MPX10 [MOTOROLA]
0 to 10 kPa (0-1.45 psi) 35 mV FULL SCALE SPAN (TYPICAL); 0到10千帕（ 0-1.45磅） 35 mV的满量程（典型值）
| 型号： | MPX10 |
| 厂家： | 
MOTOROLA |
| 描述： | 0 to 10 kPa (0-1.45 psi) 35 mV FULL SCALE SPAN (TYPICAL) |
| 文件： | 总8页 (文件大小：161K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
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by MPX10/D
SEMICONDUCTOR TECHNICAL DATA
0 to 10 kPa (0–1.45 psi)
35 mV FULL SCALE SPAN
(TYPICAL)
The MPX10 series device is a silicon piezoresistive pressure sensor providing a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
Features
•
•
•
•
•
Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
Differential and Gauge Options
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
Application Examples
•
•
•
•
•
•
•
•
Air Movement Control
Environmental Control Systems
Level Indicators
Leak Detection
Medical Instrumentation
Industrial Controls
Pneumatic Control Systems
Robotics
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
NOTE: Pin 1 is the notched pin.
PIN 3
+ V
S
PIN NUMBER
PIN 2
+ V
out
1
2
Gnd
+V
3
4
V
S
X–ducer
–V
out
out
PIN 4
– V
out
PIN 1
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 5
Motorola, Inc. 1997
MAXIMUM RATINGS
Rating
Symbol
Value
75
Unit
kPa
kPa
°C
(8)
Overpressure (P1 > P2)
P
max
(8)
Burst Pressure (P1 > P2)
P
burst
100
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
OPERATING CHARACTERISTICS (V = 3.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
Characteristic
(1)
A
Symbol
Min
0
Typ
—
Max
10
Unit
kPa
Vdc
mAdc
mV
Differential Pressure Range
P
OP
(2)
Supply Voltage
V
S
—
3.0
6.0
35
6.0
—
Supply Current
I
o
—
(3)
Full Scale Span
V
FSS
20
50
(4)
Offset
V
off
0
20
35
mV
Sensitivity
(5)
∆V/∆P
—
—
3.5
—
—
mV/kPa
Linearity
Pressure Hysteresis (0 to 10 kPa)
(5)
–1.0
—
1.0
—
%V
%V
%V
FSS
FSS
FSS
(5)
—
± 0.1
± 0.5
—
Temperature Hysteresis (–40°C to +125°C)
(5)
—
—
—
Temperature Coefficient of Full Scale Span
(5)
TCV
FSS
–0.22
—
–0.16
—
%V
/°C
µV/°C
FSS
Temperature Coefficient of Offset
TCV
off
±15
—
(5)
Temperature Coefficient of Resistance
Input Impedance
TCR
0.21
400
750
—
0.27
550
1250
—
%Z /°C
in
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
t
R
1.0
20
ms
ms
Warm–Up
—
—
—
—
(9)
Offset Stability
—
±0.5
—
%V
FSS
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
—
Typ
2.0
—
Max
—
Unit
Weight (Basic Element, Case 344–15)
—
—
Grams
kPa
(7)
Common Mode Line Pressure
—
690
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
FSS
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
•
TCR:
Z
deviation with minimum rated pressure applied, over the temperature range of –40°C to +125°C,
in
relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
TEMPERATURE COMPENSATION
Figure 2 shows the typical output characteristics of the
MPX10 series over temperature.
or by designing your system using the MPX2010D series
sensor.
Several approaches to external temperature compensa-
tion over both –40 to +125°C and 0 to +80°C ranges are
presented in Motorola Applications Note AN840.
The X–ducer piezoresistive pressure sensor element is a
semiconductor device which gives an electrical output signal
proportional to the pressure applied to the device. This de-
vice uses a unique transverse voltage diffused semiconduc-
tor strain gauge which is sensitive to stresses produced in a
thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differ-
ences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: V
= V + sensitivity x P over the operating
out
off
pressure range (Figure 3). There are two basic methods for
calculating nonlinearity: (1) end point straight line fit or (2) a
least squares best line fit. While a least squares fit gives the
“best case” linearity error (lower numerical value), the cal-
culations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components,
80
70
70
60
50
–40°C
LINEARITY
60
+25°C
V
= 3 Vdc
P1 > P2
S
50
SPAN
RANGE
(TYP)
+125°C
ACTUAL
40
40
30
20
10
SPAN
(V
)
FSS
30
20
THEORETICAL
OFFSET
(TYP)
10
0
OFFSET
(V
0
PSI
)
0
0.3
2.0
0.6
4.0
PRESSURE DIFFERENTIAL
0.9
1.2
8.0
1.5
10
OFF
0
MAX
kPa
6.0
P
OP
PRESSURE (kPA)
Figure 2. Output versus Pressure Differential
Figure 3. Linearity Specification Comparison
SILICONE
DIE COAT
STAINLESS STEEL
METAL COVER
DIE
P1
P2
EPOXY
CASE
WIRE BOND
RTV DIE
BOND
LEAD FRAME
Figure 4. Cross–Sectional Diagram (not to scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344–15). A silicone gel iso-
lates the die surface and wire bonds from the environment,
while allowing the pressure signal to be transmitted to the sil-
icon diaphragm.
tics and internal reliability and qualification tests are based
on use of dry air as the pressure media. Media other than dry
air may have adverse effects on sensor performance and
long term reliability. Contact the factory for information re-
garding media compatibility in your application.
The MPX10 series pressure sensor operating characteris-
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
pressure sensor is designed to operate with positive differen-
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing silicone gel which
isolates the die from the environment. The Motorola MPX
tial pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the table
below:
Part Number
Case Type
344–15C
344C–01
344B–01
344D–01
344E–01
344F–01
Pressure (P1) Side Identifier
Stainless Steel Cap
MPX10D
MPX10DP
MPX10GP
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
MPX10GVP
MPX10GS
MPX10GSX
Side with Port Attached
Side with Port Attached
ORDERING INFORMATION
MPX10 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
Device Type
Basic Element
Ported Elements
Options
Differential
Case Type
Case 344–15
Order Number
MPX10D
Device Marking
MPX10D
Differential
Case 344C–01
Case 344B–01
Case 344D–01
Case 344E–01
Case 344F–01
MPX10DP
MPX10GP
MPX10GVP
MPX10GS
MPX10GSX
MPX10DP
MPX10GP
MPX10GVP
MPX10D
Gauge
Gauge Vacuum
Gauge Stove Pipe
Gauge Axial
MPX10D
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
POSITIVE
PRESSURE (P1)
R
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
M
INCHES
MILLIMETERS
B
–A–
DIM
A
B
C
D
MIN
MAX
0.630
0.534
0.220
0.020
0.064
MIN
15.11
13.06
5.08
MAX
16.00
13.56
5.59
0.595
0.514
0.200
0.016
0.048
N
L
1
2
3
4
PIN 1
0.41
0.51
–T–
F
1.22
1.63
SEATING
G
J
L
M
N
R
0.100 BSC
2.54 BSC
PLANE
0.014
0.695
0.016
0.725
0.36
0.40
G
POSITIVE
PRESSURE
(P1)
J
17.65
18.42
F
30 NOM
30 NOM
D 4 PL
0.475
0.430
0.495
0.450
12.07
10.92
12.57
11.43
M
M
0.136 (0.005)
T A
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE W
NOTES:
–A–
SEATING
PLANE
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
U
L
R
INCHES
MILLIMETERS
H
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
MAX
29.85
18.16
8.26
1.145
0.685
0.305
0.016
0.048
N
PORT #1
POSITIVE
PRESSURE
(P1)
–Q–
0.41
0.51
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
1
2
3
4
PIN 1
K
–P–
S
M
S
0.25 (0.010)
T
Q
J
F
U
0.910 BSC
23.11 BSC
G
C
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
V
PORT #1
W
L
R
H
INCHES
MILLIMETERS
PORT #2
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.435
0.020
0.064
MIN
29.08
17.40
10.29
0.41
MAX
29.85
18.16
11.05
0.51
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
1.145
0.685
0.405
0.016
0.048
N
–Q–
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
SEATING
PLANE
SEATING
PLANE
B
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.063
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.083
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
1.60
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
2.11
1
2
3 4
PIN 1
K
–P–
M
S
0.25 (0.010)
T
Q
–T–
–T–
S
F
J
6.10
G
C
U
V
W
0.910 BSC
23.11 BSC
D 4 PL
0.248
0.310
0.278
0.330
6.30
7.87
7.06
8.38
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344C–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
–A–
2. CONTROLLING DIMENSION: INCH.
U
L
SEATING
PLANE
INCHES
MILLIMETERS
–T–
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
PORT #2
VACUUM
(P2)
1.145
0.685
0.305
0.016
0.048
H
R
POSITIVE
PRESSURE
(P1)
N
–Q–
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.158
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
1
2
3
4
K
PIN 1
S
U
0.910 BSC
23.11 BSC
C
F
–P–
G
STYLE 1:
J
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
M
S
0.25 (0.010)
T Q
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
CASE 344D–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
PORT #1
POSITIVE
PRESSURE
(P1)
C
A
BACK SIDE
VACUUM
(P2)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
19.81
0.41
MAX
18.28
6.48
20.82
0.51
0.690
0.245
0.780
0.016
0.048
–B–
V
3
2
4
1
1.22
1.63
PIN 1
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
V
J
N
G
STYLE 1:
F
R
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
SEATING
PLANE
M
M
–T–
0.13 (0.005)
T B
CASE 344E–01
ISSUE B
NOTES:
–T–
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
C
A
U
–Q–
E
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
N
S
B
R
4.57
1.63
V
0.100 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
M
M
0.25 (0.010)
T Q
4
3
2
1
K
U
V
F
J
G
STYLE 1:
D 4 PL
0.13 (0.005)
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
M
S
S
T
P
Q
CASE 344F–01
ISSUE B
Motorola Sensor Device Data
7
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the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
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