MP3V5050GP [FREESCALE]

Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated; 集成硅压力传感器片上信号调节,温度补偿和校准
MP3V5050GP
型号: MP3V5050GP
厂家: Freescale    Freescale
描述:

Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
集成硅压力传感器片上信号调节,温度补偿和校准

传感器 压力传感器 温度补偿
文件: 总11页 (文件大小:215K)
中文:  中文翻译
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MP3V5050  
Rev 0, 08/2008  
Freescale Semiconductor  
Technical Data  
Integrated Silicon Pressure Sensor  
On-Chip Signal Conditioned,  
Temperature Compensated and  
Calibrated  
The MP3V5050 series piezoresistive transducer is a state-of-the-art  
monolithic silicon pressure sensor designed for a wide range of applications, but  
particularly those employing a microcontroller or microprocessor with A/D inputs.  
This patented, single element transducer combines advanced micromachining  
techniques, thin-film metallization, and bipolar processing to provide an accurate,  
high level analog output signal that is proportional to the applied pressure.  
MP3V5050  
SERIES  
INTEGRATED  
PRESSURE SENSOR  
0 to 50 kPa (0 to 7.25 psi)  
0.06 to 2.82 V Output  
SMALL OUTLINE PACKAGE  
SURFACE MOUNT  
Features  
2.5% Maximum Error over 0° to 85°C  
MP3V5050GP  
CASE 1369-01  
MP3V5050DP  
CASE 1351-01  
Ideally suited for Microprocessor or Microcontroller-Based Systems  
Temperature Compensated Over –40° to +125°C  
Patented Silicon Shear Stress Strain Gauge  
Durable Epoxy Small Outline Package (SOP)  
Easy-to-Use Chip Carrier Option  
MP3V5050GC6U  
CASE 482A-01  
Multiple Porting Options for Design Flexibility  
Barbed Side Ports for Robust Tube Connection  
SMALL OUTLINE PACKAGE  
PIN NUMBERS(1)  
1
2
N/C  
VS  
5
6
N/C  
N/C  
3
4
Gnd  
Vout  
7
8
N/C  
N/C  
1. Pins 1, 5, 6, 7, and 8 are internal device  
connections. Do not connect to external  
circuitry or ground. Pin 1 is noted by the  
notch in the lead.  
ORDERING INFORMATION  
Device Type  
Options  
Case No.  
MP3V Series Order No.  
Packing Options  
Device Marking  
SMALL OUTLINE PACKAGE (MP3V5050 SERIES)  
Ported Elements Side Port  
Dual Port  
1369  
MP3V5050GP  
Trays  
Trays  
MP3V5050G  
1351  
482A  
482A  
MP3V5050DP  
MP3V5050G  
MP3V5050G  
MP3V5050G  
Axial Port  
MP3V5050GC6U  
MP3V5050GC6T1  
Rails  
Tape & Reel  
© Freescale Semiconductor, Inc., 2008. All rights reserved.  
VS  
Gain Stage #2  
and  
Ground  
Reference  
Shift Circuitry  
Thin Film  
Temperature  
Compensation  
and  
Sensing  
Element  
Vout  
Gain Stage #1  
GND  
Pins 1, 5, 6, 7, and 8 are NO CONNECTS  
for Small Outline Package Device  
Figure 1. Fully Integrated Pressure Sensor Schematic  
Table 1. Maximum Ratings(1)  
Rating  
Symbol  
Value  
Unit  
Maximum Pressure (P1 > P2)  
Storage Temperature  
Pmax  
200  
kPa  
Tstg  
TA  
–40° to +125°  
–40° to +125°  
°C  
°C  
Operating Temperature  
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.  
MP3V5050  
Sensors  
Freescale Semiconductor  
2
Table 2. . Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in  
Figure 4 required to meet electrical specifications.)  
Characteristic  
Symbol  
Min  
Typ  
Max  
Unit  
Pressure Range(1)  
POP  
0
50  
kPa  
Supply Voltage(2)  
Supply Current  
VS  
Io  
2.7  
3.0  
7.0  
3.3  
10  
Vdc  
mAdc  
Vdc  
Minimum Pressure Offset(3)  
@ VS = 3.0 Volts  
(0 to 85°C)  
(0 to 85°C)  
(0 to 85°C)  
(0 to 85°C)  
Voff  
0.053  
0.12  
0.188  
Full Scale Output(4)  
@ VS = 3.0 Volts  
VFSO  
VFSS  
2.752  
2.8  
2.7  
2.888  
Vdc  
Vdc  
Full Scale Span(5)  
@ VS = 3.0 Volts  
Accuracy(6)  
Sensitivity  
±2.5  
%VFSS  
V/P  
tR  
54  
—-  
—-  
mV/kPa  
ms  
Response Time(7)  
1.0  
Output Source Current at Full Scale Output  
Io+  
0.1  
20  
—-  
—-  
—-  
mAdc  
ms  
Warm-Up Time(8)  
Offset Stability(9)  
±0.5  
%VFSS  
1. 1.0 kPa (kiloPascal) equals 0.145 psi.  
2. Device is ratiometric within this specified excitation range.  
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.  
4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.  
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the  
minimum rated pressure.  
6. Accuracy (error budget) consists of the following:  
• Linearity:  
Output deviation from a straight line relationship with pressure over the specified pressure range.  
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to  
and from the minimum or maximum operating temperature points, with zero differential pressure applied.  
• Pressure Hysteresis:  
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the  
minimum or maximum rated pressure at 25°C.  
TcSpan:  
TcOffset:  
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.  
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.  
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C.  
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to  
a specified step change in pressure.  
8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.  
9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.  
MP3V5050  
Sensors  
Freescale Semiconductor  
3
Figure 3 illustrates the Differential/Gauge Sensing Chip in  
the basic chip carrier (Case 482). A fluorosilicone gel isolates  
the die surface and wire bonds from the environment, while  
allowing the pressure signal to be transmitted to the sensor  
diaphragm.  
The MP3V5050 series pressure sensor operating  
characteristics, and internal reliability and qualification tests  
are based on use of dry air as the pressure media. Media,  
other than dry air, may have adverse effects on sensor  
performance and long-term reliability. Contact the factory for  
information regarding media compatibility in your application.  
Figure 2 shows the sensor output signal relative to  
pressure input. Typical, minimum, and maximum output  
curves are shown for operation over a temperature range of  
0° to 85°C using the decoupling circuit shown in Figure 4. The  
output will saturate outside of the specified pressure range.  
Figure 4 shows the recommended decoupling circuit for  
interfacing the output of the integrated sensor to the A/D input  
of a microprocessor or microcontroller. Proper decoupling of  
the power supply is recommended.  
3
Transfer Function:  
V
V
out = VS*(0.018*P+0.04) ± ERROR  
S = 3.0 Vdc  
TEMP = 0 to 85°C  
2
1
0
TYPICAL  
MAX  
MIN  
0
5
10 15 20  
25  
30 35 40  
45 50  
55  
Differential Pressure (kPa)  
Figure 2. Output versus Pressure Differential  
3 V  
STAINLESS  
STEEL CAP  
FLUOROSILICONE  
GEL DIE COAT  
DIE  
P1  
OUTPUT  
Vout  
WIRE BOND  
THERMOPLASTIC  
CASE  
Vs  
IPS  
GND  
LEAD  
FRAME  
1.0 µF  
470 pF  
0.01 µF  
P2  
DIFFERENTIAL  
DIE BOND  
SENSING ELEMENT  
Figure 3. Cross-Sectional Diagram SOP  
(not to scale)  
Figure 4. Recommended Power Supply Decoupling  
and Output Filtering  
(For additional output filtering, please refer to  
Application Note AN1646.)  
MP3V5050  
Sensors  
4
Freescale Semiconductor  
Transfer Function  
Nominal Transfer Value: Vout = VS (P x 0.018 + 0.04)  
± (Pressure Error x Temp. Factor x 0.018 x VS)  
V
S = 3.0 V ± 0.30 Vdc  
Temperature Error Band  
MP3V5050 SERIES  
4.0  
Temp  
Multiplier  
3.0  
–40  
0 to 85  
+125  
3
1
3
Temperature  
Error  
Factor  
2.0  
1.0  
0.0  
–40  
–20  
0
20  
40  
60  
80  
100  
120  
140  
Temperature in °C  
NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C.  
Pressure Error Band  
Error Limits for Pressure  
3.0  
2.0  
1.0  
Pressure (in kPa)  
0.0  
0
10  
20  
30  
40  
50  
60  
–1.0  
–2.0  
–3.0  
Pressure  
Error (Max)  
0 to 50 (kPa)  
±1.25 (kPa)  
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE  
Freescale designates the two sides of the pressure sensor  
as the Pressure (P1) side and the Vacuum (P2) side. The  
Pressure (P1) side is the side containing fluorosilicone gel  
which protects the die from harsh media. The MP3V pressure  
sensor is designed to operate with positive differential  
pressure applied, P1 > P2.  
The Pressure (P1) side may be identified by using the  
table below:  
Part Number  
MP3V5050GP  
Case Type  
Pressure (P1) Side Identifier  
Side with Port Attached  
1369  
1351  
482A  
MP3V5050DP  
Side with Part Marking  
Vertical Port Attached  
MP3V5050GC6U/T1  
MP3V5050  
Sensors  
Freescale Semiconductor  
5
PACKAGE DIMENSIONS  
PAGE 1 OF 2  
CASE 1351-01  
ISSUE A  
SMALL OUTLINE PACKAGE  
MP3V5050  
Sensors  
Freescale Semiconductor  
6
PACKAGE DIMENSIONS  
PAGE 2 OF 2  
CASE 1351-01  
ISSUE A  
SMALL OUTLINE PACKAGE  
MP3V5050  
Sensors  
Freescale Semiconductor  
7
PACKAGE DIMENSIONS  
PAGE 1 OF 2  
CASE 1369-01  
ISSUE B  
SMALL OUTLINE PACKAGE  
MP3V5050  
Sensors  
Freescale Semiconductor  
8
PACKAGE DIMENSIONS  
PAGE 2 OF 2  
CASE 1369-01  
ISSUE B  
SMALL OUTLINE PACKAGE  
MP3V5050  
Sensors  
Freescale Semiconductor  
9
PACKAGE DIMENSIONS  
-A-  
D 8 PL  
0.25 (0.010)  
4
1
M
S
S
A
NOTES:  
1. DIMENSIONING AND TOLERANCING PER ANSI  
Y14.5M, 1982.  
2. CONTROLLING DIMENSION: INCH.  
3. DIMENSION A AND B DO NOT INCLUDE MOLD  
PROTRUSION.  
T
B
5
8
N
-B-  
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).  
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.  
G
INCHES  
MIN MAX  
MILLIMETERS  
DIM  
A
B
C
D
G
H
J
K
M
N
MIN  
10.54  
10.54  
12.70  
0.96  
MAX  
10.79  
10.79  
13.21  
1.07  
S
0.415 0.425  
0.415 0.425  
0.500 0.520  
0.038 0.042  
0.100 BSC  
W
2.54 BSC  
0.002 0.010  
0.009 0.011  
0.061 0.071  
0.05  
0.23  
1.55  
0˚  
0.25  
0.28  
1.80  
7˚  
V
0˚  
7˚  
C
0.444 0.448  
0.709 0.725  
0.245 0.255  
0.115 0.125  
11.28  
18.01  
6.22  
2.92  
11.38  
18.41  
6.48  
3.17  
S
V
W
H
J
-T-  
SEATING  
PLANE  
PIN 1 IDENTIFIER  
M
K
CASE 482A-01  
ISSUE A  
SMALL OUTLINE PACKAGE  
MP3V5050  
Sensors  
Freescale Semiconductor  
10  
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© Freescale Semiconductor, Inc. 2008. All rights reserved.  
MP3V5050  
Rev 0  
08/2008  

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