MPXM2202D [FREESCALE]
200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors; 200千帕片上温度补偿和校准硅压力传感器
| 型号： | MPXM2202D |
| 厂家： | 
Freescale |
| 描述： | 200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors |
| 文件： | 总9页 (文件大小：261K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
MPXM2202
Rev 2, 09/2005
Freescale Semiconductor
Technical Data
200 kPa On-Chip Temperature
Compensated and Calibrated
Silicon Pressure Sensors
MPXM2202
SERIES
The MPXM2202 device is a silicon piezoresistive pressure sensors providing
a highly accurate and linear voltage output directly proportional to the applied
pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin-film resistor network integrated on-chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
COMPENSATED AND CALIBRATED
PRESSURE SENSOR
0 TO 200 kPA (0 TO 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
•
•
•
•
Temperature Compensated Over 0°C to + 85°C
Available in Easy-to-Use Tape and Reel
Ratiometric to Supply Voltage
MPAK PACKAGE
Gauge Ported and Non Ported Options
Typical Applications
MPXM2202D/A
CASE 1320-02
•
•
•
•
•
•
•
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
MPXM2202GS/AS
CASE 1320A-02
ORDERING INFORMATION
Device
Type
Case
No.
MPX Series
Order No.
Packing
Options
Device
Marking
Options
Absolute,
PIN NUMBER
1
2
GND
3
4
VS
Non-
ported
1320 MPXM2202D
1320 MPXM2202DT1
1320 MPXM2202A
1320 MPXM2202AT1
Rails
MPXM2202D
Element Only
+VOUT
-VOUT
Absolute,
Element Only
Tape & Reel MPXM2202D
Absolute,
Element Only
Rails
MPXM2202A
Absolute,
Tape & Reel MPXM2202A
Element Only
Ported
Absolute, Axial 1320A MPXM2202GS
Port
Rails
MPXM2202G
Absolute, Axial 1320A MPXM2202GST1 Tape & Reel MPXM2202G
Port
Absolute, Axial 1320A MPXM2202AS
Port
Rails
MPXM2202A
Absolute, Axial 1320A MPXM2202AST1 Tape & Reel MPXM2202A
Port
© Freescale Semiconductor, Inc., 2005. All rights reserved.
Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
V
S
3
Thin Film
Temperature
Compensation
and
Calibration
Circuitry
2
4
X-ducer
Sensing
Element
VOUT+
VOUT-
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT VERSUS
APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side relative to the vacuum side. Similarly, output voltage
increases as increasing vacuum is applied to the vacuum
side relative to the pressure side.
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
Table 1. Maximum Ratings(1)
Rating
Symbol
Pmax
Tstg
Value
400
Unit
kPa
°C
Maximum Pressure
Storage Temperature
Operating Temperature
-40 to +125
-40 to +125
TA
°C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
MPXM2202
Sensors
Freescale Semiconductor
2
Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.)
Characteristic
Pressure Range(1)
Symbol
POP
VS
Min
0
Typ
—
Max
200
16
Unit
kPa
Vdc
mAdc
mV
Supply Voltage(2)
—
10
Supply Current
IO
—
6.0
40
—
Full Scale Span(3)
VFSS
VOFF
38.5
41.5
Offset(4)
MPXM2202D/G Series
MPXM2202A Series
-1.0
-2.0
—
—
1.0
2.0
mV
Sensitivity
Linearity(5)
∆V/∆P
—
0.2
—
mV/kPa
%VFSS
MPXM2202D/G Series
MPXM2202A Series
—
—
-0.6
-1.0
—
—
0.4
1.0
Pressure Hysteresis(5) (0 to 100 kPa)
—
—
—
—
±0.1
±0.5
—
—
—
%VFSS
%VFSS
%VFSS
mV
Temperature Hysteresis(5) (-40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
Input Impedance
TCVFSS
TCVOFF
ZIN
-2.0
-1.0
1000
1400
—
2.0
1.0
2500
3000
—
—
—
Ω
Output Impedance
ZOUT
tR
—
Ω
Response Time(6) (10% to 90%)
Warm-Up
1.0
20
ms
—
—
—
ms
Offset Stability(7)
—
—
±0.5
—
%VFSS
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• TcSpan:
• TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXM2202
Sensors
Freescale Semiconductor
3
LINEARITY
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Linearity refers to how well a transducer's output follows
the equation: VOUT = VOFF + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or
(2) a least squares best line fit. While a least squares fit gives
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. The
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Least
Least Squares Fit
Square
Deviation
Exaggerated
Performance
Curve
Straight Line
Deviation
Least
Square
Deviation
End Point Straight Line Fit
Offset
0
50
100
Pressure(% Fullscale)
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION AND
CALIBRATION
is directly proportional to the differential pressure and is es-
sentially a straight line.
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPXM2202 series at 25°C. The output
VS = 10 Vdc
40
TA = 25°C
35
30
25
20
15
10
5
TYP
Span
Range
(TYP)
MAX
MIN
0
-5
Offset
(TYP)
0
25
50
7.25
75
100 125 150 175 200
14.5 21.75 29
kPa
PSI
Figure 3. Output versus Pressure Differential
MPXM2202
Sensors
4
Freescale Semiconductor
PACKAGE DIMENSIONS
PAGE 1 OF 2
CASE 1320-02
ISSUE B
MPXM2202
Sensors
Freescale Semiconductor
5
PACKAGE DIMENSIONS
PAGE 2 OF 2
CASE 1320-02
ISSUE B
MPXM2202
Sensors
Freescale Semiconductor
6
PACKAGE DIMENSIONS
PIN 4
PIN 1
PAGE 1 OF 2
CASE 1320A-02
ISSUE A
MPXM2202
Sensors
Freescale Semiconductor
7
PACKAGE DIMENSIONS
PAGE 2 OF 2
CASE 1320A-02
ISSUE A
MPXM2202
Sensors
Freescale Semiconductor
8
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MPXM2202
Rev. 2
09/2005
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