MPX5700AS [MOTOROLA]
Peizoresistive Sensor, Absolute, 2.17Psi Min, 101.52Psi Max, 2.5%, 0.20-4.70V, Through Hole Mount, PLASTIC, UNIBODY PACKAGE-6;
| 型号： | MPX5700AS |
| 厂家： | 
MOTOROLA |
| 描述： | Peizoresistive Sensor, Absolute, 2.17Psi Min, 101.52Psi Max, 2.5%, 0.20-4.70V, Through Hole Mount, PLASTIC, UNIBODY PACKAGE-6 传感器 换能器 |
| 文件： | 总7页 (文件大小：119K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
M OT O RO LA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX5700/D
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The MPX5700 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
INTEGRATED PRESSURE
SENSOR
0 to 700 kPa (0 to 101.5 psi)
15 to 700 kPa
(2.18 to 101.5 psi)
0.2 to 4.7 V OUTPUT
Features
•
•
•
•
•
2.5% Maximum Error over 0° to 85°C
Ideally Suited for Microprocessor or Microcontroller–Based Systems
Available in Absolute, Differential and Gauge Configurations
Patented Silicon Shear Stress Strain Gauge
Durable Epoxy Unibody Element
MPX5700D
CASE 867
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1
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4
,
5
A
N
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6
A
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N
O
C
O
N
N
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C
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MPX5700DP
CASE 867C
G
N
D
Figure 1. Fully Integrated Pressure Sensor Schematic
MPX5700AS
CASE 867E
PIN NUMBER
1
2
3
V
4
5
6
N/C
N/C
N/C
out
Gnd
V
S
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the lead.
REV 5
Motorola, Inc. 2001
M
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5
7
0
0
S
E
R
I
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MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
2800
Unit
kPa
°C
(2)
Maximum Pressure (P2 v 1 Atmosphere)
P1
max
Storage Temperature
T
stg
–40 to +125
–40 to +125
Operating Temperature
T
A
°C
NOTES:
1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the
device.
2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
OPERATING CHARACTERISTICS (V = 5.0 Vdc, T = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4
S
A
required to meet electrical specifications.)
Characteristic
Symbol
Min
Typ
Max
Unit
(1)
Pressure Range
Gauge, Differential: MPX5700D
Absolute: MPX5700A
P
OP
0
15
—
700
700
kPa
(2)
Supply Voltage
V
4.75
–
5.0
7.0
0.2
5.25
10
Vdc
mAdc
Vdc
S
Supply Current
I
o
(3)
Zero Pressure Offset
Gauge, Differential:
Absolute
(0 to 85°C)
(0 to 85°C)
V
off
0.088
0.184
0.313
0.409
(4)
Full Scale Output
(0 to 85°C)
V
4.587
—
4.7
4.5
—
4.813
—
Vdc
Vdc
FSO
(5)
Full Scale Span
(0 to 85°C)
(0 to 85°C)
V
FSS
(6)
Accuracy
—
—
± 2.5
—
%V
FSS
Sensitivity
V/P
—
6.4
1.0
0.1
20
mV/kPa
ms
(7)
Response Time
t
R
—
—
Output Source Current at Full Scale Output
I
—
—
mAdc
ms
O+
(8)
Warm–Up Time
—
—
—
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
4. Full Scale Output (V
) is defined as the output voltage at the maximum or full rated pressure.
FSO
5. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
•
•
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
•
Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V
, at 25°C.
FSS
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
MECHANICAL CHARACTERISTICS
Characteristics
Weight, Basic Element (Case 867)
Typ
Unit
4.0
grams
2
Motorola Sensor Device Data
M
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5
7
0
0
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R
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ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
Figure 3 illustrates the Differential/Gauge basic chip car-
rier (Case 867). A fluorosilicone gel isolates the die surface
and wire bonds from the environment, while allowing the
pressure signal to be transmitted to the sensor diaphragm.
(For use of the MPX5700D in a high pressure, cyclic ap-
plication, consult the factory.)
The MPX5700 series pressure sensor operating character-
istics, and internal reliability and qualification tests are based
on use of dry air as the pressure media. Media, other than dry
air, may have adverse effects on sensor performance and
long–term reliability. Contact the factory for information
regarding media compatibility in your application.
Figure 2 shows the sensor output signal relative to pres-
sure input. Typical, minimum, and maximum output curves
are shown for operation over a temperature range of 0° to
85°C using the decoupling circuit shown in Figure 4. The
output will saturate outside of the specified pressure range.
Figure 4 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D in-
put of a microprocessor or microcontroller. Proper decoup-
ling of the power supply is recommended.
5. 0
4. 5
4. 0
3. 5
3. 0
2. 5
2. 0
1. 5
1. 0
0. 5
0
T
R
A
N
S
F
E
R
FUN CTI O N:
V
=
* ( 0V
.
.
0
0
1
2
V dc
8
5
8
*P
+
0
.
0
4
) ±
E RRO R
o ut
S
V
=
5
0
S
T
E
M
P
=
0
°
C
t
o
8
5
T
Y
P
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A
L
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M
A
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0
1
0
0
2
00
3
0
0
4
00
5
0
0
6
0
0
7
0
0
8
0
0
D
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F
E
R
E
N
T
I
A
L
P
R
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S
S
U
R
E
(
k
P
a
)
Figure 2. Output versus Pressure Differential
F
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+
5
V
D
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P
1
V
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t
V
s
W
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B
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N
D
I
P
S
1
.
0
F
m
0
.
0
1
F
m
G
N
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4
7
0
p
F
R
T
V
D
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A
D
B
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D
F
R
A
M
E
P
E
2
E
P
O
X
Y
C
A
S
Figure 3. Cross–Sectional Diagram
(Not to Scale)
Figure 4. Recommended power supply decoupling
and output filtering.
For additional output filtering, please refer to
Application Note AN1646.
Motorola Sensor Device Data
3
M
P
X
5
7
0
0
S E RIE S
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluoro silicone gel
which protects the die from harsh media. The Motorola MPX
pressure sensor is designed to operate with positive differen-
tial pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the table
below:
Pressure (P1)
Side Identifier
Part Number
MPX5700D, MPX5700A
Case Type
867C
867C
867B
867E
Stainless Steel Cap
MPX5700DP
Side with Part Marking
Side with Port Attached
Side with Port Attached
MPX5700GP, MPX5700AP
MPX5700GS, MPX5700AS
ORDERING INFORMATION
Device Type
MPX Series
Order Number
MPX5700D
Device Marking
MPX5700D
Options
Case Type
867C
Differential
Absolute
Basic Element
867C
MPX5700A
MPX5700A
Differential Dual Ports
Gauge
867C
MPX5700DP
MPX5700GP
MPX5700GS
MPX5700AP
MPX5700AS
MPX5700DP
MPX5700GP
MPX5700D
Ported Elements
867B
Gauge, Axial
Absolute
867E
867B
867E
MPX5700AP
MPX5700A
Absolute, Axial
4
Motorola Sensor Device Data
M
P
X
5
7
0
0
S
E
R
I
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S
PACKAGE DIMENSIONS
C
R
N
O
T
E S :
I
1
.
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I
POSITIVE PRESSURE
(P1)
Y
1
4
2
3
.
.
C
D
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D
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:
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O LD
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( 0.6 30) .
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M
O
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D
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TO
P
R
I
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N
O
T
TO
EX C EED
B
1
6
0
0
–A–
INCHES
MILLIMETERS
MIN MAX
N
L
DIM MIN
MAX
A
B
C
D
F
0
0
0
0
0
.
.
.
.
.
5
5
2
0
0
9
1
0
2
4
5
4
0
7
8
0
0
0
0
0
.
.
.
.
.
6
5
2
0
0
3
3
2
3
6
0
4
0
3
4
1
5
.
1
1
1
1
6
3
5
0
1
.
.
.
.
.
0
5
5
8
6
0
6
9
4
3
PIN 1
SEATING
PLANE
1
2
3
4
5
6
1
3
5
0
1
.
.
.
.
0
0
6
2
6
8
8
2
–T–
G
J
S
G
J
0
.
1
0
0
ꢀ
B
S
C
2
.
5
4
ꢀ
B
S
1
1
C
F
0
0
.
.
0
6
1
9
4
0
.
0
7
1
6
5
0
.
3
6
5
0
8
.
4
0
2
D6 PL
L
5
0
.
2
1
7
.
6
.
4
M
N
R
S
3
0
ꢀ
ꢀ
ꢀN
O
M
3
0
ꢀ
ꢀ
ꢀ
N
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_
_
M M
T A
0
.
1
3
6
ꢀ
(
0.
0
0
5)
0
0
0
.
.
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4
4
0
7
3
9
5
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0
0
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4
9
5
0
5
0
5
1
2
0
2
.
0
9
2
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2
9
2
.
.
.
5
4
6
7
3
6
0
4
1
1
.
.
1
1
0
2
S
T
Y
P
L
E
1
:
S
T
Y
P
L
E
2
:
S
T
Y
P
L
E
3:
1. O PE N
G R O U N D
I
N
1
.
V
O
U
U
N
T
D
I
N
1
.
O
P
U
U
P
U
E
N
T
P
N
D
I
N
2.
3.
4.
5.
6.
G
R
O
2
3
4
5
6
.
.
.
.
.
G
-
V
+
R
O
2
3
4
5
6
.
.
.
.
.
V
V
V
V
C
1
2
C
V
O
+
+
-
V
O
U
T
S
U
L
Y
V
V
SU P PLY
O U T
V
O
T
E
X
O
P
E
N
O
P
E
N
CASE 867–08
ISSUE N
BASIC ELEMENT
N
O
T
E
S
:
A
U
L
1
2
.
.
D
D
I
I
M
M
E
N
S
S
,
I
I
O
O
N
N
199 4.
S
S
A
A
R
N
E
D
I
T
N
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M
I
L
A
L
N
I
M
E
S
T
E
R
P
S
E
.
E
N
L
E
R
C
E
R
A
S
M
E
SEATING PLANE
T
Y
1
4
.
5
M
R
MILLIMETERS
DIM MIN MAX
V
A
B
C
D
F
2
9
1
7
0
1
.
0
8
4
5
8
2
2
9. 85
8. 16
8. 26
0. 84
1. 63
Q
7
.
1
N
.
.
.
7
6
2
Q
G
J
2
.
5
4
ꢀ
B
S
C
0
7
7
0
3
3
5
5
. 3
. 6
. 3
. 6
. 8
. 8
. 8
. 5
6
5
7
7
9
9
4
9
0
8
7
.
4
4
6
1
0
0
3
1
2
2
8
4
4
5
1
B
K
L
1
1
1
.
.
.
.
.
.
1
6
N
P
Q
R
S
U
V
1
1
2
5
3
4
4
4
6
K
P
PIN 1
S
6
.
2
3
.
1
1
ꢀ
B
S
C
P
C
4
.
6
2
4
.
9
3
G
6X
D
M
M
Q
0
.
2
5
T
F
J
M
S
S
Q
S
T
Y
P
L
E
1
1
:
.
0
.
1
7
3
T
P
I
N
V
O
U
T
2
3
4
5
6
.
.
.
.
.
G
R
O
U
N
D
V
V
V
V
C
1
2
C
E
X
CASE 867B–04
ISSUE F
PRESSURE SIDE PORTED (AP, GP)
Motorola Sensor Device Data
5
M
P
X
5
7
0
0
S
E
R
I
E
S
PACKAGE DIMENSIONS–CONTINUED
N O TE S :
.
1
D
I
M
.
E
5
N
M
S
,
I
O
N
I
N
G
198 2.
A
N
D
TO
L
E
R
AN
C
I
N
G
P
E
R
AN S I
Y
1
4
P
2
.
C
O
N
T
R
O
L
L
I
N
G
D
I
M
E
N
S
I
O
N
:
I N CH .
–A–
U
M M
T Q
0
.
2
5
ꢀ(
0
.0
1
0
)
INCHES
DIM MIN MAX
MILLIMETERS
MIN MAX
X
A
B
C
D
F
1
0
0
0
0
.
.
.
.
.
1
6
4
0
0
4
8
0
2
4
5
5
5
7
8
1
0
0
0
0
.
.
.
.
.
1
7
4
0
0
7
1
3
3
6
5
5
5
3
4
2
1
1
9
7
0
0
1
.
.
.
.
.
0
4
2
6
2
8
0
9
8
2
2
1
9
8
.
.
.
.
.
8
1
0
8
6
5
6
5
4
3
L
W
R
V
1
1
PORT #1
PORT #2 VACUUM (P2)
0
1
POSITIVE
PRESSURE
(P1)
PORT #1 POSITIVE
PRESSURE (P1)
G
J
0
.
1
0
0
ꢀ
B
S
C
2
.
5
4
ꢀ
B
S
C
N
B
0.
0.
0.
0.
0.
0.
0.
0.
0
6
2
4
1
1
0
2
1
9
9
2
5
5
6
2
4
0
0
0
0
0
0
0
0
.
0
7
3
4
1
1
0
2
1
6
5
0
0
9
9
3
0
0
7
7
0
3
3
1
5
.
3
6
3
6
8
8
6
5
6
5
7
7
9
9
0
9
0
8
7
.
4
4
6
1
0
0
1
2
2
8
4
4
K
L
5
0
0
3
3
3
0
.
.
.
.
.
.
.
2
0
4
5
5
8
4
1
1
.
.
.
.
.
.
.
1
.
.
.
.
.
–Q–
PORT #2
VACUUM
(P2)
N
P
Q
R
S
U
V
W
X
11
4
4
PIN 1
2. 11
1
6
.
0
0
.
9
1
0
ꢀ
B
S
C
2
3
.
2
7
0
1
1
ꢀ
BS
C
K
1
2
3
4
5
6
0
0
0
.
.
.
1
3
2
8
1
4
2
0
0
0
.
1
3
2
9
4
0
8
4
.
.
.
6
4
.
.
.
9
3
8
6
0
8
.
.
3
7
7
6
8
3
8
3
0
C
S
7
SEATING
PLANE
SEATING
PLANE
–T–
–T–
S
T
Y
P
L
E
1:
1. V
G R O U N D
6 PL
D
G
I
N
O
U
T
J
F
M
M
A
2
3
4
5
6
.
.
.
.
.
0
.
1
3
ꢀ
(
0
.
0
0
5
)
V
V
V
V
C
1
2
C
E
X
CASE 867C–05
ISSUE F
PRESSURE AND VACUUM SIDES PORTED (DP)
N
O TE S :
.
C
A
1
D
I
M
E
N
M
S
,
I
O
N
I
N
G
198 2.
A
N
D
T
O
L
E
R
A
N
C
I
N
G
P
E
R
A
N
S
I
Y
1
4
.
5
2
.
C
O
N
T
R
O
L
L
I
N
G
D
I
M
E
N
S
I
O
N
:
I
N
C
H
.
INCHES
DIM MIN MAX
MILLIMETERS
MIN MAX
A
B
C
D
E
F
0
0
0
0
0
0
.
.
.
.
.
.
6
2
7
0
1
0
9
4
8
2
7
4
0
5
0
7
8
8
0. 720
0. 255
0. 820
0. 033
0. 186
0. 064
1
7. 53
6. 22
9. 81
0. 69
4. 52
1. 22
1
8. 28
6. 48
0. 82
0. 84
4. 72
1. 63
–B–
V
1
2
PIN 1
PORT #1
POSITIVE
PRESSURE
(P1)
6
5
4
3
2
1
G
J
0
.
1
0
0
ꢀ
B
S
C
2
.
5
4
ꢀ
B
S
C
0.
0.
0.
0.
0.
01
34
30
22
18
4
0
.
0
3
3
2
1
1
6
5
0
0
4
0
8
7
5
4
. 36
. 76
. 62
. 59
. 62
0
9
7
6
4
.
41
53
87
10
93
K
K
N
S
V
5
0
0
2
0
0
0
0
.
.
.
.
7
1
4
9
.
.
.
.
S
J
G
S
T
Y
P
L
E
1
:
F
N
E
D 6 PL
I
N
1
.
V
O
U
T
2
3
4
5
6
.
.
.
.
.
G
V
V
V
V
R
O
U
N
D
–T–
M
M
B
C
C
0
.
1
3
ꢀ
(
0
.
0
0
5
)
T
1
2
E
X
CASE 867E–03
ISSUE D
PRESSURE SIDE PORTED (AS, GS)
6
Motorola Sensor Device Data
M
P
X
5
7
0
0
S
E
R
I
E
S
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or
guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the
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◊
MPX5700/D
相关型号：
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