MPX53 [MOTOROLA]
50 KPA UNCOMPENSATED SILICON PRESSURE SENSORS; 50军未补偿硅压力传感器
| 型号： | MPX53 |
| 厂家： | 
MOTOROLA |
| 描述： | 50 KPA UNCOMPENSATED SILICON PRESSURE SENSORS |
| 文件： | 总8页 (文件大小：151K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
M OT O RO LA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX53/D
5
S
0
k
P
a
U
n
s
c
s
o
u
m
p
e
n
s
a
t
e
e ns o r s
d
M P X5 3
M P XV5 3G C
S E RI ES
i
l
i
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P
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S
The MPX53/MPXV53GC series silicon piezoresistive pressure sensors provide a very
accurate and linear voltage output — directly proportional to the applied pressure. These
standard, low cost, uncompensated sensors permit manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
0 to 50 kPa (0–7.25 psi)
60 mV FULL SCALE SPAN
(TYPICAL)
Features
•
•
•
•
•
•
Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
60 mV Span (Typ)
UNIBODY PACKAGE
SMALL OUTLINE
PACKAGE
Differential and Gauge Options
Application Examples
•
•
•
•
•
•
•
•
Air Movement Control
Environmental Control Systems
Level Indicators
MPX53D
CASE 344
MPXV53GC6U
CASE 482A
Leak Detection
Medical Instrumentation
Industrial Controls
Pneumatic Control Systems
Robotics
Figure 1 shows a schematic of the internal circuitry
on the stand–alone pressure sensor chip.
MPXV53GC7U
CASE 482C
+
V
S
MPX53GP
CASE 344B
NOTE: Pin 1 is the notched pin.
+
-
V
ut
o
PIN NUMBER
S
e
n
s
o
r
1
2
3
4
Gnd
5
6
7
8
N/C
N/C
N/C
N/C
+V
V
out
V
o ut
S
G
N
D
–V
out
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
MPX53DP
CASE 344C
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
NOTE: Pin 1 is the notched pin.
PIN NUMBER
1
2
Gnd
+V
3
4
V
S
–V
out
out
Replaces MPX50/D
REV 2
Motorola, Inc. 2002
MP X5 3 M P XV5 3 GC S E RIE S
MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
200
Unit
kPa
°C
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
P
max
T
stg
–40 to +125
–40 to +125
T
A
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (V = 3.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristic
Symbol
Min
0
Typ
—
Max
50
Unit
kPa
Vdc
mAdc
mV
(1)
Pressure Range
P
OP
(2)
Supply Voltage
Supply Current
Full Scale Span
V
S
—
3.0
6.0
60
6.0
—
I
o
—
(3)
V
FSS
45
90
(4)
Offset
V
off
0
20
35
mV
Sensitivity
∆V/∆P
—
—
1.2
—
—
mV/kPa
(5)
Linearity
–0.6
—
0.4
—
%V
%V
%V
FSS
FSS
FSS
(5)
Pressure Hysteresis (0 to 50 kPa)
—
± 0.1
± 0.5
—
(5)
Temperature Hysteresis (– 40°C to +125°C)
—
—
—
(5)
Temperature Coefficient of Full Scale Span
TCV
–0.22
—
–0.16
—
%V
/°C
FSS
FSS
(5)
Temperature Coefficient of Offset
TCV
± 15
—
µV/°C
off
(5)
Temperature Coefficient of Resistance
TCR
0.31
355
750
—
0.37
505
1875
—
%Z /°C
in
Input Impedance
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
t
R
1.0
20
ms
ms
Warm–Up
—
—
—
—
(7)
Offset Stability
—
± 0.5
—
%V
FSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
•
TCR:
Z deviation with minimum rated pressure applied, over the temperature range of –ā 40°C to +125°C,
in
relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
M
P
X
5
3
M
P
X
V
5
3
G
C
S
E
R
I
E
S
TEMPERATURE COMPENSATION
Figure 2 shows the typical output characteristics of the
MPX53/MPXV53GC series over temperature.
or by designing your system using the MPX2053 series
sensors.
Several approaches to external temperature compensa-
tion over both –40 to +125°C and 0 to +80°C ranges are
presented in Motorola Applications Note AN840.
The piezoresistive pressure sensor element is a semicon-
ductor device which gives an electrical output signal propor-
tional to the pressure applied to the device. This device uses
a unique transverse voltage diffused semiconductor strain
gauge which is sensitive to stresses produced in a thin sili-
con diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differ-
ences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range (see Figure 3). There are two basic methods
for calculating nonlinearity: (1) end point straight line fit or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motoro-
la’s specified pressure sensor linearities are based on the
end point straight line method measured at the midrange
pressure.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components,
7
6
5
4
0
0
0
0
1
0
9
8
7
6
5
4
3
2
1
0
0
0
0
0
0
0
L
I
N
E
A
R
I
T
Y
-
ā
0
°
C
MP X5 3
+ ā2 5 °C
V
=
3
V dc
S
A CTUA L
P
1
>
P
2
S PA N
+
ā
2
5
°
C
S
P
A
N
RA NG E
(T YP )
(
V
)
S S
F
3
2
0
0
THE O RE TI CA L
0
0
0
0
O FFS E T
1
0
O
F
F
S
E
T
(T YP )
(
V
)
O F F
0
0
0
1
2
3
4
5
6
7
8
PSI
0
MA X
P
O P
1
0
2
0
3
0
4
0
5
0
k
P
a
P
R
E
S
S
U
R
E
D
I
F
F
ER
EN
T
I
A
L
P
R
E
S
S
U
R
E
(kPA )
Figure 2. Output versus Pressure Differential
Figure 3. Linearity Specification Comparison
S ILI CO N E
S
T
A
I
N
L
E
S
S
S TE EL
DI E
D
I
E
CO AT
M
E
T
A
L
C
O
V
E
R
P
1
E
P
O
X
Y
W
I
R
E
B
O
N
D
CA S E
R
T
V
D
I
E
L
E
A
D
FR AM E
B
O
N
D
P
2
Figure 4. Cross–Sectional Diagram (not to scale)
Figure 4 illustrates the differential or gauge configuration
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
in the unibody chip carrier (Case 344). A silicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX53/MPXV53GC series pressure sensor operating
Motorola Sensor Device Data
3
MP X5 3 M P XV5 3 GC S E RIE S
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing silicone gel which
isolates the die from the environment. The Motorola pres-
sure sensor is designed to operate with positive differential
pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Part Number
Case Type
344
Pressure (P1) Side Identifier
Stainless Steel Cap
MPX53D
MPX53DP
MPX53GP
344C
Side with Port Marking
344B
Side with Port Attached
MPXV53GC series
482A, 482C
Sides with Port Attached
ORDERING INFORMATION – UNIBODY PACKAGE
MPX53 series pressure sensors are available in differential and gauge configurations. Devices are available with basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
Order Number
MPX53D
Device Marking
MPX53D
Device Type
Basic Element
Ported Elements
Options
Case Type
Case 344
Differential
Differential
Gauge
Case 344C
Case 344B
MPX53DP
MPX53GP
MPX53DP
MPX53GP
ORDERING INFORMATION — SMALL OUTLINE PACKAGE
The MPXV53GC series pressure sensors are available with a pressure port, surface mount or DIP leadforms, and two packing
options.
Device Order No.
Case No.
482A
Packing Options
Tape & Rail
Rails
Marking
MPXV53G
MPXV53GC6T1
MPXV53GC6U
MPXV53GC7U
482A
MPXV53G
MPXV53G
482C
Rails
4
Motorola Sensor Device Data
M P X5 3 M P XV5 3 G C SE R I ES
PACKAGE DIMENSIONS
N O TE S :
C
1. D I MEN S IO N I N G A ND TO LE R AN C IN G PE R AS ME
Y 14. 5M, 199 4.
2. C O N TR O LL IN G D I MEN S I ON : I N C H .
R
3. D I MEN S IO N -A - I S I N CL U SI VE O F TH E
M
O
L
D
S TO P R I NG . MO LD S TO P R IN G N O T TO EX C EED
16. 00 (0 .63 0).
M
Z
1
4
2
3
INCHES
DIM MIN MAX
MILLIMETERS
B
–A–
MIN
15. 11
13. 06
5. 08
MAX
1 6. 00
1 3. 56
5 .5 9
A
B
C
D
F
0. 595
0. 514
0. 200
0. 016
0. 048
0. 630
0. 534
0. 220
0. 020
0. 064
N
L
1
2
3
4
PIN 1
0. 41
1. 22
0 .5 1
1 .6 3
–T–
SEATING
PLANE
G
J
0. 100 ꢀB SC
2. 54ꢀ B SC
F
0. 014
0. 695
0. 016
0. 725
0. 36
17. 65
0 .4 0
1 8. 42
G
J
L
F
Y
M
N
R
Y
Z
3
0
ꢀ
ꢀ
ꢀ
ꢀ
N
O
M
30ꢀ ꢀ ꢀꢀ N O M
_
_
D 4 PL
0. 475
0. 495
0. 450
0. 052
0. 118
12. 07
1 2. 57
11 .4 3
1 .3 2
0. 430
0. 048
0. 106
10. 92
1. 22
2. 68
DAMBAR TRIM ZONE:
THIS IS INCLUDED
WITHIN DIM. “F” 8 PL
M
M
T A
0
.
1
3
6
ꢀ
(
0
.
0
0
5
)
3 .0 0
STY LE 1:
S TY LE 2:
P IN 1. V
S
T
Y
L
E
3
:
PIN 1. G R OU N D
2. + O U TPU T
3. + SU PPLY
4. - O U TPU T
P IN 1. G N D
2. -V O U T
3. V S
C C
2. - S U PP LY
3. + S UP P LY
4. G R O U N D
4
.
+
V
O
U
T
CASE 344–15
ISSUE Z
N O TE S :
–A–
SEATING
PLANE
1. D I MEN S I ON I N G A ND TO LE R AN C IN G PE R AN S I
Y 14. 5, 198 2.
2. C O N TR O LL IN G D I MEN S I ON : I N C H .
–T–
U
L
R
INCHES
DIM MIN MAX
MILLIMETERS
H
MIN
29. 08
17. 40
7. 75
MAX
2 9. 85
1 8. 16
8 .2 6
A
B
C
D
F
1. 145
0. 685
0. 305
0. 016
0. 048
1. 175
0. 715
0. 325
0. 020
0. 064
N
B
PORT #1
POSITIVE
PRESSURE
(P1)
–Q–
0. 41
1. 22
0 .5 1
1 .6 3
G
H
J
0. 100 ꢀB SC
2. 54ꢀ B SC
0. 182
0. 014
0. 695
0. 290
0. 420
0. 153
0. 153
0. 230
0. 220
0. 194
0. 016
0. 725
0. 300
0. 440
0. 159
0. 159
0. 250
0. 240
4. 62
0. 36
17. 65
7. 37
10. 67
3. 89
3. 89
5. 84
5. 59
4 .9 3
0 .4 1
1 8. 42
7 .6 2
11 .1 8
4 .0 4
4 .0 4
6 .3 5
6 .1 0
K
L
1
2
3
4
PIN 1
N
P
Q
R
S
U
K
–P–
S
M
S
0
.
2
5
ꢀ(
0
.0
1
0
)
T
Q
J
F
0
.
9
1
0
ꢀ
B
S
C
23. 11ꢀ B SC
G
C
D 4 PL
M
S
S
Q
0
.1
3
ꢀ
(
0
.
00
5
)
T
S
S TY LE 1:
P IN 1. G R O U N D
2. + O U TP U T
3. + S UP P LY
4. - O U TP U T
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
5
MP X5 3 M P XV5 3 GC S E RIE S
PACKAGE DIMENSIONS — CONTINUED
N O TE S :
1. D I MEN S I ON I N G A ND TO LE R AN C I N G PE R AN S I
Y 14. 5M, 198 2.
–A–
U
V
PORT #1
2. C O N TR O LL IN G D I MEN S I ON : I N CH .
W
L
R
H
INCHES
DIM MIN MAX
MILLIMETERS
PORT #2
MIN
29. 08
17. 40
10. 29
0. 41
MAX
29. 85
18. 16
11. 05
0. 51
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
A
B
C
D
F
1. 145
0. 685
0. 405
0. 016
0. 048
1. 175
0. 715
0. 435
0. 020
0. 064
N
–Q–
1
.
2
2
1. 63
G
H
J
0
.
1
0
0
ꢀ
B
S
C
2. 54ꢀ B SC
SEATING
PLANE
SEATING
PLANE
B
0. 182
0. 014
0. 695
0. 290
0. 420
0. 153
0. 153
0. 063
0. 220
0. 194
0. 016
0. 725
0. 300
0. 440
0. 159
0. 159
0. 083
0. 240
4. 62
0. 36
17. 65
7. 37
10. 67
3. 89
3. 89
1. 60
5. 59
4. 93
0. 41
18. 42
7. 62
11. 18
4. 04
4. 04
2. 11
1
2 3 4
K
L
PIN 1
K
–P–
N
P
Q
R
S
U
V
W
M
S
0
.
2
5
ꢀ
(
0
.
0
1
0
)
T
Q
–T–
–T–
S
F
J
6. 10
G
C
0. 910 ꢀB SC
23. 11ꢀ BS C
D 4 PL
0. 248
0. 310
0. 278
0. 330
6. 30
7. 87
7. 06
8. 38
M
S
S
0
.
1
3
ꢀ
(
0
.0
0
5
)
T
S
Q
S
T
Y
L
E
1
:
P IN 1. G R O U N D
2. + O U TP U T
3. + S U PP LY
4. - O U TP U T
CASE 344C–01
ISSUE B
6
Motorola Sensor Device Data
M P X5 3 M P XV5 3 G C SE R I ES
SMALL OUTLINE PACKAGE DIMENSIONS
–A–
D 8 PL
N O TE S :
1. D I MEN S IO N I N G A ND TO LE R AN C I NG PE R AN S I
Y 14. 5M, 198 2.
2. C O N TR O LL IN G D I MEN S I ON : I N CH .
4
M
S
S
A
0
.
25
ꢀ
(
0
.
0
1
0
)
T
B
5
8
3. D I MEN S IO N
P R OT R U SI O N .
A
A N D
B
D
O
N
O
T
I
N
C
L
U
D
E
M
O
L
D
N
–B–
4. MA XI MU M MO LD P RO T R U SI O N 0 .1 5 (0 .0 06 ).
5. A LL V ERT IC A L S U RFA C E_S T5YP IC AL D R AF T.
G
INCHES
MILLIMETERS
1
DIM MIN MAX
MIN
10. 54
10. 54
12. 70
0. 96
MAX
10 .7 9
10 .7 9
13 .2 1
1 .0 7
A
B
C
D
G
H
J
0. 415
0. 415
0. 500
0. 038
0. 425
0. 425
0. 520
0. 042
S
W
0
.
1
0
0
ꢀ
B
S
C
2
.
5
4
ꢀ
B
S
C
0. 002
0. 009
0. 061
0ꢀ ꢀ
0. 010
0. 011
0. 071
7ꢀ ꢀ
0. 05
0. 23
1. 55
0ꢀ ꢀ
0 .2 5
0 .2 8
1 .8 0
7 ꢀꢀ
K
M
N
S
V
_
_
_
_
0. 444
0. 709
0. 245
0. 115
0. 448
0. 725
0. 255
0. 125
11. 28
18. 01
6. 22
11 .3 8
1 8. 41
6 .4 8
C
V
W
2. 92
3
.
1
7
H
J
–T–
SEATING
PLANE
PIN 1 IDENTIFIER
M
K
CASE 482A–01
ISSUE A
N O TE S :
1. D I MEN S IO N I N G A ND TO LE R AN C IN G PE R AN S I
Y 14. 5M, 198 2.
2. C O N TR O LL IN G D I MEN S I ON : I N C H .
–A–
4
3. D I MEN S IO N
P R OT R U SI O N .
A
A N D
B
D O N O T IN C L U D E M O LD
5
8
4. MA XI MU M MO LD P RO T R U SI O N 0 .1 5 (0 .0 06 ).
5. A LL V ERT IC A L S U RFA C E_S T5YP IC AL D R AF T.
F O RM ED PA RA LL EL.
N
–B–
6. D I MEN S IO N
S
T
O
C
E
N
T
E
R
O
F
L
E
A
D
W
H
E
N
D 8 PL
G
M
S
S
A
INCHES
MILLIMETERS
0
.
2
5
ꢀ
(
0
.
01
0
)
T
B
1
DIM MIN
MAX
0. 425
0. 425
0. 520
0. 034
MIN
10. 54
10. 54
12. 70
0. 66
MAX
1 0. 79
1 0. 79
1 3. 21
0 .8 64
A
B
C
D
G
J
0. 415
0. 415
0. 500
0. 026
DETAIL X
S
W
0
.
1
0
0
ꢀ
B
S
C
2. 54ꢀ B SC
0. 009
0. 100
0ꢀ ꢀ
0. 011
0. 120
15ꢀ ꢀ
0. 23
2. 54
0ꢀ ꢀ
0 .2 8
3 .0 5
1 5ꢀ ꢀ
K
M
N
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SEATING
PLANE
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J
DETAIL X
CASE 482C–03
ISSUE B
Motorola Sensor Device Data
7
MP X5 3 M P XV5 3 GC S E RIE S
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola
and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees
arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
MOTOROLA and the
logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective owners.
E Motorola, Inc. 2001.
How to reach us:
USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1–303–675–2140 or 1–800–441–2447
JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3–20–1, Minami–Azabu. Minato–ku, Tokyo 106–8573 Japan. 81–3–3440–3569
ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852–26668334
Technical Information Center: 1–800–521–6274
HOME PAGE: http://www.motorola.com/semiconductors/
◊
MPX53/D
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