MPX5700GVP [MOTOROLA]

GAGE, PEIZORESISTIVE PRESSURE SENSOR, 0-101.52Psi, 2.5%, 0.20-4.70V, CASE 867D-03, 6 PIN;


型号：	MPX5700GVP
厂家：	MOTOROLA
描述：	GAGE, PEIZORESISTIVE PRESSURE SENSOR, 0-101.52Psi, 2.5%, 0.20-4.70V, CASE 867D-03, 6 PIN 传感器压力传感器输出元件
文件：	总8页 (文件大小：152K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

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by MPX5700/D

SEMICONDUCTOR TECHNICAL DATA

INTEGRATED

PRESSURE SENSOR

0 to 700 kPa (0 to 101.5 psi)

0.2 to 4.7 V OUTPUT

The MPX5700 series piezoresistive transducer is a state–of–the–art monolithic silicon

pressure sensor designed for a wide range of applications, but particularly those

employing a microcontroller or microprocessor with A/D inputs. This patented, single

element transducer combines advanced micromachining techniques, thin–film metalliza-

tion, and bipolar processing to provide an accurate, high level analog output signal that

is proportional to the applied pressure.

Features

•

2.5% Maximum Error over 0° to 85°C

Ideally Suited for Microprocessor or Microcontroller–Based Systems

Available in Differential and Gauge Configurations

Patented Silicon Shear Stress Strain Gauge

Durable Epoxy Unibody Element

BASIC CHIP

CARRIER ELEMENT

CASE 867–08, STYLE 1

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

X–ducer

SENSING

ELEMENT

out

DIFFERENTIAL

PORT OPTION

CASE 867C–05, STYLE 1

GAIN STAGE #1

PINS 4, 5 AND 6 ARE NO CONNECTS

PIN NUMBER

GND

N/C

out

Gnd

Figure 1. Fully Integrated Pressure Sensor Schematic

(1)

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect

to external circuitry or ground. Pin 1

is noted by the notch in the Lead.

MAXIMUM RATINGS

Parametrics

Symbol

Value

2800

Unit

kPa

°C

Overpressure (P2

Burst Pressure (P2

Storage Temperature

1 Atmosphere)

max

burst

5000

stg

–40 to +125

Operating Temperature

°C

1. T = 25°C unless otherwise noted. Maximum Ratings apply to Case 867–08 only.

2. Extended exposure at the specified limits may cause permanent damage or degradation to the device.

3. This sensor is designed for applications where P1 is always greater than, or equal to P2.

Senseon and X–ducer are trademarks of Motorola, Inc.

REV 2

Motorola Sensor Device Data

Motorola, Inc. 1997

OPERATING CHARACTERISTICS (V = 5.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

—

Max

700

5.25

Unit

kPa

(1)

Pressure Range

(2)

Supply Voltage

Supply Current

4.75

–

5.0

7.0

0.2

4.7

4.5

—

Vdc

mAdc

Vdc

(3)

Zero Pressure Offset

(0 to 85°C)

off

0.088

4.587

—

0.313

4.813

—

(4)

Full Scale Output

FSO

Vdc

(5)

Full Scale Span

FSS

Vdc

(6)

Accuracy

—

± 2.5

—

FSS

Sensitivity

V/P

—

6.4

1.0

0.1

mV/kPa

(7)

Response Time

—

mAdc

Output Source Current at Full Scale Output

(8)

—

O+

Warm–Up Time

—

Decoupling circuit shown in Figure 4 required to meet electrical specifications.

MECHANICAL CHARACTERISTICS

Characteristic

Weight, Basic Element (Case 867)

Symbol

Min

—

Typ

4.0

—

Max

—

Unit

—

Grams

Cavity Volume

—

0.01

0.001

Volumetric Displacement

—

NOTES:

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V ) is defined as the output voltage at the minimum rated pressure.

off

4. Full Scale Output (V

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

5. Full Scale Span (V

FSS

minimum rated pressure.

6. Accuracy (error budget) consists of the following:

•

Linearity:

Output deviation from a straight line relationship with pressure over the specified pressure range.

Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure

applied.

•

Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from the

minimum or maximum rated pressure, at 25°C.

•

TcSpan:

TcOffset:

Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative

to 25°C.

•

Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

, at 25°C.

FSS

7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

8. Warm–up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.

9. P2 max is 500 kPa.

Motorola Sensor Device Data

ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING

Figure 3 illustrates both the Differential/Gauge and the Ab-

solute Sensing Chip in the basic chip carrier (Case 867). A

fluorosilicone gel isolates the die surface and wire bonds from

the environment, while allowing the pressure signal to be

transmitted to the sensor diaphragm. (For use of the

MPX5700D in a high pressure, cyclic application, consult the

factory.)

The MPX5700 series pressure sensor operating character-

istics, and internal reliability and qualification tests are based

on use of dry air as the pressure media. Media, other than dry

air, may have adverse effects on sensor performance and

long–term reliability. Contact the factory for information re-

garding media compatibility in your application.

Figure 4 shows a typical decoupling circuit for interfacing

the sensor to the A/D input of a microprocessor. Proper de-

coupling of the power supply is recommended.

Figure 2 shows the sensor output signal relative to pres-

sure input. Typical, minimum, and maximum output curves

are shown for operation over a temperature range of 0° to

85°C using the decoupling circuit below. (The output will sat-

urate outside of the specified pressure range.)

5.0

TRANSFER FUNCTION:

4.5

= V *(0.0012858*P+0.04) ± ERROR

out

4.0

3.5

3.0

2.5

2.0

1.5

1.0

0.5

= 5.0 Vdc

TEMP = 0 to 85°C

TYPICAL

MIN

MAX

100

200

300

400

500

600

700

800

DIFFERENTIAL PRESSURE (kPa)

Figure 2. Output versus Pressure Differential

FLUORO SILICONE

DIE COAT

STAINLESS STEEL

METAL COVER

DIE

MPX5700

A/D

OUTPUT

(PIN 1)

WIRE BOND

50 pF

51 k

PROCESSOR

RTV DIE

BOND

LEAD

FRAME

EPOXY CASE

Figure 3. Cross–Sectional Diagram

(Not to Scale)

Figure 4. Typical Decoupling Filter for Sensor to

Microprocessor Interface

Motorola Sensor Device Data

PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor

pressure sensor is designed to operate with positive differen-

as the Pressure (P1) side and the Vacuum (P2) side. The

Pressure (P1) side is the side containing fluoro silicone gel

which protects the die from harsh media. The Motorola MPX

tial pressure applied, P1 > P2.

The Pressure (P1) side may be identified by using the table

below:

Pressure (P1)

Side Identifier

Part Number

Case Type

MPX5700D

867–08C

867C–05

867B–04

867E–03

867F–03

Stainless Steel Cap

MPX5700DP

MPX5700GP

MPX5700GS

MPX5700GSX

Side with Part Marking

Side with Port Attached

ORDERING INFORMATION

The MPX5700 pressure sensor is available in differential and gauge configurations. Devices are available in the basic ele-

ment package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connec-

tions.

MPX Series

Order Number

MPX5700D

Device Marking

MPX5700D

Device Type

Basic Element

Ported Elements

Options

Case Type

867–08C

867C–05

867B–04

867E–03

867F–03

Differential

Differential Dual Ports

Gauge

MPX5700DP

MPX5700GP

MPX5700GS

MPX5700GSX

MPX5700DP

MPX5700GP

MPX5700D

Gauge, Axial

Gauge, Axial PC Mount

MPX5700D

Motorola Sensor Device Data

PACKAGE DIMENSIONS

NOTES:

POSITIVE PRESSURE

(P1)

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD

STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

–A–

INCHES

MILLIMETERS

DIM

MIN

MAX

0.630

0.534

0.220

0.033

0.064

MIN

15.11

13.06

5.08

MAX

16.00

13.56

5.59

PIN 1

0.595

0.514

0.200

0.027

0.048

SEATING

PLANE

–T–

0.68

0.84

1.22

1.63

0.100 BSC

2.54 BSC

0.014

0.695

0.016

0.725

0.36

0.40

D_{6 PL}

17.65

18.42

30 NOM

0.136 (0.005)

T A

0.475

0.430

0.090

0.495

0.450

0.105

12.07

10.92

2.29

12.57

11.43

2.66

STYLE 1:

PIN 1. VOUT

2. GROUND

3. VCC

4. V1

5. V2

CASE 867–08

ISSUE N

6. VEX

BASIC ELEMENT (A, D)

SEATING

PLANE

NOTES:

–T–

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

PORT #1

POSITIVE

PRESSURE (P1)

INCHES

MILLIMETERS

DIM

MIN

MAX

1.175

0.715

0.325

0.033

0.064

MIN

29.08

17.40

7.75

0.68

1.22

MAX

29.85

18.16

8.26

0.84

1.63

–Q–

1.145

0.685

0.305

0.027

0.048

0.100 BSC

2.54 BSC

0.014

0.695

0.290

0.420

0.153

0.230

0.220

0.016

0.725

0.300

0.440

0.159

0.250

0.240

0.36

17.65

7.37

0.41

18.42

7.62

10.67

3.89

11.18

4.04

3.89

4.04

PIN 1

5.84

6.35

5.59

6.10

–P–

0.910 BSC

23.11 BSC

D_{6 PL}

0.182

0.194

4.62

4.93

0.25 (0.010)

T Q

0.13 (0.005)

STYLE 1:

PIN 1.

OUT

2. GROUND

4. V1

5. V2

CASE 867B–04

ISSUE E

PRESSURE SIDE PORTED (AP, GP)

Motorola Sensor Device Data

PACKAGE DIMENSIONS–CONTINUED

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

–A–

0.25 (0.010)

T Q

INCHES

MILLIMETERS

DIM

MIN

MAX

1.175

0.715

0.435

0.033

0.064

MIN

29.08

17.40

10.29

0.68

MAX

29.85

18.16

11.05

0.84

PORT #1

POSITIVE

PRESSURE

(P1)

1.145

0.685

0.405

0.027

0.048

PORT #2 VACUUM (P2)

PORT #1 POSITIVE

PRESSURE (P1)

1.22

2.54 BSC

1.63

–Q–

PORT #2

VACUUM

(P2)

0.100 BSC

0.014

0.695

0.290

0.420

0.153

0.063

0.220

0.016

0.725

0.300

0.440

0.159

0.083

0.240

0.36

17.65

7.37

10.67

3.89

1.60

5.59

23.11 BSC

0.41

18.42

7.62

11.18

4.04

2.11

PIN 1

6.10

0.910 BSC

0.182

0.310

0.248

0.194

0.330

0.278

4.62

7.87

6.30

4.93

8.38

7.06

SEATING

PLANE

SEATING

PLANE

–T–

6 PL

0.13 (0.005)

STYLE 1:

PIN 1.

OUT

2. GROUND

4. V1

5. V2

CASE 867C–05

ISSUE F

PRESSURE AND VACUUM SIDES PORTED (DP)

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

INCHES

MILLIMETERS

–B–

DIM

MIN

MAX

0.720

0.255

0.820

0.033

0.186

0.064

MIN

17.53

6.22

MAX

18.28

6.48

0.690

0.245

0.780

0.027

0.178

0.048

PIN 1

19.81

0.69

20.82

0.84

PORT #1

POSITIVE

PRESSURE

(P1)

4.52

4.72

1.22

1.63

0.100 BSC

2.54 BSC

0.014

0.345

0.300

0.220

0.182

0.016

0.375

0.310

0.240

0.194

0.36

8.76

7.62

5.59

4.62

0.41

9.53

7.87

6.10

4.93

D 6 PL

STYLE 1:

PIN 1.

2. GROUND

–T–

0.13 (0.005)

T B

OUT

4. V1

5. V2

CASE 867E–03

ISSUE D

PRESSURE SIDE PORTED (AS, GS)

Motorola Sensor Device Data

PACKAGE DIMENSIONS–CONTINUED

–T–

–Q–

NOTES:

1. DIMENSIONING AND TOLERANCING PER

ANSI Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

INCHES

MILLIMETERS

DIM

MIN

MAX

1.120

0.760

0.650

0.033

0.180

0.064

MIN

27.43

18.80

16.00

0.68

4.06

1.22

2.54 BSC

0.36

5.59

1.78

3.81

11.18

17.65

21.34

4.62

MAX

28.45

19.30

16.51

0.84

1.080

0.740

0.630

0.027

0.160

0.048

4.57

1.63

PIN 1

PORT #1

0.100 BSC

POSITIVE

PRESSURE

(P1)

–P–

0.014

0.220

0.070

0.150

0.440

0.695

0.840

0.182

0.016

0.240

0.080

0.160

0.460

0.725

0.860

0.194

0.41

6.10

2.03

4.06

11.68

18.42

21.84

4.93

0.25 (0.010)

T Q

D6 PL

0.13 (0.005)

STYLE 1:

PIN 1.

2. GROUND

OUT

4. V1

5. V2

CASE 867F–03

ISSUE D

PRESSURE SIDE PORTED (ASX, GSX)

Motorola Sensor Device Data

Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding

the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and

specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola

datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”

must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of

others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other

applicationsintended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury

ordeathmayoccur. ShouldBuyerpurchaseoruseMotorolaproductsforanysuchunintendedorunauthorizedapplication,BuyershallindemnifyandholdMotorola

and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees

arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that

Motorola was negligent regarding the design or manufacture of the part. Motorola and

Opportunity/Affirmative Action Employer.

are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal

Mfax is a trademark of Motorola, Inc.

How to reach us:

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MPX5700/D

◊

Motorola Sensor Device Data

MPX5700GVP [MOTOROLA]

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