D6F-P0010A1 [OMRON]
MEMS Flow Sensor; MEMS流量传感器
| 型号： | D6F-P0010A1 |
| 厂家： | 
OMRON ELECTRONICS LLC |
| 描述： | MEMS Flow Sensor |
| 文件： | 总5页 (文件大小：396K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
MEMS Flow Sensor
D6F-P0010A
Compact, Highly Reliable Flow-Sensor
with Unique Dust Segregation System
• Cyclone flow structure diverts particulate from sensor element
• PCB-mounted & connector models available
• High accuracy, reliable mass flow measurement
• Alternative to differential pressure sensing
• Measure over 200 LPM with a bypass set-up
Ordering Information
Model
Wiring
Flow range
Gas
Case
D6F-P0010A1
D6F-P0010A2
D6F-CABLE2
PCB-mounting model
Connector model
1L/min
1L/min
-
Air
Air
-
PBT
PBT
-
Cable connector assembly
Electrical Performance
Item
Symbol
Vcc
Rating
Unit
Power supply voltage
Output voltage
5 – 10
VDC
VDC
Vout
0.5 – 2.5
Sensor Specifications
Model
D6F-P0010A1
PCB Terminals
D6F-P0010A2
Connector JST SM03B-SRSS-TB
Termination
Flow range/ Pressure range
Applicable gas
+ 1.0 SLM (+ 0.84 in H2O)
Air (contact Omron for other gases)
Accuracy
+/- 5% F.S. (typical test results within +/- 2% F.S.)
+/- 5% F.S.
Temperature characteristic
Operating temperature
Operating humidity
Storage temperature
Storage humidity
-10 to 60 deg C (without freezing and condensation)
85%RH max (without freezing and condensation)
-40 to 80 deg C (without freezing and condensation)
85%RH max (without freezing and condensation)
Analog 0.5 to 2.5 VDC, Amplified and Temperature Compensated
50kPa (7psi)
Output signal
Withstand pressure
Current consumption
Insulation resistance
Max 15mA (No load, Vcc=5 VDC, 25 deg C)
20M Ohm min.(DC 500VDC, between lead terminal and case)
MEMS Mass Flow Sensor D6F-P
1
Output Characteristics
3.0
2.5
2.0
1.5
1.0
0.5
0.0
Differential
Pressure
Flow Rate
Output
(inH2O)
0.00
(SLM)
0.00
0.25
0.50
0.75
1.00
(V)
0.50
1.60
2.10
2.31
2.50
0.07
0.24
0.51
0.84
Mass flow converted into volumetric flow rate
SLM (standard liters per minute) at 0 °C, 1 atm.
Note, 0 to 0.5V output indicates a negative flow
direction.
0.0
0.2
0.4
0.6
0.8
1.0
Differential Pressure (inH2O)
Repeatability, typical test results
1.0
0.8
3.0
2.5
2.0
1.5
1.0
0.5
-
0.6
0.4
0.2
0.0
-0.2
-0.4
-0.6
-0.8
-1.0
0.00
0.25
0.50
0.75
1.00
FLOW RATE [LPM]
(output results of 34 samples)
0.0
0.3
0.5
0.8
1.0
Flow Rate [LPM] (5 samples, repeated 10 times each)
Bidirectional Dust Segregation System
The D6F-P series has a patented dust segregation design. The flow path incorporates dual centrifugal
chambers, in which particulate matter follows in the outer path, away from the MEMS sensor chip
regardless of the flow direction. Note, standard products are calibrated for unidirectional flow, as shown
above. Contact Omron for bidirectional calibration options.
sensing element
2
MEMS Mass Flow Sensor D6F-P
Dimensions
All dimensions are shown in mm.
Use 2 suitable M2.6 screws for mounting. Do not exceed a fixing torque of 0.59 Nm.
D6F-P0010A1 (PCB lead)
Recommended
Installation
A (2:1)
D6F-P0010A2 (connector)
Connector Information
Omron: D6F-CABLE2
or JST IDC type: Receptacle 03SR-3
Wire AWG #30
A (2:1)
D6F-CABLE2 (optional)
JST header SM03B-SRSS-TB
or JST crimp type: Contact SSH-003T-P0.2
Housing SHR-03V-S
Wire AWG #32 - #28
MEMS Mass Flow Sensor D6F-P
3
Bypass Set-up
When used in a bypass set-up, as illustrated below, the D6F-P
mass flow sensors can measure flow rates far beyond the 1
LPM in-line rating. The pressure differential required to pull
airflow through the sensor can be accomplished by installing a
flow restrictor between the two ports or through the use of a
flow cross in large ducts, as shown in the HVAC application.
HVAC Application
The D6F-P mass flow sensor is ideal for
damper control in variable air volume
systems, where low flow rates are
difficult to measure with differential
pressure sensors.
Precautions
9. Noise countermeasures: VERY IMPORTANT: Take suitable
precautions to minimize the effects and potential for induced
electrical noise. Install away from apparatus that generates strong
high frequencies, surges and spikes. Take particular care to
install away from AC power transformers, live mains power lines
and high power magnetic circuits. Attach a surge suppressor and
a noise filter to the peripheral equipment.
1. Avoid use in excessively dirty, wet environments
2. Do not use in the presence of flammable gases (e.g.
hydrogen, methane, ethane) and liquefied petroleum gas. In
addition, do not use with corrosive gases (e.g. chlorine, sulfur,
acids, alkalis, etc.).
3. Install so that gas flows from “+” to “-” stamped ports.
4. For best results (optimum accuracy), mount horizontally.
10.Ensure good grounding is achieved by grounding the GND
terminal to the peripheral equipment’s main ground frame
connection and its associated regulated power supply.
5. Use 2 suitable M2.6 screws for mounting. Do not exceed a
fixing torque of 0.59 Nm.
6. Do not modify D6F- in any way.
11.Do not make a direct solder connection to the integral
terminals on the connector model type. The use of optional cable
‘D6F-CABLE2’ is recommended for attachment to ensure correct
connection (D6F-P0010A2). Solder PCB terminals after securing
the sensor to the board (D6F-P0010A1).
7. Do not place any object in or close to the inlet and outlet
orifices.
8. Do not use the sensor in any of the following environments:
• a location that receives significant radiant heat
• a place where intense light may radiate down
12.D6F- is a precision component. Keep in original packaging
and remove only when ready for installation. Damage may occur
if subjected to excessive force (e.g. dropped or kicked). Any item
suspected to be damaged should be discarded.
• where fast changing temperatures occur
• locations prone to freezing, high humidity, condensation
• where large magnitudes of vibration or shock could occur
13.Immediately following installation, a qualified person should
perform checks to ensure safe, satisfactory operation.
4
MEMS Mass Flow Sensor D6F-P
(c) Energy control systems, combustion systems, railroad systems, aviation systems,
medical equipment, amusement machines, vehicles, safety equipment, and
installations subject to separate industry or government regulations.
(d) Systems, machines, and equipment that could present a risk to life or property.
3. Prohibited Use: NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING
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VEHICLE APPLICATION MUST BE EXPRESSLY STATED IN THE SPECIFICATION BY
SELLER.
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programmable Product.
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