MPX2050GS [MOTOROLA]

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MPX2050GS
型号: MPX2050GS
厂家: MOTOROLA    MOTOROLA
描述:

暂无描述

传感器 压力传感器 温度补偿
文件: 总8页 (文件大小:128K)
中文:  中文翻译
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M OT O RO LA  
SEMICONDUCTOR TECHNICAL DATA  
Order this document  
by MPX2050/D  
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The MPX2050 series device is a silicon piezoresistive pressure sensors providing a  
highly accurate and linear voltage output — directly proportional to the applied pressure.  
The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film  
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset  
calibration and temperature compensation.  
0 to 50 kPa (0 to 7.25 psi)  
40 mV FULL SCALE SPAN  
(TYPICAL)  
Features  
Temperature Compensated Over 0°C to +85°C  
Unique Silicon Shear Stress Strain Gauge  
Easy to Use Chip Carrier Package Options  
Ratiometric to Supply Voltage  
Differential and Gauge Options  
MPX2050D  
CASE 344  
±0.25% Linearity (MPX2050)  
Application Examples  
Pump/Motor Controllers  
Robotics  
Level Indicators  
Medical Diagnostics  
Pressure Switching  
Non–Invasive Blood Pressure Measurement  
MPX2050GP  
CASE 344B  
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure  
sensor chip.  
V
S
3
T HI N FI L M  
T EM P ER ATU R E  
CO M PE N SATI O N  
A ND  
2
4
V
o
u
u
t
t
+
-
SE NSI NG  
EL E ME NT  
V
o
CAL IB R ATI O N  
CI RCU I TRY  
MPX2050DP  
CASE 344C  
1
G
N
D
Figure 1. Temperature Compensated Pressure Sensor Schematic  
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE  
The differential voltage output of the sensor is directly proportional to the differential  
pressure applied.  
The output voltage of the differential or gauge sensor increases with increasing  
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,  
output voltage increases as increasing vacuum is applied to the vacuum side (P2)  
relative to the pressure side (P1).  
MPX2050GSX  
CASE 344F  
PIN NUMBER  
1
2
Gnd  
+V  
3
4
V
S
–V  
out  
out  
NOTE: Pin 1 is noted by the notch in  
the lead.  
REV 8  
Motorola, Inc. 2002  
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MAXIMUM RATINGS(NOTE)  
Rating  
Symbol  
Value  
200  
Unit  
kPa  
°C  
Maximum Pressure (P1 > P2)  
Storage Temperature  
P
max  
T
stg  
–40 to +125  
–40 to +125  
Operating Temperature  
T
A
°C  
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.  
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)  
S
A
Characteristic  
Symbol  
Min  
0
Typ  
Max  
50  
Unit  
kPa  
Vdc  
mAdc  
mV  
(1)  
Pressure Range  
P
OP  
(2)  
Supply Voltage  
Supply Current  
Full Scale Span  
V
S
10  
16  
I
o
6.0  
40  
(3)  
MPX2050  
MPX2050  
V
FSS  
38.5  
–1.0  
41.5  
1.0  
(4)  
Offset  
V
off  
mV  
Sensitivity  
V/P  
0.8  
mV/kPa  
(5)  
Linearity  
MPX2050  
–0.25  
0.25  
%V  
%V  
%V  
%V  
FSS  
FSS  
FSS  
FSS  
(5)  
Pressure Hysteresis (0 to 50 kPa)  
±0.1  
±0.5  
(5)  
Temperature Hysteresis (–40°C to +125°C)  
(5)  
Temperature Effect on Full Scale Span  
TCV  
–1.0  
–1.0  
1000  
1400  
1.0  
1.0  
2500  
3000  
FSS  
(5)  
Temperature Effect on Offset  
TCV  
mV  
off  
Input Impedance  
Z
in  
Output Impedance  
Z
out  
(6)  
Response Time (10% to 90%)  
t
R
1.0  
20  
ms  
ms  
Warm–Up  
(7)  
Offset Stability  
±0.5  
%V  
FSS  
NOTES:  
1. 1.0 kPa (kiloPascal) equals 0.145 psi.  
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional  
error due to device self–heating.  
3. Full Scale Span (V  
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the  
FSS  
minimum rated pressure.  
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.  
off  
5. Accuracy (error budget) consists of the following:  
Linearity:  
Output deviation from a straight line relationship with pressure, using end point method, over the specified  
pressure range.  
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is  
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure  
applied.  
Pressure Hysteresis:  
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the  
minimum or maximum rated pressure, at 25°C.  
TcSpan:  
TcOffset:  
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.  
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative  
to 25°C.  
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to  
a specified step change in pressure.  
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.  
2
Motorola Sensor Device Data  
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LINEARITY  
Linearity refers to how well a transducer’s output follows  
the equation: Vout = Voff + sensitivity x P over the operating  
pressure range. There are two basic methods for calculating  
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)  
a least squares best line fit. While a least squares fit gives  
the “best case” linearity error (lower numerical value), the  
calculations required are burdensome.  
L EA S T S Q UA RE S FI T  
E X AG G E RATE D  
P E RFO RMA NC E  
CURV E  
STR AI G HT L IN E  
D EVI ATIO N  
L EA S T  
S Q UA RE  
DE V I ATI O N  
Conversely, an end point fit will give the “worst case” error  
(often more desirable in error budget calculations) and the  
calculations are more straightforward for the user. Motorola’s  
specified pressure sensor linearities are based on the end  
point straight line method measured at the midrange pres-  
sure.  
E ND P O IN T  
S TRA I G HT L I NE FI T  
O FFS E T  
5 0  
P RE SS UR E (% FUL L SC AL E )  
1 0 0  
0
Figure 2. Linearity Specification Comparison  
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION  
Figure 3 shows the minimum, maximum and typical output  
characteristics of the MPX2050 series at 25°C. The output is  
directly proportional to the differential pressure and is essen-  
tially a straight line.  
The effects of temperature on Full–Scale Span and Offset  
are very small and are shown under Operating Characteris-  
tics.  
V
T
=
1
0
V
d
c
S
4 0  
=
°
C
2
5
A
3 5  
3 0  
2 5  
2 0  
1 5  
1 0  
MPX 20 5 0  
S TA I NL ES S STE EL  
TY P  
P
1
>
P
2
S PA N  
RA NG E  
(T YP )  
ME TA L C O VER  
S I LI CO NE  
M
A
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D
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E
C
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A
T
D
I
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EP O XY  
C ASE  
P
1
W IR E B O ND  
L EA D FRA ME  
M
I
N
5
0
O FFS E T  
(T YP )  
-
ā
RTV D IE  
BO N D  
0
12 .5  
1. 8  
25  
3. 6  
37 .5  
5. 4  
5
0
kPa  
PSI  
7
.
2
5
P
2
Figure 3. Output versus Pressure Differential  
Figure 4. Cross–Sectional Diagram (not to scale)  
Figure 4 illustrates the differential or gauge configuration  
in the basic chip carrier (Case 344). A silicone gel isolates  
the die surface and wire bonds from the environment, while  
allowing the pressure signal to be transmitted to the silicon  
diaphragm.  
teristics and internal reliability and qualification tests are  
based on use of dry air as the pressure media. Media other  
than dry air may have adverse effects on sensor perfor-  
mance and long term reliability. Contact the factory for in-  
formation regarding media compatibility in your application.  
The MPX2050 series pressure sensor operating charac-  
Motorola Sensor Device Data  
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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE  
Motorola designates the two sides of the pressure sensor  
as the Pressure (P1) side and the Vacuum (P2) side. The  
Pressure (P1) side is the side containing the silicone gel  
which isolates the die. The Motorola MPX pressure sensor is  
designed to operate with positive differential pressure  
applied, P1 > P2.  
The Pressure (P1) side may be identified by using the  
table below:  
Part Number  
MPX2050D  
Case Type  
Pressure (P1) Side Identifier  
Stainless Steel Cap  
344  
MPX2050DP  
344C  
344B  
344F  
Side with Part Marking  
Side with Port Attached  
Side with Port Attached  
MPX2050GP  
MPX2050GSX  
ORDERING INFORMATION  
MPX2050 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic  
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure  
connections.  
MPX Series  
Order Number  
MPX2050D  
Device Marking  
MPX2050D  
Device Type  
Basic Element  
Ported Elements  
Options  
Case Type  
344  
Differential  
Differential, Dual Port  
Gauge  
344C  
MPX2050DP  
MPX2050GP  
MPX2050GSX  
MPX2050DP  
MPX2050GP  
MPX2050D  
344B  
Gauge Axial PC Mount  
344F  
4
Motorola Sensor Device Data  
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PACKAGE DIMENSIONS  
N O TE S :  
C
1. D I MEN S I ON I N G A ND TO LE R AN C IN G PE R AS ME  
Y 14. 5M, 199 4.  
2. C O N TR O LL IN G D I MEN S I ON : I N C H .  
R
3. D I MEN S I ON -A - I S I N CL U SI V E O F TH E  
M O LD  
S TO P R I NG . MO LD S TO P RI N G N O T TO EX C EED  
16. 00 (0 .63 0).  
M
Z
1
4
2
3
INCHES  
DIM MIN MAX  
MILLIMETERS  
B
–A–  
MIN  
15. 11  
13. 06  
5. 08  
MAX  
1 6. 00  
1 3. 56  
5 .5 9  
A
B
C
D
F
0. 595  
0. 514  
0. 200  
0. 016  
0. 048  
0. 630  
0. 534  
0. 220  
0. 020  
0. 064  
N
L
1
2
3
4
PIN 1  
0. 41  
1. 22  
0 .5 1  
1 .6 3  
–T–  
SEATING  
PLANE  
G
J
0. 100 ꢀB SC  
2. 54ꢀ B SC  
F
0. 014  
0. 695  
0. 016  
0. 725  
30ꢀ ꢀ ꢀꢀ N O M30 ꢀꢀ ꢀ ꢀN O M  
0. 36  
17. 65  
0 .4 0  
1 8. 42  
G
J
L
F
Y
M
N
R
Y
Z
_
_
D 4 PL  
0. 475  
0. 495  
0. 450  
0. 052  
0. 118  
12. 07  
10. 92  
1 2. 57  
11 .4 3  
1 .3 2  
0. 430  
0. 048  
0. 106  
DAMBAR TRIM ZONE:  
THIS IS INCLUDED  
WITHIN DIM. “F” 8 PL  
M
M
T A  
0
.
1
3
6
(
0
.
0
0
5
)
1. 22  
2. 68  
3
.
0
0
S
T
Y
L
E
1
:
S TY LE 2:  
P IN 1. V  
S TY LE 3:  
PIN 1. G R O UN D  
2. + O U TPU T  
3. + SU PPLY  
4. - O U TPU T  
P IN 1. G N D  
2. -V O U T  
3. V S  
C C  
2. - S U PP LY  
3. + S UP P LY  
4. G R O U N D  
4. +V O U T  
CASE 344–15  
ISSUE Z  
N O TE S :  
–A–  
SEATING  
PLANE  
1. D I MEN S I ON I N G A ND TO LE R AN C IN G PE R AN S I  
Y 14. 5, 198 2.  
2. C O N TR O LL IN G D I MEN S I ON : I N C H .  
–T–  
U
L
R
INCHES  
DIM MIN MAX  
MILLIMETERS  
H
MIN  
29. 08  
17. 40  
7. 75  
MAX  
2 9. 85  
1 8. 16  
8 .2 6  
A
B
C
D
F
1. 145  
0. 685  
0. 305  
0. 016  
0. 048  
1. 175  
0. 715  
0. 325  
0. 020  
0. 064  
N
B
PORT #1  
POSITIVE  
PRESSURE  
(P1)  
–Q–  
0. 41  
1. 22  
0 .5 1  
1 .6 3  
G
H
J
0. 100 ꢀB SC  
2
.
5
4
B
S
C
0. 182  
0. 014  
0. 695  
0. 290  
0. 420  
0. 153  
0. 153  
0. 230  
0. 220  
0. 194  
0. 016  
0. 725  
0. 300  
0. 440  
0. 159  
0. 159  
0. 250  
0. 240  
4. 62  
0. 36  
17. 65  
7. 37  
10. 67  
3. 89  
3. 89  
5. 84  
5. 59  
4 .9 3  
0 .4 1  
1 8. 42  
7 .6 2  
11 .1 8  
4 .0 4  
4 .0 4  
6 .3 5  
6 .1 0  
K
L
1
2
3 4  
PIN 1  
N
P
Q
R
S
U
K
–P–  
S
M
S
0
.
2
5
(
0
.
0
1
0
)
T
Q
J
F
0
.
9
1
0
B
S
C
2
3
.
1
1
B
S
C
G
C
D 4 PL  
M
S
S
Q
0
.
1
3
(
0
.
0
0
5
)
T S  
S TY LE 1:  
P IN 1. G R O U N D  
2. + O U TP U T  
3. + S UP P LY  
4. - O U TP U T  
CASE 344B–01  
ISSUE B  
Motorola Sensor Device Data  
5
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PACKAGE DIMENSIONS — CONTINUED  
N O TE S :  
1. D I MEN S I ON I N G A ND TO LE R AN C I N G PE R AN S I  
Y 14. 5M, 198 2.  
–A–  
U
V
PORT #1  
2
.
C
O
N
T
R
O
L
L
I
N
G
D
I
M
E
N
S
I
O
N
:
I
N
C
H
.
W
L
R
H
INCHES  
DIM MIN MAX  
MILLIMETERS  
PORT #2  
MIN  
29. 08  
17. 40  
10. 29  
0. 41  
MAX  
29. 85  
18. 16  
11. 05  
0. 51  
PORT #1  
POSITIVE PRESSURE  
(P1)  
PORT #2  
VACUUM  
(P2)  
A
B
C
D
F
1. 145  
0. 685  
0. 405  
0. 016  
0. 048  
1. 175  
0. 715  
0. 435  
0. 020  
0. 064  
N
–Q–  
1. 22  
1
.
6
3
G
H
J
0
.
1
0
0
B
S
C
2. 54ꢀ B SC  
SEATING  
PLANE  
SEATING  
PLANE  
B
0. 182  
0. 014  
0. 695  
0. 290  
0. 420  
0. 153  
0. 153  
0. 063  
0. 220  
0. 194  
0. 016  
0. 725  
0. 300  
0. 440  
0. 159  
0. 159  
0. 083  
0. 240  
4. 62  
0. 36  
17. 65  
7. 37  
10. 67  
3. 89  
3. 89  
1. 60  
5. 59  
4. 93  
0. 41  
18. 42  
7. 62  
11. 18  
4. 04  
4. 04  
2. 11  
1
2 3 4  
K
L
PIN 1  
K
–P–  
N
P
Q
R
S
U
V
W
M
S
0
.
2
5
(
0
.
0
1
0
)
T
Q
–T–  
J
–T–  
S
F
6
.
1
0
G
C
0
.
9
1
0
B
S
C
2
3
.
1
1
B
S
C
D 4 PL  
0. 248  
0. 310  
0. 278  
0. 330  
6. 30  
7. 87  
7. 06  
8. 38  
M
S
S
0
.
1
3
(
0
.
0
0
5
)
T
S
Q
S
T
Y
L
E
1
:
P IN 1. G R O U N D  
2. + O U TP U T  
3. + S U PP LY  
4. - O U TP U T  
CASE 344C–01  
ISSUE B  
N
O
T
E
S
:
–T–  
1. D I MEN S I ON I N G A ND TO LE R AN C IN G PE R  
A N SI Y 14. 5M, 198 2.  
2. C O N TR O LL IN G D I MEN S I ON : I N C H .  
C
A
U
–Q–  
E
INCHES  
DIM MIN MAX  
MILLIMETERS  
MIN  
27. 43  
18. 80  
16. 00  
0. 41  
MAX  
2 8. 45  
1 9. 30  
1 6. 51  
0 .5 1  
A
B
C
D
E
F
1. 080  
0. 740  
0. 630  
0. 016  
0. 160  
0. 048  
1. 120  
0. 760  
0. 650  
0. 020  
0. 180  
0. 064  
N
B
4. 06  
1. 22  
4 .5 7  
1 .6 3  
V
G
J
0
.
1
0
0
B
S
C
2
.
5
4
B
S
C
R
0. 014  
0. 220  
0. 070  
0. 150  
0. 150  
0. 440  
0. 695  
0. 840  
0. 182  
0. 016  
0. 240  
0. 080  
0. 160  
0. 160  
0. 460  
0. 725  
0. 860  
0. 194  
0. 36  
5. 59  
0 .4 1  
6 .1 0  
K
N
P
Q
R
S
U
V
PORT #1  
PIN 1  
1. 78  
3. 81  
2 .0 3  
4 .0 6  
POSITIVE  
PRESSURE  
(P1)  
–P–  
M
M
0
.
2
5
(
0
.
0
1
0
)
T
Q
4
3
2
1
3
.
8
1
4
.
0
6
S
11. 18  
17. 65  
21. 34  
4. 62  
11 .6 8  
18 .4 2  
21 .8 4  
4 .9 2  
K
F
J
G
S TY LE 1:  
P IN 1. G R O U N D  
D 4 PL  
0. 13 ꢀ( 0. 0 05 )  
2. V (+ ) O U T  
3. V S U PP LY  
4. V (- ) O U T  
M
S
S
Q
T
P
CASE 344F–01  
ISSUE B  
6
Motorola Sensor Device Data  
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NOTES  
Motorola Sensor Device Data  
7
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S E RIE S  
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding  
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,  
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different  
applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by  
customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed,  
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life,  
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MPX2050/D  

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