrated on a  
pressure sensor chip.  
Features  
MP3V5050VC6T1  
CASE 482A-01  
2.5% Maximum Error over 0° to 85°C  
Ideally suited for Microprocessor or Microcontroller-Based Systems  
Temperature Compensated from Over –40° to +125°C  
Patented Silicon Shear Stress Strain Gauge  
PIN NUMBER(1)  
Durable Thermoplastic (PPS) Surface Mount Package  
Easy-to-Use Chip Carrier Option  
1
2
N/C  
VS  
5
6
N/C  
N/C  
Ideal for Automotive and Non-Automotive Applications  
Typical Applications  
Vacuum Pump Monitoring  
3
4
GND  
VOUT  
7
8
N/C  
N/C  
ORDERING INFORMATION  
1. Pins 1, 5, 6, 7, and 8 are internal device  
connections. Do not connect to external  
circuitry or ground. Pin 1 is noted by the  
notch in the lead.  
Device  
Type  
Case  
No.  
MPX Series  
Order No.  
Packing  
Options  
Options  
Device Marking  
Ported  
Vacuum,  
482A MP3V5050VC6T1 Tape & Reel MP3V5050V  
Element Axial Port  
Ported Vaccum,  
Element Axial Port  
482A MP3V5050VC6U  
Rail  
MP3V5050V  
VS  
Gain Stage #2  
and  
Ground  
Reference  
Shift Circuitry  
Thin Film  
Temperature  
Compensation  
and  
Sensing  
Element  
Vout  
Gain Stage #1  
Pins 1, 5, 6, 7, and 8 are NO CONNECTS  
GND  
MP3V5050V  
Sensors  
Freescale Semiconductor  
1
Figure 1. Fully Integrated Pressure Sensor Schematic  
Table 1. Maximum Ratings(1)  
Rating  
Symbol  
Value  
Units  
Maximum Pressure (P1 > P2)  
Storage Temperature  
Pmax  
200  
kPa  
Tstg  
TA  
–40° to +125°  
–40° to +125°  
°C  
°C  
Operating Temperature  
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.  
Table 2. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2.)  
Characteristic  
Symbol  
Min  
Typ  
Max  
Unit  
Pressure Range  
POP  
–50  
0
kPa  
Vdc  
Supply Voltage(1)  
Supply Current  
VS  
Io  
2.7  
3.0  
7.0  
2.8  
3.3  
10  
mAdc  
Vdc  
Full Scale Output(2)  
@ VS = 3.0 Volts  
(0 to 85°C)  
(Pdiff = 0 kPa)  
VFSO  
2.7  
2.9  
Full Scale Span(3)  
@ VS = 3.0 Volts  
(0 to 85°C)  
(0 to 85°C)  
VFSS  
2.7  
Vdc  
Accuracy(4)  
Sensitivity  
±2.5  
%VFSS  
V/P  
tR  
54  
—-  
—-  
mV/kPa  
ms  
Response Time(5)  
Warm-Up Time(6)  
Offset Stability(7)  
Pressure Offset(8)  
1.0  
20  
—-  
—-  
ms  
%VFSS  
Vdc  
±0.5  
0.12  
Voff  
0.06  
0.19  
(0 to 85°C)  
1. Device is ratiometric within this specified excitation range.  
2. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.  
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the  
minimum rated pressure.  
4. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span  
at 25°C due to all sources of errors, including the following:  
• Linearity:  
Output deviation from a straight line relationship with pressure over the specified pressure range.  
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to  
and from the minimum or maximum operating temperature points, with zero differential pressure applied.  
• Pressure Hysteresis:  
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum  
or maximum rated pressure at 25°C.  
TcSpan:  
TcOffset:  
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.  
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.  
5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a  
specified step change in pressure.  
6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.  
7. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.  
8. Offset (Voff) is defined as the output voltage at the minimum rated pressure.  
MP3V5050V  
Sensors  
2
Freescale Semiconductor  
+3 V  
FLUOROSILICONE  
GEL DIE COAT  
STAINLESS  
STEEL CAP  
DIE  
P1  
OUTPUT  
Vout  
WIRE BOND  
THERMOPLASTIC  
CASE  
Vs  
LEAD  
FRAME  
IPS  
GND  
1.0 µF  
470 pF  
0.01 µF  
P2  
DIFFERENTIAL SENSING ELEMENT  
DIE BOND  
Figure 3. Typical Application Circuit  
(Output Source Current Operation)  
Figure 2. Cross-Sectional Diagram  
(not to scale)  
TRANSFER FUNCTION MP3V5050VC6T1  
3
Transfer Function:  
out = V x (0.018 x P + 0.94) ± (PE x TM x 0.018 x Vs  
V
)
S
Vs = 3.0 ± 0.30 Vdc  
PE = 1.25  
TM = 1  
Temperature = 0 to 85°C  
2
TYPICAL  
MAX  
1
0
MIN  
–50  
–40  
–30  
Pressure (kPa)  
–20  
–10  
0
Offset  
(Typ)  
Figure 4. Output versus Differential Pressure  
Figure 4 shows the sensor output signal relative to  
pressure input. Typical minimum and maximum output  
curves are shown for operation over 0 to 85°C temperature  
range. The output will saturate outside of the rated pressure  
range.  
be transmitted to the silicon diaphragm. The MP3V5050V  
pressure sensor operating characteristics, internal reliability  
and qualification tests are based on use of dry air as the  
pressure media. Media other than dry air may have adverse  
effects on sensor performance and long-term reliability.  
Contact the factory for information regarding media  
compatibility in your application.  
A fluorosilicone gel isolates the die surface and wire bonds  
from the environment, while allowing the pressure signal to  
MP3V5050V  
Sensors  
Freescale Semiconductor  
3
Transfer Function (MP3V5050VC6T1  
Nominal Transfer Value: Vout = VS x (0.018 x P + 0.94)  
± (Pressure Error x Temp Multi x 0.018 x VS)  
V
S = 3.0 ± 0.3 V  
Temperature Error Band  
MP3V5050V  
4.0  
Break Points  
Temp  
Multiplier  
3.0  
–40  
0 to 85  
+125  
3
1
3
Temperature  
Error  
Factor  
2.0  
1.0  
0.0  
–40  
–20  
0
20  
40  
60  
80  
100  
120  
140  
Temperature in °C  
NOTE: The Temperature Multiplier is a linear response from 0°C to –40°C and from 85°C to 125°C.  
Pressure Error Band  
MPXV5050V  
Error Limits for Pressure  
1.25  
1.00  
0.75  
0
Pressure (in kPa)  
–50  
–40  
–30  
–20  
–10  
0
–0.75  
–1.00  
–1.25  
Pressure  
–50 to 0 kPa  
Error (Max)  
±1.25 kPa  
MP3V5050V  
Sensors  
Freescale Semiconductor  
4
MINIMUM RECOMMENDED FOOTPRINT FOR SMALL OUTLINE PACKAGE  
Surface mount board layout is a critical portion of the total  
solder reflow process. It is always recommended to fabricate  
boards with a solder mask layer to avoid bridging and/or  
shorting between solder pads, especially on tight tolerances  
and/or tight layouts.  
design. The footprint for the semiconductor package must be  
the correct size to ensure proper solder connection interface  
between the board and the package. With the correct pad  
geometry, the packages will self-align when subjected to a  
0.100 TYP  
2.54  
0.660  
16.76  
0.060 TYP 8X  
1.52  
0.300  
7.62  
inch  
mm  
0.100 TYP 8X  
2.54  
Figure 5. SOP Footprint (Case 482A)  
MP3V5050V  
Sensors  
Freescale Semiconductor  
5
PACKAGE DIMENSIONS  
-A-  
D 8 PL  
4
1
M
S
S
A
NOTES:  
1. DIMENSIONING AND TOLERANCING PER ANSI  
Y14.5M, 1982.  
2. CONTROLLING DIMENSION: INCH.  
3. DIMENSION A AND B DO NOT INCLUDE MOLD  
PROTRUSION.  
0.25 (0.010)  
T
B
5
8
N
-B-  
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).  
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.  
G
INCHES  
MIN MAX  
MILLIMETERS  
DIM  
A
B
C
D
G
H
J
K
M
N
MIN  
10.54  
10.54  
12.70  
0.96  
MAX  
10.79  
10.79  
13.21  
1.07  
S
0.415 0.425  
0.415 0.425  
0.500 0.520  
0.038 0.042  
0.100 BSC  
W
2.54 BSC  
0.002 0.010  
0.009 0.011  
0.061 0.071  
0.05  
0.23  
1.55  
0˚  
0.25  
0.28  
1.80  
7˚  
V
0˚  
7˚  
C
0.444 0.448  
0.709 0.725  
0.245 0.255  
0.115 0.125  
11.28  
18.01  
6.22  
2.92  
11.38  
18.41  
6.48  
3.17  
S
V
W
H
J
-T-  
SEATING  
PLANE  
PIN 1 IDENTIFIER  
M
K
CASE 482A-01  
ISSUE A  
SMALL OUTLINE PACKAGE  
MP3V5050V  
Sensors  
Freescale Semiconductor  
6
NOTES  
MP3V5050V  
Sensors  
Freescale Semiconductor  
7
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© Freescale Semiconductor, Inc. 2008. All rights reserved.  
MP3V5050V  
Rev. 1  
10/2008  

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