DLP670S [TI]

DLP® 0.67 英寸、2716x1600 阵列、S610 数字微镜器件 (DMD);
DLP670S
型号: DLP670S
厂家: TEXAS INSTRUMENTS    TEXAS INSTRUMENTS
描述:

DLP® 0.67 英寸、2716x1600 阵列、S610 数字微镜器件 (DMD)

文件: 总51页 (文件大小:2380K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
DLP670S  
ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
DLP670S 0.67 2716 × 1600 DMD  
1 特性  
3 说明  
• 高分辨2716 × 1600 阵列  
拥有超过 430 万个微镜的 DLP670S 数字微镜器件  
(DMD) 是一种空间光调制器 (SLM)调制入射光的振  
幅、方向和相位。DMD 与四2xLVDS 输入数据总  
线相结合能够以极快的图形速率显示高分辨率图形。  
DLP670S 提供的高分辨率和快速图形速率使其非常适  
合支持各种工业、医疗和高级成像应用。DLP670S 与  
DLPC900 数字控制器配合使用时可实现可靠功能和  
操作。此专用芯片组以满足各种终端设备解决方案要求  
所需的高图形速率提供灵活且易于编程的图形。  
>430 万微镜  
0.67 英寸微镜阵列对角线  
5.4 微米微镜间距  
±17.5° 微镜倾斜角相对于平面)  
– 设计用于底部照明  
– 集成微镜驱动器电路  
• 设计用于宽带可见光  
(420nm700nm)  
– 窗透射率97%单通两个窗面)  
– 微镜反射率88%  
高分辨率支持扫描更大的物体这对于 3D 机器视觉应  
用有直接帮助。  
– 阵列衍射效84% (@f/2.4)  
– 阵列填充系数93%  
• 四16 位低压差分信(LVDS)、双倍数据速率  
(DDR) 输入数据总线  
TI DLP®高级光控制技术页面了解如何开始使用  
DLP670STI.com 上的 DLP 先进光控制资源可加快  
上市速度这些资源包括评估模块参考设计、 光学  
模块制造商DLP 设计网络合作伙伴。  
• 由DLPC900 数字控制器驱动  
– 高9523Hz 1 位图形/秒  
– 在预存储图形模式下相当41.3 千兆位/秒像素  
数据速率  
– 高1190Hz8 位灰度图形速率预存储图形  
模式具有照明调制)  
– 高247Hz8 位图形速率外部视频图形输  
)  
3-1. 器件信息  
封装  
封装尺寸标称值)  
器件型号  
DLP670S(1)  
FYR (350)  
35mm × 32mm  
(1) 如需了解所有可用封装请参阅数据表末尾的可订购产品附  
录。  
2 应用  
工业  
– 用于机器视觉3D 扫描仪  
3D 无接触计量和质量控制  
3D 打印  
医疗  
– 眼科  
– 针对四肢和皮肤测量3D 扫描仪  
– 高光谱扫描和成像  
显示器  
3D 成像显微镜  
– 智能和自适应照明  
DLP670S 简化原理图  
本文档旨在为方便起见提供有TI 产品中文版本的信息以确认产品的概要。有关适用的官方英文版本的最新信息请访问  
www.ti.com其内容始终优先。TI 不保证翻译的准确性和有效性。在实际设计之前请务必参考最新版本的英文版本。  
English Data Sheet: DLPS194  
 
 
 
 
DLP670S  
www.ti.com.cn  
ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
Table of Contents  
7.5 Optical Interface and System Image Quality.............27  
7.6 Micromirror Array Temperature Calculation.............. 28  
7.7 Micromirror Landed-On/Landed-Off Duty Cycle....... 30  
8 Application and Implementation..................................33  
8.1 Application Information............................................. 33  
8.2 Typical Application.................................................... 33  
8.3 DMD Die Temperature Sensing................................ 35  
9 Power Supply Recommendations................................36  
9.1 DMD Power Supply Power-Up Procedure................36  
9.2 DMD Power Supply Power-Down Procedure........... 36  
9.3 Restrictions on Hot Plugging and Hot Swapping...... 38  
10 Layout...........................................................................38  
10.1 Layout Guidelines................................................... 38  
10.2 Layout Example...................................................... 41  
11 Device and Documentation Support..........................43  
11.1 第三方产品免责声明................................................43  
11.2 Device Support........................................................43  
11.3 Documentation Support.......................................... 44  
11.4 接收文档更新通知................................................... 44  
11.5 支持资源..................................................................44  
11.6 Trademarks............................................................. 44  
11.7 Electrostatic Discharge Caution..............................44  
11.8 术语表..................................................................... 44  
12 Mechanical, Packaging, and Orderable  
1 特性................................................................................... 1  
2 应用................................................................................... 1  
3 说明................................................................................... 1  
4 Revision History.............................................................. 2  
5 Pin Configuration and Functions...................................3  
6 Specifications................................................................ 12  
6.1 Absolute Maximum Ratings...................................... 12  
6.2 Storage Conditions................................................... 13  
6.3 ESD Ratings............................................................. 13  
6.4 Recommended Operating Conditions.......................13  
6.5 Thermal Information..................................................16  
6.6 Electrical Characteristics...........................................16  
6.7 Capacitance at Recommended Operating  
Conditions................................................................... 16  
6.8 Timing Requirements................................................17  
6.9 Typical Characteristics..............................................20  
6.10 System Mounting Interface Loads.......................... 20  
6.11 Micromirror Array Physical Characteristics............. 21  
6.12 Micromirror Array Optical Characteristics............... 23  
6.13 Window Characteristics.......................................... 25  
6.14 Chipset Component Usage Specification............... 25  
7 Detailed Description......................................................26  
7.1 Overview...................................................................26  
7.2 Functional Block Diagram.........................................26  
7.3 Feature Description...................................................27  
7.4 Device Functional Modes..........................................27  
Information.................................................................... 45  
4 Revision History  
Changes from Revision * (November 2020) to Revision A (June 2022)  
Page  
• 根据最新的德州仪(TI) 和行业数据表标准对本文档进行了更新.......................................................................1  
Updated the ESD ratings per the latest standards........................................................................................... 13  
Corrected Note (6) LVCMOS Interface.............................................................................................................. 13  
Changed SCP specifications to reflect 'Rise/Fall Time'.................................................................................... 17  
Corrected figure 6-3 .................................................................................................................................... 17  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5 Pin Configuration and Functions  
A
B
C
D
E
F
G
H
J
K
L
M
N
P
R
T
U
V
W
X
Y
Z
AA  
25 23 21 19 17 15 13 11  
26 24 22 20 18 16 14 12 10  
9
7
5
3
1
8
6
4
2
5-1. FYR Package 350-Pin CPGA Bottom View  
CAUTION  
To ensure reliable, long-term operation of the DLP670S DMD, it is critical to properly manage the layout and operation of the  
signals identified in the table below. For specific details and guidelines, refer to 10.1 before designing the board.  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1)  
PIN(2)  
TYPE  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
(I/O/P)  
NAME  
NO.  
DATA INPUTS  
D_AN(0)  
D_AP(0)  
D_AN(1)  
D_AP(1)  
D_AN(2)  
D_AP(2)  
D_AN(3)  
D_AP(3)  
D_AN(4)  
D_AP(4)  
D_AN(5)  
D_AP(5)  
D_AN(6)  
D_AP(6)  
D_AN(7)  
D_AP(7)  
D_AN(8)  
D_AP(8)  
D_AN(9)  
D_AP(9)  
D_AN(10)  
D_AP(10)  
D_AN(11)  
D_AP(11)  
D_AN(12)  
D_AP(12)  
D_AN(13)  
D_AP(13)  
D_AN(14)  
D_AP(14)  
D_AN(15)  
D_AP(15)  
C7  
C8  
D4  
E4  
C5  
C4  
D6  
C6  
D8  
D7  
D3  
E3  
B3  
C3  
E11  
E10  
E6  
LVDS pair for Data Bus A  
(15:0)  
Input  
2xLVDS DDR  
Differential  
563  
E5  
B10  
C10  
B8  
B9  
C13  
C14  
D15  
E15  
B12  
B13  
B15  
B16  
C16  
C17  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NAME  
NO.  
Y8  
D_BN(0)  
D_BP(0)  
D_BN(1)  
D_BP(1)  
D_BN(2)  
D_BP(2)  
D_BN(3)  
D_BP(3)  
D_BN(4)  
D_BP(4)  
D_BN(5)  
D_BP(5)  
D_BN(6)  
D_BP(6)  
D_BN(7)  
D_BP(7)  
D_BN(8)  
D_BP(8)  
D_BN(9)  
D_BP(9)  
D_BN(10)  
D_BP(10)  
D_BN(11)  
D_BP(11)  
D_BN(12)  
D_BP(12)  
D_BN(13)  
D_BP(13)  
D_BN(14)  
D_BP(14)  
D_BN(15)  
D_BP(15)  
Y7  
X4  
W4  
Z3  
Y3  
X6  
Y6  
X8  
X7  
X3  
W3  
W15  
X15  
W11  
W10  
W6  
W5  
AA9  
AA10  
Z8  
LVDS pair for Data Bus B  
(15:0)  
Input  
2xLVDS DDR  
Differential  
563  
Z9  
Y13  
Y14  
Z10  
Y10  
Z12  
Z13  
Z15  
Z16  
Y16  
Y17  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NAME  
NO.  
C18  
C19  
A20  
A19  
L23  
K23  
C23  
B23  
G23  
H23  
H24  
G24  
B18  
B19  
C21  
B21  
D23  
E23  
D25  
C25  
L24  
K24  
K25  
J25  
D_CN(0)  
D_CP(0)  
D_CN(1)  
D_CP(1)  
D_CN(2)  
D_CP(2)  
D_CN(3)  
D_CP(3)  
D_CN(4)  
D_CP(4)  
D_CN(5)  
D_CP(5)  
D_CN(6)  
D_CP(6)  
D_CN(7)  
D_CP(7)  
D_CN(8)  
D_CP(8)  
D_CN(9)  
D_CP(9)  
D_CN(10)  
D_CP(10)  
D_CN(11)  
D_CP(11)  
D_CN(12)  
D_CP(12)  
D_CN(13)  
D_CP(13)  
D_CN(14)  
D_CP(14)  
D_CN(15)  
D_CP(15)  
LVDS pair for Data Bus C  
(15:0)  
Input  
2xLVDS DDR  
Differential  
563  
B24  
A24  
D26  
C26  
G25  
F25  
K26  
J26  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NAME  
NO.  
Y18  
Y19  
AA20  
AA19  
N23  
P23  
Y23  
Z23  
U23  
T23  
T24  
U24  
Z18  
Z19  
Y21  
Z21  
X23  
W23  
X25  
Y25  
N24  
P24  
P25  
R25  
Z24  
AA24  
X26  
Y26  
U25  
V25  
P26  
R26  
B6  
D_DN(0)  
D_DP(0)  
D_DN(1)  
D_DP(1)  
D_DN(2)  
D_DP(2)  
D_DN(3)  
D_DP(3)  
D_DN(4)  
D_DP(4)  
D_DN(5)  
D_DP(5)  
D_DN(6)  
D_DP(6)  
D_DN(7)  
D_DP(7)  
D_DN(8)  
D_DP(8)  
D_DN(9)  
D_DP(9)  
D_DN(10)  
D_DP(10)  
D_DN(11)  
D_DP(11)  
D_DN(12)  
D_DP(12)  
D_DN(13)  
D_DP(13)  
D_DN(14)  
D_DP(14)  
D_DN(15)  
D_DP(15)  
DCLK_AN  
DCLK_AP  
DCLK_BN  
DCLK_BP  
DCLK_CN  
DCLK_CP  
DCLK_DN  
DCLK_DP  
LVDS pair for Data Bus D  
(15:0)  
Input  
2xLVDS DDR  
Differential  
563  
Input  
Input  
Input  
Input  
LVDS  
LVDS  
LVDS  
LVDS  
Differential  
Differential  
Differential  
Differential  
LVDS pair for Data Clock A (7) 563  
LVDS pair for Data Clock B (7) 563  
LVDS pair for Data Clock C (7) 563  
LVDS pair for Data Clock D (7) 563  
B5  
Z6  
Z5  
G26  
F26  
U26  
V26  
DATA CONTROL INPUTS  
SCTRL_AN  
SCTRL_AP  
A10  
A9  
LVDS pair for Serial Control  
Input  
LVDS  
DDR  
Differential  
563  
(Sync) A(7)  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NAME  
NO.  
Y4  
SCTRL_BN  
SCTRL_BP  
SCTRL_CN  
SCTRL_CP  
SCTRL_DN  
SCTRL_DP  
LVDS pair for Serial Control  
(Sync) B(7)  
Input  
Input  
Input  
LVDS  
DDR  
Differential  
563  
563  
563  
Y5  
E24  
D24  
W24  
X24  
LVDS pair for Serial Control  
(Sync) C(7)  
LVDS  
DDR  
DDR  
Differential  
Differential  
LVDS pair for Serial Control  
(Sync) D(7)  
LVDS  
DAD CONTROL INPUTS  
RESET_ADDR(0)  
RESET_ADDR(1)  
RESET_ADDR(2)  
RESET_ADDR(3)  
RESET_MODE(0)  
R3  
Reset Driver Address Select.  
Bond pad connects to an  
internal pulldown circuit.(7)  
R4  
T3  
U2  
P4  
Input  
LVCMOS  
Pulldown  
Reset Driver Mode Select.  
Bond pad connects to an  
internal pulldown circuit.(7)  
Input  
Input  
Input  
LVCMOS  
LVCMOS  
LVCMOS  
Pulldown  
Pullup  
RESET_MODE(1)  
V3  
Active Low. Output Enable  
signal for internal Reset Driver  
circuitry. Bond Pad connects  
to an internal pullup circuit.(7)  
RESET_OEZ  
R2  
RESET_SEL(0)  
RESET_SEL(1)  
P3  
V2  
Reset Driver Level Select.  
Bond pad connects to an  
internal pulldown circuit.(7)  
Pulldown  
Rising edge on  
RESET_STROBE latches in  
the control signals. Bond pad  
connects to an internal  
pulldown circuit.(7)  
RESET_STROBE  
W8  
U4  
Input  
Input  
LVCMOS  
LVCMOS  
Pulldown  
Pullup  
Active Low. Places reset  
circuitry in known VOFFSET  
state. Bond pad connects to  
an internal pulldown circuit.(7)  
RESETZ  
SCP CONTROL  
Serial Communications Port  
Clock. SCPCLK is only active  
when SCPENZ goes low.  
Bond pad connects to an  
internal pulldown circuit.(7)  
SCPCLK  
SCPDI  
W17  
W18  
Input  
Input  
LVCMOS  
Pulldown  
Serial Communications Port  
Data. Synchronous to the  
Rising Edge of SCPCLK. Bond  
pad connects to an internal  
pulldown circuit.(7)  
LVCMOS SDR  
Pulldown  
Pulldown  
Active Low Serial  
Communications Port Enable.  
Bond pad connects to an  
internal pulldown circuit.(7)  
SCPENZ  
SCPDO  
X18  
Input  
LVCMOS  
Serial Communications Port  
output  
W16  
Output  
LVCMOS SDR  
EXTERNAL REGULATOR SIGNALS  
Active High. Enable signal for  
external VBIAS regulator  
EN_BIAS  
J4  
Output  
Output  
LVCMOS  
LVCMOS  
Active High. Enable signal for  
external VOFFSET regulator  
EN_OFFSET  
H3  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NAME  
NO.  
Active High. Enable signal for  
external VRESET regulator  
EN_RESET  
J3  
Output  
Input  
Input  
Input  
LVCMOS  
LVCMOS  
LVCMOS  
LVCMOS  
Active low fault from external  
VBIAS regulator(7)  
PG_BIAS  
K3  
F2  
F3  
Active low fault from external  
VOFFSET regulator(7)  
PG_OFFSET  
PG_RESET  
Active low fault from external  
VRESET regulator(7)  
OTHER SIGNALS  
Active Low. Output Interrupt to  
DLP controller (ASIC)  
RESET_IRQZ  
U3  
Output  
Input  
LVCMOS  
Analog  
Temperature Sensor Diode  
Anode(3)  
TEMP_PLUS  
E16  
E17  
Temperature Sensor Diode  
Cathode (3)  
TEMP_MINUS  
Input  
Analog  
POWER  
A5, A6, A7,  
AA5, AA6,  
AA7  
Power supply for Positive Bias  
level of micromirror reset  
signal  
VBIAS  
Power  
Power  
Analog  
Analog  
A8, B2, C1,  
D1, D10, D12,  
D19, E1, E19,  
E20, E21, F1,  
K1, L1, M1,  
N1, P1,V1,  
Power supply for low voltage  
CMOS logic. Power supply for  
normal high voltage at  
VCC  
micromirror address  
W1, W19,  
W20, W21,  
X1, X10, X12,  
X19, Y1, Z1,  
Z2, AA2, AA8,  
electrodes. Power supply for  
Offset level during the power-  
down sequence  
A11, A16,  
A17, A18,  
A21, A22,  
Power supply for low voltage  
CMOS LVDS interface  
VCCI  
A23, AA11,  
AA16, AA17,  
AA18, AA21,  
AA22, AA23,  
Power  
Analog  
Power supply for high voltage  
CMOS logic. Power supply for  
stepped high voltage at  
micromirror address  
electrodes. Power supply for  
Offset level of MBRST(15:0)  
A3, A4, A25,  
B26, L26,  
M26, N26,  
Z26, AA3,  
AA4, AA25  
VOFFSET  
Power  
Power  
Analog  
Analog  
Power supply for Negative  
Reset level of micromirror  
reset signal  
G1, H1, J1,  
R1, T1, U1  
VRESET  
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ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NAME  
NO.  
B4, B7, B11,  
B14, B17,  
B20, B22,  
B25, C2, C9,  
C20, C22,  
C24, D2, D5,  
D9, D11, D14,  
D18, D20,  
D21, D22, E2,  
E7, E9, E22,  
E25, E26, F4,  
F23, F24, H2,  
H4, H25, H26,  
J23, J24, K2,  
L2, L3, L4,  
L25, M2, M3,  
M4, M23,  
M24, M25,  
VSS (Ground)  
Ground  
Common Return for all power  
N2, N3, N25,  
P2,R23, R24,  
T2, T4, T25,  
T26, V4, V23,  
V24, W2, W7,  
W9, W22,  
W25, W26,  
X2, X5, X9,  
X11, X14,  
X20, X21,  
X22, Y2, Y9,  
Y20, Y22,  
Y24, Z4, Z7,  
Z11, Z14,  
Z17, Z20,  
Z22, Z25  
RESERVED SIGNALS  
Do Not Connect on the printed  
circuit board (PCB)  
RESERVED_PFE  
E18  
G4  
E8  
Ground LVCMOS  
Ground LVCMOS  
Do Not Connect on the printed  
circuit board (PCB)  
RESERVED_TM  
RESERVED_TP0  
RESERVED_TP1  
RESERVED_TP2  
RESERVED_BA  
RESERVED_BB  
RESERVED_BC  
RESERVED_BD  
Do Not Connect on the printed  
circuit board (PCB)  
Input  
Input  
Analog  
Do Not Connect on the printed  
circuit board (PCB)  
J2  
Analog  
Do Not Connect on the printed  
circuit board (PCB)  
G2  
N4  
Input  
Analog  
Do Not Connect on the printed  
circuit board (PCB)  
Output  
Output  
Output  
Output  
LVCMOS  
LVCMOS  
LVCMOS  
LVCMOS  
Do Not Connect on the printed  
circuit board (PCB)  
K4  
Do Not Connect on the printed  
circuit board (PCB)  
X17  
D17  
Do Not Connect on the printed  
circuit board (PCB)  
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NAME  
ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
5-1. Pin Functions(1) (continued)  
PIN(2)  
TYPE  
(I/O/P)  
INTERNAL  
TERM(5)  
TRACE  
(mils)(6)  
SIGNAL  
DATA RATE(4)  
DESCRIPTION  
NO.  
C11, C12,  
C15, D13,  
D16, E12,  
E13, E14,  
W13, W12,  
W14, X13,  
X16, Y11,  
Y12, Y15,  
For TI Test Purposes only, Do  
Not Connect on the printed  
circuit board (PCB)  
NO CONNECT  
NC  
(1) The DLP670S DMD is a component of a DLP® chipset. Reliable function and operation of the DLP670S DMD requires that it be used  
in conjunction with the other components of the applicable DLP® chipset, including those components that contain or implement TI  
DMD control technology. TI DMD control technology is the TI technology and devices for operating or controlling a DLP® DMD.  
(2) The following power supplies are required for all DMD operating modes: VSS, VBIAS, VCC, VCCI, VOFFSET, and VRESET.  
(3) VSS must be connected for proper DMD operation.  
(4) DDR = Double Data Rate, SDR = Single Data Rate, Refer to the Timing Requirements for specifications and relationships.  
(5) Internal term = CMOS level internal termination. Refer to Recommended Operating Conditions for differential termination specification.  
(6) Dielectric Constant for the DMD FYR (S610) ceramic package is approximately 9.6. For the package trace lengths shown: Propagation  
Speed = 11.8 / sqrt(9.6) = 3.808 in/ns. Propagation Delay = 0.262 ns/in = 10.315 ps/mm.  
(7) These signals are very sensitive to noise or intermittent power connections, which can cause irreversible DMD micromirror array  
damage or, to a lesser extent, image disruption. Consider this precaution during DMD board design and manufacturer handling of the  
DMD sub-assemblies.  
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6 Specifications  
6.1 Absolute Maximum Ratings  
over operating free-air temperature range (unless otherwise noted) (1)  
MIN  
MAX  
UNIT  
SUPPLY VOLTAGES  
VCC  
Supply voltage for LVCMOS core logic(2)  
Supply voltage for LVDS receivers(2)  
2.3  
2.3  
11  
V
V
V
V
V
V
V
V
0.5  
0.5  
0.5  
0.5  
15  
VCCI  
VOFFSET  
VBIAS  
Supply voltage for HVCMOS and micromirror electrode(2) (3)  
Supply voltage for micromirror electrode(2)  
Supply voltage for micromirror electrode(2)  
Supply voltage delta (absolute value)(4)  
Supply voltage delta (absolute value)(5)  
Supply voltage delta (absolute value)(6)  
19  
VRESET  
|VCC VCCI  
0.3  
0.3  
11  
|
|VBIAS VOFFSET  
|VBIAS VRESET  
|
34  
|
INPUT VOLTAGES  
Input voltage for all other LVCMOS input pins(2)  
Input voltage for all other LVDS input pins(2) (6)  
Input differential voltage (absolute value)(6)  
Input differential current(7)  
VCC + 0.5  
VCCI + 0.5  
500  
V
V
0.5  
0.5  
|VID|  
mV  
mA  
IID  
6.25  
CLOCKS  
Clock frequency for LVDS interface: DCLK_A, DCLK_B,  
DCLK_C, DCLK_D  
400  
MHz  
ƒCLOCK  
ENVIRONMENTAL  
Array temperature: operational(8)  
0
90  
90  
°C  
°C  
TARRAY and TWINDOW  
Array temperature: non-operational(8)  
40  
Absolute temperature delta between any point on the  
window edge and the ceramic test point TP1 (9)  
|TDELTA  
TDP  
|
30  
81  
°C  
°C  
Dew point temperature, operating and nonoperating  
(noncondensing)  
(1) Operation outside the Absolute Maximum Ratings may cause permanent device damage. Absolute Maximum Ratings do not imply  
functional operation of the device at these or any other conditions beyond those listed under Recommended Operating Conditions. If  
outside the Recommended Operating Conditions but within the Absolute Maximum Ratings, the device may not be fully functional, and  
this may affect device reliability, functionality, performance, and shorten the device lifetime.  
(2) All voltages are referenced to common ground VSS. VBIAS, VCC, VCCI, VOFFSET, and VRESET power supplies are all required for proper  
DMD operation. VSS must also be connected.  
(3) VOFFSET supply transients must fall within specified voltages.  
(4) Exceeding the recommended allowable voltage difference between VCC and VCCI may result in excessive current draw.  
(5) Exceeding the recommended allowable voltage difference between VBIAS and VOFFSET may result in excessive current draw.  
(6) Exceeding the recommended allowable voltage difference between VBIAS and VRESET may result in excessive current draw.  
(7) LVDS differential inputs must not exceed the specified limit or damage may result to the internal termination resistors.  
(8) The highest temperature of the active array (as calculated in 7.6 ) or of any location along the window edge as defined in 7-1.  
The locations of thermal test points TP2, TP3, TP4, and TP5 in 7-1 are intended to measure the highest window edge temperature.  
If a particular application causes another location on the window edge to be at a higher temperature, use that location.  
(9) Temperature delta is the highest difference between the ceramic test point 1 (TP1) and anywhere on the window edge as shown in 图  
7-1. The window test points TP2, TP3, TP4, and TP5 shown in 7-1 are intended to result in the worst case delta. If a particular  
application causes another location on the window edge to result in a larger delta temperature, use that location.  
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6.2 Storage Conditions  
Applicable for the DMD as a component or non-operating in a system  
MIN  
MAX  
80  
UNIT  
°C  
TDMD  
DMD storage temperature  
40  
TDP-AVG Average dew point temperature, (non-condensing) (1)  
28  
°C  
TDP-ELR Elevated dew point temperature range , (non-condensing) (2)  
28  
36  
°C  
CTELR  
Cumulative time in elevated dew point temperature range  
24 Months  
(1) The average over time (including storage and operating) that the device is not in the elevated dew point temperature range.  
(2) Limit the Exposure to dew point temperatures in the elevated range during storage and operation to less than a total cumulative time of  
CTELR  
.
6.3 ESD Ratings  
VALUE  
±2000  
±500  
UNIT  
Human-body model (HBM), per ANSI/ESDA/JEDEC JS-001(1)  
Charged device model (CDM), per ANSI/ESDA/JEDEC JS-002(2)  
V(ESD) Electrostatic discharge  
V
(1) JEDEC document JEP155 states that 500-V HBM allows safe manufacturing with a standard ESD control process.  
(2) JEDEC document JEP157 states that 250-V CDM allows safe manufacturing with a standard ESD control process.  
6.4 Recommended Operating Conditions  
Over operating free-air temperature range (unless otherwise noted). The functional performance of the device specified in  
this data sheet is achieved when operating the device within the limits defined by 6.4. No level of performance is implied  
when operating the device above or below 6.4 limits.  
MIN  
NOM  
MAX  
UNIT  
VOLTAGE SUPPLY  
VCC  
LVCMOS logic supply voltage(1)  
1.65  
1.65  
1.8  
1.8  
10  
1.95  
1.95  
10.5  
18.5  
13.5  
0.3  
V
V
V
V
V
V
V
V
VCCI  
LVCMOS LVDS Interface supply voltage(1)  
Mirror electrode and HVCMOS voltage(1) (2)  
Mirror electrode voltage(1)  
VOFFSET  
VBIAS  
VRESET  
9.5  
17.5  
18  
Mirror electrode voltage(1)  
14.5  
14  
0
Supply voltage delta (absolute value)(3)  
Supply voltage delta (absolute value)(4)  
Supply voltage delta (absolute value)(5)  
|VCC VCCI  
|VBIAS VOFFSET  
|VBIAS VRESET  
LVCMOS INTERFACE  
|
10.5  
33  
|
|
VIH(DC)  
DC input high voltage(6)  
0.7 × VCC  
0.3  
VCC + 0.3  
0.3 × VCC  
VCC + 0.3  
0.2 × VCC  
V
V
VIL(DC)  
DC input low voltage(6)  
AC input high voltage(6)  
AC input low voltage(6)  
PWRDNZ pulse width(7)  
VIH(AC)  
0.8 × VCC  
0.3  
V
VIL(AC)  
V
tPWRDNZ  
SCP INTERFACE  
ƒSCPCLK  
10  
ns  
SCP clock frequency(8)  
500  
900  
kHz  
ns  
Propagation delay, Clock to Q, from risingedge of SCPCLK  
tSCP_PD  
0
2
2
to valid SCPDO(9)  
Time between fallingedge of SCPENZ and the first rising  
edge of SCPCLK  
tSCP_NEG_ENZ  
tSCP_POS_ENZ  
µs  
µs  
Time between fallingedge of SCPCLK and the rising edge  
of SCPENZ  
tSCP_DS  
tSCP_DH  
SCPDI Clock Setup time (before SCPCLK falling edge)(9)  
SCPDI Hold time (after SCPCLK falling edge)(9)  
800  
900  
ns  
ns  
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6.4 Recommended Operating Conditions (continued)  
Over operating free-air temperature range (unless otherwise noted). The functional performance of the device specified in  
this data sheet is achieved when operating the device within the limits defined by 6.4. No level of performance is implied  
when operating the device above or below 6.4 limits.  
MIN  
NOM  
MAX  
UNIT  
tSCP_PW_ENZ  
LVDS INTERFACE  
ƒCLOCK  
SCPENZ inactive pulse width (high level)  
2
µs  
Clock frequency for LVDS interface (all channels), DCLK(10)  
Input differential voltage (absolute value)(11)  
Common mode voltage(11)  
400  
440  
MHz  
mV  
mV  
mV  
ns  
|VID|  
150  
1100  
880  
300  
VCM  
1200  
1300  
1520  
2000  
120  
VLVDS  
LVDS voltage(11)  
tLVDS_RSTZ  
ZIN  
Time required for LVDS receivers to recover from PWRDNZ  
Internal differential termination resistance  
Line differential impedance (PWB/trace)  
80  
90  
100  
100  
Ω
ZLINE  
110  
Ω
ENVIRONMENTAL  
Array temperature, long-term operational(12) (13) (14) (15)  
Array temperature, short-term operational(13) (16)  
Window temperature operational(17)  
10  
0
40 to 70(14)  
°C  
°C  
°C  
TARRAY  
10  
85  
TWINDOW  
Absolute Temperature delta between any point on the window  
edge and the ceramic test point TP1(17) (18)  
|TDELTA  
|
14  
°C  
TDP-AVG  
TDP-ELR  
CTELR  
ILLθ  
Average dew point temperature (non-condensing)(19)  
Elevated dew point temperature range (non-condensing)(20)  
Cumulative time in elevated dew point temperature range  
Illumination marginal ray angle(21)  
28  
36  
24  
55  
°C  
°C  
28  
Months  
deg  
For Illumination Source Between 420 nm and 700 nm  
ILLVIS  
Illumination power density on array(22)  
31  
W/cm2  
W
ILLVISTP  
Illumination total power on array  
39.3  
For Illumination Source <420 nm and >700 nm  
ILLIR  
Illumination Wavelengths > 700 nm  
Illumination Wavelengths < 420 nm(12)  
10  
10  
mW/cm2  
mW/cm2  
ILLUV  
(1) All voltages are referenced to common ground VSS. VBIAS, VCC, VCCI, VOFFSET, and VRESET power supplies are all required for  
proper DMD operation. VSS must also be connected.  
(2) VOFFSET supply transients must fall within specified max voltages.  
(3) To prevent excess current, the supply voltage delta |VCCI VCC| must be less than specified limit. See 9, 9-1, and 9-1.  
(4) To prevent excess current, the supply voltage delta |VBIAS VOFFSET| must be less than specified limit. See 9, 9-1, and 表  
9-1.  
(5) To prevent excess current, the supply voltage delta |VBIAS VRESET| must be less than specified limit. See 9, 9-1, and 9-1.  
(6) Tester Conditions for VIH and VIL.  
Frequency = 60-MHz Maximum Rise Time = 2.5 ns @ (20% 80%)  
Frequency = 60-MHz Maximum Fall Time = 2.5 ns @ (80% 20%)  
(7) PWRDNZ input pin resets the SCP and disables the LVDS receivers. PWRDNZ input pin overrides SCPENZ input pin and tristates the  
SCPDO output pin.  
(8) The SCP clock is a gated clock. Duty cycle must be 50% ± 10%. The SCP parameter is related to the frequency of DCLK.  
(9) See 6-2.  
(10) See the LVDS Timing Requirements in 6.8 and 6-6.  
(11) See 6-5 LVDS Waveform Requirements.  
(12) Simultaneous exposure of the DMD to the maximum 6.4 for temperature and UV illumination reduces device lifetime.  
(13) The array temperature cannot be measured directly and must be computed analytically from the temperature measured at test point 1  
(TP1) shown in 7-1 and the package thermal resistance 7.6.  
(14) Per 6-1, the maximum operational array temperature must be derated based on the micromirror landed duty cycle that the DMD  
experiences in the end application. See 7.7 for a definition of micromirror landed duty cycle.  
(15) Long-term is defined as the usable life of the device.  
(16) Array temperatures beyond those specified as long-term are recommended for short-term conditions only (power-up). Short-term is  
defined as cumulative time over the usable life of the device and is less than 500 hours.  
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(17) Temperature delta is the highest difference between the ceramic test point 1 (TP1) and anywhere on the window edge as shown in 图  
7-1. The window test points TP2, TP3, TP4 and TP5 shown in 7-1 are intended to result in the worst case delta temperature. If a  
particular application causes another location on the window edge to result in a larger delta temperature, use that location.  
(18) DMD is qualified at the maximum temperature specified. Operation of the DMD outside of these limits has not been tested.  
(19) The average over time (including storage and operating) that the device is not in the elevated dew point temperature range.  
(20) Limit exposure to dew point temperatures in the elevated range during storage and operation to less than a total cumulative time of  
CTELR  
.
(21) The maximum marginal ray angle of the incoming illumination light at any point in the micromirror array, including the pond of  
micromirrors (POM), cannot exceed 55 degrees from the normal to the device array plane. The device window aperture has not  
necessarily been designed to allow incoming light at higher maximum angles to pass to the micromirrors, and the device performance  
has not been tested nor qualified at angles exceeding this. Illumination light exceeding this angle outside the micromirror array  
(including POM) contributes to thermal limitations described in this document, and may negatively affect lifetime.  
(22) The maximum optical power that can be incident on the DMD is limited by the maximum optical power density and the micromirror  
array temperature.  
80  
70  
60  
50  
40  
30  
0/100  
100/0  
5/95 10/90 15/85 20/80 25/75 30/70 35/65 40/60 45/55 50/50  
65/35  
95/5  
90/10  
85/15  
80/20  
75/25  
70/30  
60/40  
55/45  
50/50  
Micromirror Landed Duty Cycle  
6-1. Max Recommended Array TemperatureDerating Curve  
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6.5 Thermal Information  
DLP670S  
FYR Package  
350 PINS  
0.60  
THERMAL METRIC  
UNIT  
Thermal resistance, active area to test point 1 (TP1)(1)  
°C/W  
(1) The DMD is designed to conduct absorbed and dissipated heat to the back of the package. The cooling system must be capable of  
maintaining the package within the temperature range specified in 6.4. The total heat load on the DMD is largely driven by the  
incident light absorbed by the active area; although other contributions include light energy absorbed by the window aperture and  
electrical power dissipation of the array. Optical systems must be designed to minimize the light energy falling outside the window clear  
aperture since any additional thermal load in this area can significantly degrade the reliability of the device.  
6.6 Electrical Characteristics  
Over operating free-air temperature range (unless otherwise noted)  
PARAMETER  
TEST CONDITIONS  
MIN  
TYP  
MAX  
UNIT  
OUTPUT VOLTAGES  
VOH  
High level output voltage  
Low level output voltage  
0.8 × VCC  
V
V
VCC = 1.8 V, IOH = 2 mA  
VOL  
VCC = 1.95 V, IOL = 2 mA  
0.2 × VCC  
25  
CURRENTS  
IOZ  
High impedance output current  
Low level input current  
VCC = 1.95 V  
µA  
µA  
40  
1  
IIL  
VCC = 1.95 V, VI = 0  
VCC = 1.95 V, VI = VCC  
VCC = 1.95 V  
IIH  
High level input current(1)  
Supply current VCC  
110  
1200  
330  
13  
µA  
ICC  
mA  
mA  
mA  
mA  
mA  
ICCI  
Supply current VCCI  
VCCI = 1.95 V  
IOFFSET  
IBIAS  
IRESET  
Supply current VOFFSET(2)  
Supply current VBIAS(2) (3)  
Supply current VRESET(3)  
VOFFSET = 10.5 V  
VBIAS = 18.5 V  
4  
9
VRESET = 14.5 V  
SUPPLY POWER  
PTOTAL Total Supply Power Dissipation  
3320  
mW  
(1) Applies to LVCMOS pins only. Excludes LVDS pins and test pad pins.  
(2) To prevent excess current, the supply voltage delta |VBIAS VOFFSET| must be less than the specified limit in 6.4.  
(3) To prevent excess current, the supply voltage delta |VBIAS VRESET| must be less than specified limit in 6.4.  
6.7 Capacitance at Recommended Operating Conditions  
over operating free-air temperature range (unless otherwise noted)  
PARAMETER  
TEST CONDITIONS  
MIN  
TYP  
MAX UNIT  
CI_lvds  
CI_nonlvds  
CI_tdiode  
CO  
LVDS Input Capacitance 2xLVDS  
Non-LVDS Input capacitance  
Temp Diode Input capacitance  
Output Capacitance  
20  
20  
30  
20  
pF  
pF  
pF  
pF  
ƒ= 1 MHz  
ƒ= 1 MHz  
ƒ= 1 MHz  
ƒ= 1 MHz  
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6.8 Timing Requirements  
MIN  
NOM  
MAX UNIT  
SCP(1)  
tr  
Rise time  
Fall time  
20% to 80% reference points  
80% to 20% reference points  
30  
30  
ns  
ns  
tf  
LVDS(2)  
tr  
Rise slew rate  
Fall slew rate  
Clock Cycle  
Clock Cycle  
Clock Cycle  
Clock Cycle  
Pulse Width  
Pulse Width  
Pulse Width  
Pulse Width  
Setup Time  
Setup Time  
Setup Time  
Setup Time  
Setup Time  
Setup Time  
Setup Time  
Setup Time  
Hold Time  
20% to 80% reference points  
80% to 20% reference points  
DCLK_A, LVDS pair  
0.7  
0.7  
1
1
V/ns  
V/ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
ns  
tf  
tC  
2.5  
tC  
DCLK_B, LVDS pair  
2.5  
tC  
DCLK_C, LVDS pair  
2.5  
tC  
DCLK_D, LVDS pair  
2.5  
tW  
DCLK_A LVDS pair  
1.19  
1.25  
1.25  
1.25  
1.25  
tW  
DCLK_B LVDS pair  
1.19  
tW  
DCLK_C LVDS pair  
1.19  
tW  
DCLK_D LVDS pair  
1.19  
tSu  
tSu  
tSu  
tSu  
tSu  
tSu  
tSu  
tSu  
th  
D_A(15:0) before DCLK_A, LVDS pair  
D_B(15:0) before DCLK_B, LVDS pair  
D_C(15:0) before DCLK_C, LVDS pair  
D_D(15:0) before DCLK_D, LVDS pair  
SCTRL_A before DCLK_A, LVDS pair  
SCTRL_B before DCLK_B, LVDS pair  
SCTRL_C before DCLK_C, LVDS pair  
SCTRL_D before DCLK_D, LVDS pair  
D_A(15:0) after DCLK_A, LVDS pair  
D_B(15:0) after DCLK_B, LVDS pair  
D_C(15:0) after DCLK_C, LVDS pair  
D_D(15:0) after DCLK_D, LVDS pair  
SCTRL_A after DCLK_A, LVDS pair  
SCTRL_B after DCLK_B, LVDS pair  
SCTRL_C after DCLK_C, LVDS pair  
SCTRL_D after DCLK_D, LVDS pair  
0.325  
0.325  
0.325  
0.325  
0.325  
0.325  
0.325  
0.325  
0.145  
0.145  
0.145  
0.145  
0.145  
0.145  
0.145  
0.145  
th  
Hold Time  
th  
Hold Time  
th  
Hold Time  
th  
Hold Time  
th  
Hold Time  
th  
Hold Time  
th  
Hold Time  
LVDS(2)  
tSKEW  
tSKEW  
Skew Time  
Skew Time  
Channel B relative to Channel A(3) (4), LVDS pair  
Channel D relative to Channel C(5) (6), LVDS pair  
+1.25  
+1.25  
ns  
ns  
1.25  
1.25  
(1) See 6-3 for Rise Time and Fall Time for SCP.  
(2) See 6-5 for Timing Requirements for LVDS.  
(3) Channel A (Bus A) includes the following LVDS pairs: DCLK_AN and DCLK_AP, SCTRL_AN and SCTRL_AP, D_AN(15:0) and  
D_AP(15:0).  
(4) Channel B (Bus B) includes the following LVDS pairs: DCLK_BN and DCLK_BP, SCTRL_BN and SCTRL_BP, D_BN(15:0) and  
D_BP(15:0).  
(5) Channel C (Bus C) includes the following LVDS pairs: DCLK_CN and DCLK_CP, SCTRL_CN and SCTRL_CP, D_CN(15:0) and  
D_CP(15:0).  
(6) Channel D (Bus D) includes the following LVDS pairs: DCLK_DN and DCLK_DP, SCTRL_DN and SCTRL_DP, D_DN(15:0) and  
D_DP(15:0).  
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t
t
SCP_NEG_ENZ  
SCP_POS_ENZ  
SCPENZ  
50%  
50%  
...  
t
t
SCP_DS  
SCP_DH  
...  
...  
SCPDI  
DI  
tC  
50%  
50%  
...  
50%  
50%  
tSCP_PD  
50%  
50%  
50%  
SCPCLK  
SCPDO  
...  
...  
DO  
6-2. SCP Timing Requirements  
A. See 6.4 for fSCPCLK, tSCP_DS, tSCP_DH and tSCP_PD specifications.  
B. SCPCLK fallingedge capture for SCPDI.  
C. SCPCLK risingedge launch for SCPDO.  
D. See 方程1.  
1
fSCPCLK  
=
tC  
(1)  
SCPCLK, SCPDI,  
SCPDO, SCPENZ  
100%  
80%  
20%  
0%  
tf  
tr  
Time  
6-3. SCP Requirements for Rise and Fall  
See 6.8 for tr and tf specifications and conditions.  
Device pin  
output under test  
Tester channel  
CLOAD  
6-4. Test Load Circuit for Output Propagation Measurement  
For output timing analysis, the tester pin electronics and its transmission line effects must be taken into account.  
System designers must use IBIS or other simulation tools to correlate the timing reference load to a system  
environment.  
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t
f
V
LVDS(max)  
V
V
ID  
CM  
V
LVDS(min)  
t
r
A. See 方程2 and 方程3 .  
6-5. LVDS Waveform Requirements  
1
VLVDS max = V  
:
; + , × V  
,
;
ID max  
;
:
CM max  
:
2
(2)  
(3)  
1
VLVDS min = V  
:
; F , × V  
,
;
ID max  
;
:
CM min  
:
2
See 6.4 for VCM, VID, and VLVDS specifications and conditions.  
t
C .  
t
t
W .  
W .  
DCLK_P  
DCLK_N  
50%  
t
t
t
t
H.  
H.  
t
t
t
t
SU.  
SU.  
D_P(15:0)  
D_N(15:0)  
50%  
50%  
H.  
H.  
SU.  
SU.  
SCTRL_P  
SCTRL_N  
6-6. Timing Requirements  
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DCLK_P  
DCLK_N  
50%  
D_P(15:0)  
D_N(15:0)  
SCTRL_P  
SCTRL_N  
50%  
50%  
t
SKEW .  
DCLK_P  
50%  
DCLK_N  
D_P(15:0)  
D_N(15:0)  
SCTRL_P  
SCTRL_N  
50%  
50%  
6-7. LVDS Interface Channel Skew Definition  
See 6.8 for timing requirements and LVDS pairs per channel (bus) defining D_P(15:0) and D_N(15:0).  
6.9 Typical Characteristics  
When the DMD is controlled by the DLPC900, the digital controller has four modes of operation:  
A. Video mode  
B. Video pattern mode  
C. Pre-stored pattern mode  
D. Pattern on-the-fly mode  
In video mode (A), the 24-bit frames displayed on the DMD are the same as the 24-bit video input source and  
frame rates. In video pattern mode (B), the VSYNC rates displayed on the DMD are linked to the incoming video  
source VSYNC rates but the overall pattern rates depend upon the configured bit depth. In modes B, C, and D,  
the pattern rates depend on the bit depth as shown in 6-1.  
6-1. DLP670S Pattern Rate versus Bit Depth using DLPC900  
PRE-STORED or PATTERN  
ON-THE-FLY MODE (Hz)  
BIT DEPTH  
VIDEO PATTERN MODE (Hz)  
1
2
3
4
5
6
7
8
2880  
1440  
960  
720  
480  
480  
360  
247  
9523  
2915  
2283  
1302  
769  
672  
500  
247  
6.10 System Mounting Interface Loads  
6-2. System Mounting Interface Loads  
PARAMETER  
MIN  
NOM  
MAX  
UNIT  
When loads are applied to the electrical and thermal interface area  
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6-2. System Mounting Interface Loads (continued)  
PARAMETER  
MIN  
NOM  
MAX  
111  
UNIT  
N
Maximum load to be applied to the electrical interface area(1)  
Maximum load to be applied to the thermal interface area(1)  
When a load is applied to only the electrical interface area  
Maximum load to be applied to the electrical interface area(1)  
Maximum load to be applied to the thermal interface area(1)  
111  
N
222  
0
N
N
(1) Apply the load uniformly in the corresponding areas shown in 6-8.  
Electrical Interface Area  
Thermal Interface Area  
6-8. System Mounting Interface Loads  
6.11 Micromirror Array Physical Characteristics  
6-3. Micromirror Array Physical Characteristics  
PARAMETER DESCRIPTION  
VALUE  
2716  
1600  
5.4  
UNIT  
Number of active columns(1)  
Number of active rows (1)  
M
micromirrors  
micromirrors  
µm  
N
Micromirror (pixel) pitch (1)  
P
Micromirror active array width (1)  
Micromirror active array height (1)  
Micromirror pitch × number of active columns  
Micromirror pitch × number of active rows  
14.6664  
8.6400  
20  
mm  
mm  
Micromirror active border (All four sides)(2)  
Pond of micromirrors (POM)  
micromirrors / side  
(1) See 6-9.  
(2) The structure and qualities of the border around the active array includes a band of partially functional micromirrors referred to as the  
pond of mirrors (POM). These micromirrors are structurally and electrically prevented from tilting toward the bright or ON state but still  
require an electrical bias to tilt toward the OFF state.  
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Off-State  
Light Path  
0
1
2
3
Active Micromirror Array  
M x N Micromirrors  
N x P  
Nœ 4  
Nœ 3  
Nœ 2  
Nœ 1  
M x P  
P
Incident  
Illumination  
Light Path  
P
P
Pond Of Micromirrors (POM) omitted for clarity.  
Details omitted for clarity. Not to scale.  
P
6-9. Micromirror Array Physical Characteristics  
Refer to 6.11 table for M, N, and P specifications.  
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6.12 Micromirror Array Optical Characteristics  
6-4. Micromirror Array Optical Characteristics  
PARAMETER  
Mirror tilt angle (1) (2) (3) (4)  
Micromirror crossover time (5)  
Micromirror switching time (6)  
TEST CONDITION  
MIN  
NOM  
17.5  
1
MAX  
18.4  
3
UNIT  
Landed State  
15.6  
degrees  
Typical Performance  
Typical Performance  
Adjacent micromirrors  
Non-Adjacent micromirrors  
420 nm 700 nm  
µS  
10  
0
Number of out-of-specification  
micromirrors (7)  
micromirrors  
10  
DMD Photopic Efficiency(8)  
65%  
(1) Measured relative to the plane formed by the overall micromirror array  
(2) Represents the variation that can occur between any two individual micromirrors, located on the same device or located on different  
devices.  
(3) For some applications, it is critical to account for the micromirror tilt angle variation in the overall system optical design. With some  
system optical designs, the micromirror tilt angle variation within a device may result in perceivable nonuniformities in the light field  
reflected from the micromirror array. With some system optical designs, the micromirror tilt angle variation between devices may result  
in colorimetry variations, system efficiency variations, system contrast variations, and optical power variations.  
(4) When the micromirror array is landed (not parked), the tilt direction of each individual micromirror is dictated by the binary contents of  
the CMOS memory cell associated with each individual micromirror. A binary value of 1 results in a micromirror landing in the ON State  
direction. A binary value of 0 results in a micromirror landing in the OFF State direction. See 6-10.  
(5) The time required for a micromirror to nominally transition from one landed state to the opposite landed state.  
(6) The minimum time between successive transitions of a micromirror.  
(7) An out-of-specification micromirror is defined as a micromirror that is unable to transition between the two landed states within the  
specified micromirror switching time.  
(8) Efficiency numbers assume 35-degree illumination angle, F/2.4 illumination and collection cones, uniform source spectrum, and  
uniform pupil illumination.  
Window Transmission 94% (double Pass, Through Two Window Surfaces)  
Micromirror Reflectivity 88%  
Array Diffraction Efficiency 84% (@f/2.4)  
Array Fill Factor 93%  
Efficiency numbers assume 100% electronic mirror duty cycle and do not include optical overfill loss. Note that this number is specified  
under conditions described above and deviations from the specified conditions result in decreased efficiency.  
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Off-State  
Light Direction  
Incident  
Light Direction  
B
Tilted Rotation  
Axis  
Tilted Mirror  
On-State  
Mirror  
Landed Edge  
Landed Edge  
Tilt Angle  
Off-State  
Mirror  
B
View B-B  
On-State Mirror - Tilted Position  
Landed Edge  
A
A
Tilt Angle  
Tilted Mirror  
Landed Edge  
View A-A  
Off-State Mirror - Tilted Position  
6-10. Micromirror Landed Orientation and Tilt  
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6.13 Window Characteristics  
6-5. DMD Window Characteristics  
CONDITIONS  
PARAMETER(1)  
MIN  
NOM MAX UNIT  
Window material  
Corning Eagle XG  
at wavelength 546.1 nm  
See Note (2)  
Window refractive index  
Window aperture  
Illumination overfill  
1.5119  
Refer to 7.5.3  
Minimum within the wavelength range 420 nm to 680 nm.  
Applies to all angles 0° to 30° AOI.  
97%  
97%  
Window transmittance, singlepass  
through both surfaces and glass (3)  
Average over the wavelength range 420 nm to 680 nm.  
Applies to all angles 30° to 45° AOI.  
(1) See 7.5 for more information.  
(2) For details on the size and location of the window aperture, see the Mechanical ICD in the Mechanical, Packaging, and Orderable  
Information section of this data sheet.  
(3) See the TI Wavelength Transmittance Considerations for DLP® DMD Window Application Note.  
6.14 Chipset Component Usage Specification  
Reliable function and operation of the DLP670S DMD requires that it be used in conjunction with the other  
components of the applicable DLP chipset, including those components that contain or implement TI DMD  
control technology. TI DMD control technology is the TI technology and devices for operating or controlling a  
DLP DMD.  
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7 Detailed Description  
7.1 Overview  
The DLP670S DMD is a 0.67-inch diagonal spatial light modulator which consists of an array of highly reflective  
aluminum micromirrors. The DMD is an electrical input, optical output micro-electrical-mechanical system  
(MEMS). The input data electrical interface is Low Voltage Differential Signaling (LVDS). The DMD consists of a  
two-dimensional array of 1-bit CMOS memory cells. The array is organized in a grid of M memory cell columns  
by N memory cell rows. Refer to the 7.2 . The positive or negative deflection angle of the micromirrors can be  
individually controlled by changing the address voltage of underlying CMOS addressing circuitry and micromirror  
reset signals (MBRST).  
The DMD is one part of a chipset comprising of the DLP670S DMD and the DLPC900 Controller. To ensure  
reliable operation, the DLPC900 Controller must always be used to control the DLP670S DMD.  
7.2 Functional Block Diagram  
Channel A Interface  
Column Read and Write  
Control  
Control  
(0,0)  
Voltages  
Word Lines  
Voltage  
Generators  
Micromirror Array  
Row  
(M-1, N-1)  
Column Read and Write  
Channel B Interface  
Control  
Control  
Channels C and D not shown. For pin details on Channels A, B, C, and D, refer to 5 and LVDS Interface section of 6.8.  
RESET_CTRL is used in applications when an external reset signal is required.  
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7.3 Feature Description  
7.3.1 Power Interface  
The DMD requires five DC voltages: DMD_P3P3V, DMD_P1P8V, VOFFSET, VRESET, and VBIAS.  
DMD_P3P3V is a filtered version of the 3.3-V (P3P3V) supply received over the cables from the DLPC900  
Controller Board. DMD_P3P3V is used on the DMD Board to create the other DMD voltages (DMD_P1P8V,  
VOFFSET, VRESET, and VBIAS) required for proper DMD operation. TI provides a DMD board reference design  
on TI.com to enable customers to see how these voltages are created as well and how the DMD board design is  
accomplished.  
7.3.2 Timing  
The data sheet provides timing at the device pin. For output timing analysis, the tester pin electronics and its  
transmission line effects must be considered. 6-4 shows an equivalent test load circuit for the output under  
test. Timing reference loads are not intended as a precise representation of any particular system environment  
or depiction of the actual load presented by a production test. System designers must use IBIS or other  
simulation tools to correlate the timing reference load to a system environment. The load capacitance value  
stated is only for characterization and measurement of AC timing signals. This load capacitance value does not  
indicate the maximum load the device is capable of driving.  
7.4 Device Functional Modes  
DMD functional modes are controlled by the DLPC900 Controller. See the DLPC900 Controller data sheet or  
contact a TI applications engineer.  
7.5 Optical Interface and System Image Quality  
备注  
TI assumes no responsibility for image quality artifacts or DMD failures caused by optical system  
operating conditions exceeding limits described previously.  
TI assumes no responsibility for end-equipment optical performance. Achieving the desired end-equipment  
optical performance involves making trade-offs between numerous component and system design parameters.  
Optimizing system optical performance and image quality strongly relate to optical system design parameter  
trades. Although it is not possible to anticipate every conceivable application, the projected image quality and the  
optical performance are contingent on compliance to the optical system operating conditions described in the  
following sections.  
7.5.1 Numerical Aperture and Stray Light Control  
The angle defined by the numerical aperture of the illumination and projection optics at the DMD optical area  
needs to be the same. This angle cannot exceed the nominal device micromirror tilt angle unless appropriate  
apertures are added in the illumination and projection pupils to block out flat-state and stray light from the  
projection lens. The micromirror tilt angle defines DMD capability to separate the "ON" optical path from any  
other light path, including undesirable flat-state specular reflections from the DMD window, DMD border  
structures, or other system surfaces near the DMD such as prism or lens surfaces. If the numerical aperture  
exceeds the micromirror tilt angle, or if the projection numerical aperture angle is more than two degrees larger  
than the illumination numerical aperture angle, objectionable artifacts may occur in the projected image border  
region or active area.  
7.5.2 Pupil Match  
TIs optical and image quality specifications assume that the exit pupil of the illumination optics is nominally  
centered within 2° of the entrance pupil of the projection optics. Misalignment of pupils can create objectionable  
artifacts in the projected images border region and active area, which may require additional system apertures  
to control, especially if the numerical aperture of the system exceeds the pixel tilt angle.  
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7.5.3 Illumination Overfill  
The active area of the device is surrounded by an aperture on the inside DMD window surface that masks  
structures of the DMD chip assembly from normal view, and is sized to anticipate several optical operating  
conditions. Overfill light illuminating the window aperture can create reflections from the edge of the window  
aperture opening that may corrupt the intended projected image. Design the illumination optical system to limit  
light flux incident anywhere on the window aperture from exceeding approximately 10% of the average flux level  
in the active area. Depending on the particular system optical architecture, overfill light may have to be further  
reduced below the suggested 10% level in order for the projected image to be acceptable.  
7.6 Micromirror Array Temperature Calculation  
Array  
TP2  
2X 17.0  
TP4  
TP5  
2X 18.7  
Window Edge  
TP3  
TP3 (TP2)  
(4 surfaces)  
TP5  
TP4  
TP1  
8.6  
17.5  
TP1  
7-1. DMD Thermal Test Points  
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Micromirror array temperature can be computed analytically from measurement points on the outside of the  
package, the package thermal resistance, the electrical power, and the illumination heat load. The relationship  
between micromirror array temperature and the reference ceramic temperature is provided by the following  
equations:  
TARRAY = TCERAMIC + (QARRAY × RARRAY-TO-CERAMIC  
)
QARRAY = QELECTRICAL + QILLUMINATION  
where  
TARRAY = Computed array temperature (°C)  
TCERAMIC = Measured ceramic temperature (°C) (measured at TP1 location)  
RARRAY-TO-CERAMIC = Thermal resistance of package specified in Thermal Information from array to ceramic  
TP1 (°C/Watt)  
QARRAY = Total DMD power on the array (W) (electrical + absorbed)  
QELECTRICAL = Nominal electrical power (W)  
QILLUMINATION = Illumination power absorbed (W)  
The electrical power dissipation of the DMD is variable and depends on the voltages, data rates, and operating  
frequencies. A nominal electrical power dissipation to use when calculating array temperature is 3.32 W. The  
absorbed power from the illumination source is variable and depends on the operating state of the micromirrors  
and the intensity of the light source. The factors used in determining the illumination power absorbed is shown in  
each of the examples below. Examples are included where the optical power has been determined by measuring  
the illumination power density, total illumination power, and screen lumens. The examples assume illumination  
distribution is 83.7% on the active array and 16.3% on the area outside the array.  
7.6.1 Micromirror Array Temperature Calculation using Illumination Power Density  
The equations below are valid for each DMD in a single chip or multi-chip DMD system.  
QILLUMINATION = (QINCIDENT × DMD average thermal absorptivity) (W)  
QINCIDENT = ILLDENSITY × ILLAREA (W)  
ILLDENSITY = measured illumination optical power density at DMD (W/cm2)  
ILLAREA = illumination area on DMD (cm2)  
DMD average thermal absorptivity = 0.40  
QELECTRICAL = 3.32 W  
Array size = 14.6664 mm × 8.6400 mm = 1.267 cm2  
ILLDENSITY = 31 W/cm2 (measured)  
TCERAMIC = 50.0 °C (measured)  
ILLAREA = 1.267 cm2 / (83.7%) = 1.512 cm2  
QINCIDENT = 31 W/cm2 × 1.512 cm2 =46.9 W  
QARRAY = 3.32 W + (46.9 W × 0.40) = 22.1 W  
TARRAY = 50.0 °C + (22.1 W × 0.60 °C/W) = 63.3 °C  
7.6.2 Micromirror Array Temperature Calculation using Total Illumination Power  
The equations below are valid for each DMD in a single chip or multi-chip DMD system.  
QILLUMINATION = (QINCIDENT × DMD average thermal absorptivity) (W)  
QINCIDENT = measured total illumination optical power at DMD (W)  
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DMD average thermal absorptivity = 0.40  
QELECTRICAL = 3.32 W  
QINCIDENT = 46.9 W (measured)  
TCERAMIC = 50.0 °C (measured)  
QARRAY = 3.32 W + (46.9 W × 0.40) = 22.1 W  
TARRAY = 50.0 °C + (22.1 W × 0.60 °C/W) = 63.3 °C  
7.6.3 Micromirror Array Temperature Calculation using Screen Lumens  
The equations below are valid for a single chip DMD system with spectral efficiency of 300 lumens/Watt.  
QILLUMINATION = SL × CL2W (W)  
SL = measured ANSI screen lumens (lm)  
CL2W = Conversion constant for screen lumens to power absorbed on DMD (Watts/Lumen)  
QELECTRICAL = 3.32 W  
CL2W = 0.00266 W/lm  
SL = 7000 lm (measured)  
TCERAMIC = 50.0 °C (measured)  
QARRAY = 3.32 W + (0.00266 W/lm × 7000 lm) = 21.94 W  
TARRAY = 50.0 °C + (21.94 W × 0.60 °C/W) = 63.2 °C  
7.7 Micromirror Landed-On/Landed-Off Duty Cycle  
7.7.1 Definition of Micromirror Landed-On/Landed-Off Duty Cycle  
The micromirror landed-on/landed-off duty cycle (landed duty cycle) denotes the amount of time (as a  
percentage) that an individual micromirror is landed in the On state versus the amount of time the same  
micromirror is landed in the Off state.  
As an example, a landed duty cycle of 100/0 indicates that the referenced pixel is in the On state 100% of the  
time and in the Off state 0% of the time. Additionally, a landed duty cycle of 0/100 indicates that the pixel is in the  
Off state 100% of the time and in the On state 0% of the time. Likewise, 50/50 indicates that the pixel is On 50%  
of the time and Off 50% of the time.  
备注  
When assessing landed duty cycle, the time spent switching from one state (ON or OFF) to the other  
state (OFF or ON) is considered negligible and is thus ignored.  
Since a micromirror can only be landed in one state or the other (On or Off), the two numbers (percentages)  
always add to 100.  
7.7.2 Landed Duty Cycle and Useful Life of the DMD  
Knowing the long-term average landed duty cycle (of the end product or application) is important because  
subjecting all (or a portion) of the DMD micromirror array (also called the active array) to an asymmetric landed  
duty cycle for a prolonged period of time can reduce the DMD usable life.  
Note that it is the symmetry or asymmetry of the landed duty cycle that is of relevance. The symmetry of the  
landed duty cycle is determined by how close the two numbers (percentages) are to being equal. For example, a  
landed duty cycle of 50/50 is perfectly symmetrical whereas a landed duty cycle of 100/0 or 0/100 is perfectly  
asymmetrical.  
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7.7.3 Landed Duty Cycle and Operational DMD Temperature  
Operational DMD temperature and landed duty cycle interact to affect the DMD usable life, and this interaction  
can be exploited to reduce the impact that an asymmetrical landed duty cycle has on the DMD usable life. This is  
quantified in the derating curve shown in 6-1. The importance of this curve is that:  
All points along this curve represent the same usable life.  
All points above this curve represent lower usable life (and the further away from the curve, the lower the  
usable life).  
All points below this curve represent higher usable life (and the further away from the curve, the higher the  
usable life).  
In practice, this curve specifies the maximum operating DMD temperature that the DMD operates at for a given  
long-term average landed duty cycle.  
7.7.4 Estimating the Long-Term Average Landed Duty Cycle of a Product or Application  
During a given period of time, the Landed Duty Cycle of a given pixel follows from the input image content being  
displayed by that specific pixel regardless if the illumination is turned on or off.  
For example, in the simplest case, when displaying pure-white on a given pixel for a given time period, that pixel  
experiences a 100/0 Landed Duty Cycle during that time period. Likewise, when displaying pure-black, the pixel  
experiences a 0/100 Landed Duty Cycle.  
If the use case involves inputting grayscale (8-bit) input images, between the two extremes (ignoring for the  
moment color and any image processing that may be applied to an incoming image), the Landed Duty Cycle  
tracks one-to-one with the grayscale value, as shown in 7-1.  
7-1. Grayscale Value and Landed Duty Cycle  
Grayscale Value  
Landed Duty Cycle  
0%  
0/100  
10%  
10/90  
20%  
20/80  
30%  
30/70  
40%  
40/60  
50%  
50/50  
60%  
60/40  
70%  
70/30  
80%  
80/20  
90%  
90/10  
100%  
100/0  
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Accounting for color rendition (but still ignoring image processing) requires knowing both the color intensity (from  
0% to 100%) for each constituent primary color (red, green, and blue) for the given pixel as well as the color  
cycle time for each primary color, where color cycle timeis the total percentage of the frame time that a  
given primary must be displayed in order to achieve the desired white point.  
During a given period of time, the landed duty cycle of a given pixel can be calculated as follows:  
Landed Duty Cycle = (Red_Cycle_% × Red_Scale_Value) + (Green_Cycle_% × Green_Scale_Value) +  
(Blue_Cycle_% × Blue_Scale_Value)  
Where  
Red_Cycle_%, Green_Cycle_%, and Blue_Cycle_%, represent the percentage of the frame time that Red,  
Green, and Blue are displayed (respectively) to achieve the desired white point. (1)  
For example, assume that the red, green, and blue color cycle times are 50%, 20%, and 30% respectively (in  
order to achieve the desired white point), then the Landed Duty Cycle for various combinations of red, green,  
blue color intensities are as shown in 7-2 and 7-3.  
7-2. Example Landed Duty Cycle for Full-Color, Color Percentage  
Red Cycle Percentage  
Green Cycle Percentage  
Blue Cycle Percentage  
50%  
20%  
30%  
7-3. Example Landed Duty Cycle for Full-Color  
Red Scale Value  
Green Scale Value  
Blue Scale Value  
Landed Duty Cycle  
0/100  
0%  
100%  
0%  
0%  
0%  
0%  
0%  
50/50  
100%  
0%  
0%  
20/80  
0%  
100%  
0%  
30/70  
12%  
0%  
0%  
6/94  
35%  
0%  
0%  
7/93  
0%  
60%  
0%  
18/82  
100%  
0%  
100%  
100%  
0%  
70/30  
100%  
100%  
0%  
50/50  
100%  
12%  
0%  
80/20  
35%  
35%  
0%  
13/87  
60%  
60%  
100%  
25/75  
12%  
100%  
24/76  
100%  
100/0  
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8 Application and Implementation  
备注  
以下应用部分中的信息不属TI 器件规格的范围TI 不担保其准确性和完整性。TI 的客 户应负责确定  
器件是否适用于其应用。客户应验证并测试其设计以确保系统功能。  
8.1 Application Information  
The DMD is a spatial light modulator, which reflects incoming light from an illumination source to one of two  
directions, with the primary direction being into a projection or collection optic. Each application is derived  
primarily from the optical architecture of the system and the format of the data being used.  
The DLP670S DMD is controlled by two DLPC900 controllers. The DMD itself receives bit planes through a  
2xLVDS input data bus and, when input control commands dictate, activates the controls which update the  
mechanical state of the DMD mirrors. In combination with the DLPC900 Controllers, the chipset enables four  
unique modes of system level operation:  
Video Mode - 24 bit video signals presented to inputs of the DLPC900 Controllers appear on the DMD. The  
DMD mirrors are updated in a PWM fashion to construct the 24 bit video data. This mode is similar to  
standard DLP Display projector use cases.  
Video Pattern Mode - the user can define periods of time for specific patterns to be displayed on the DMD.  
Those patterns are provided via the input video interface and are constrained to input video timing  
parameters. This mode is optimal for when the data to be presented is not known in advance of operation, or  
input data needs to be streamed or updated based on real-time processing conditions.  
Pre-stored Pattern Mode - the user can define the patterns in advance and build the pattern data into an on-  
board flash memory. Upon power up, the DLPC900 controllers immediately start reading and displaying those  
patterns. This mode is typically used in applications where the patterns to be used are known in advance and  
the patterns can all fit in the external flash memory. This mode typically provides the fastest pattern update  
rates.  
Pattern-on-the-Fly Pattern Mode - the user can download and update pattern data over the DLPC900 input  
USB data interface. This allows an external processor to modify and update patterns based on external  
processing decisions. This mode also provides streaming capability similar to the Video Pattern Mode except  
that the user will need to take into account delays involved with USB transmission of pattern data and control  
information.  
The DLP670S provides solutions for many varied applications including structured light (3-D machine vision), 3-  
D printing, information projection, and lithography.  
The DLP670S contains the most recent breakthrough micromirror technology called the TRP pixel. With a  
smaller pixel pitch of 5.4 μm and increased tilt angle of 17.5 degrees nominal, TRP chipsets enable higher  
resolution in a smaller form factor while maintaining high optical efficiency. DLP chipsets are a great fit for any  
system that requires high resolution and high output projection imaging.  
8.2 Typical Application  
3D machine vision is a typical embedded system applications for the DLP670S DMD. In this application, two  
DLPC900 devices control the pattern data being imaged from a DLP670S DMD onto the object being measured  
while an external camera system monitors the projected patterns as they appear on the object. An external  
microprocessor can then geometrically determine all 3D points of the object using the knowledge of the  
projected pattern provided to the object, the actual distorted pattern as captured by the camera, and the angle  
between the projector line-of-sight and the camera line-of-sight. This type of application diagram is shown in 图  
8-1. In this configuration, the DLPC900 controller supports a 24-bit parallel RGB video input from an external  
source computer or processor. The video input FPGA splits each 2716 x 1600 image frame into a left half and a  
right half with the left half feeding the primary DLPC900 and the right half feeding the secondary DLPC900. Each  
half consists of 1358 columns x 1600 rows plus any horizontal and vertical blanking at half the pixel clock rate.  
This system configuration supports still and motion video as well as sequential pattern modes. For more  
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information, refer to the DLPC900 digital controller data sheet found on the DLPC900 Product Folder listed  
under 11.3.1.  
8-1. Typical DLP670S Application Diagram  
8.2.1 Design Requirements  
At the high level, typical DLP670S DMD systems include an illumination source (Lamp, LED, or Laser), an  
optical light engine containing both illumination and projection optics, mechanics, electronic components, power  
supplies, cooling systems, and software. The designer must first choose an illumination source and design the  
optical engine taking into consideration the optical relationship from the illumination source to the DMD, and from  
the DMD to the location of the projected image. The designer must then understand the electronic components  
of a DLP670S DMD system, part of which includes one or more PCBs which contain the DMD and Controllers.  
In the TI DLP670S based evaluation module design, the DLPC900 Controller board provides power, bit plane  
data, and control information to the DMD mounted on the DLP670S DMD board. The DLPC900 Controller board  
also interfaces to the user system, accepting image data based on user provided timing (software or hardware  
triggered) and providing that data in bit plane format to the DMD to be projected on the imaging target.  
8.2.2 Detailed Design Procedure  
A TI evaluation module design exists which shows how to connect the DLPC900 controller to the DMD. In  
creating a new board specific to a customer application, layout guidelines need to be followed to achieve a  
functional and reliable projection system. To complete the system, an optical module or light engine is required  
that contains the DLP670S DMD, associated illumination sources, optical elements, and necessary mechanical  
components. Care must be taken to understand and implement wise design decisions regarding the engineering  
aspects of illumination and projection optics, digital and analog electronics, software, and mechanical and  
thermal design principles.  
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8.3 DMD Die Temperature Sensing  
The DMD features a built-in thermal diode that measures the temperature at one corner of the die outside the  
micromirror array. The DMD thermal diode pins E16 and E17 can be connected to the TMP411 temperature  
sensor as shown in 8-2, and an external processor can interface with the TMP411 temperature sensor over  
I2C bus to allow monitoring of the DMD temperature. This temperature data can be leveraged to incorporate  
additional functionality in the overall system design such as adjusting illumination power, cooling fan speeds,  
TEC current inputs, and so forth, all with the idea of maintaining appropriate temperature control of the DMD.  
3.3V  
R1  
R2  
TMP411  
DLP670S  
SCL  
VCC  
D+  
R3  
R5  
TEMP_P  
SDA  
ALERT  
THERM  
GND  
C1  
R4  
R6  
D-  
TEMP_N  
GND  
A. Details omitted for clarity, see the DLPLCR67EVM evaluation module design for connections.  
B. See the TMP411 datasheet for system board layout recommendation.  
C. See the TMP411 datasheet and the DLPLCR67EVM design for suggested component values for R1, R2, R3, R4, and C1.  
D. R5 = 0 Ω. R6 = 0 Ω. 0-resistors need to be located close to the DMD package pins.  
8-2. TMP411 Sample Schematic  
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9 Power Supply Recommendations  
The following power supplies are all required to operate the DMD:  
VSS  
VCC  
VCCI  
VBIAS  
VOFFSET  
VRESET  
DMD power-up and power-down sequencing is very important. Sequencing is controlled by the DLPC900  
Controller and through the DMD power supply design.  
CAUTION  
For reliable operation of the DMD, the following power supply sequencing requirements must be  
followed. Failure to adhere to any of the prescribed power-up and power-down requirements may  
affect device reliability. See 9-1 in 9.2 .  
VBIAS, VCC, VCCI, VOFFSET, and VRESET power supplies must be coordinated during power-up  
and power-down operations. Failure to meet any of the below requirements results in a significant  
reduction in the DMD reliability and lifetime. Common ground VSS must also be connected.  
9.1 DMD Power Supply Power-Up Procedure  
During power-up, VCC and VCCI must always start and settle before VOFFSET plus Delay1 specified in 表  
9-1, VBIAS, and VRESET voltages are applied to the DMD.  
During power-up, it is a strict requirement that the voltage delta between VBIAS and VOFFSET must be  
within the specified limit shown in 6.4.  
During power-up, there is no requirement for the relative timing of VRESET with respect to VBIAS.  
Power supply slew rates during power-up are flexible, provided that the transient voltage levels follow the  
requirements specified in 6.1, in 6.4, and in 9-1.  
During power-up, LVCMOS input pins must not be driven high until after VCC and VCCI have settled at  
operating voltages listed in 6.4.  
9.2 DMD Power Supply Power-Down Procedure  
During power-down, VCC and VCCI must be supplied until after VBIAS, VRESET, and VOFFSET are  
discharged to within the specified limit of ground. See 9-1.  
During power-down, it is a strict requirement that the voltage delta between VBIAS and VOFFSET must be  
within the specified limit shown in 6.4.  
During power-down, there is no requirement for the relative timing of VRESET with respect to VBIAS.  
Power supply slew rates during power-down are flexible, provided that the transient voltage levels follow the  
requirements specified in 6.1, in 6.4 , and in 9-1.  
During power-down, LVCMOS input pins must be less than specified in 6.4.  
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9-1. DMD Power Supply Requirements  
A. See 6.4 , and the Pin Functions 5-1.  
B. To prevent excess current, the supply voltage delta |VCCI VCC| must be less than specified limit in 6.4.  
C. To prevent excess current, the supply voltage delta |VBIAS VOFFSET| must be less than specified in 6.4.  
D. To prevent excess current, the supply voltage delta |VBIAS VRESET| must be less than specified limit in 6.4.  
E. VBIAS must power up after VOFFSET has powered up, per the Delay1 specification in 9-1.  
F. PG_OFFSET must turn off after EN_OFFSET has turned off, per the Delay2 specification in 9-1.  
G. DLP controller software enables the DMD power supplies to turn on after RESET_OEZ is at logic high.  
H. DLP controller software initiates the global VBIAS command.  
I.  
After the DMD micromirror park sequence is complete, the DLP controller software initiates a hardware power-down that activates  
PWRDNZ and disables VBIAS, VRESET and VOFFSET.  
J. Under power-loss conditions where emergency DMD micromirror park procedures are being enacted by the DLP controller hardware,  
EN_OFFSET may turn off after PG_OFFSET has turned off. The RESET_OEZ signal goes high prior to PG_OFFSET turning off to  
indicate the DMD micromirror has completed the emergency park procedures.  
9-1. DMD Power-Supply Requirements  
Parameter  
Delay1  
Description  
Min  
NOM  
Max  
Unit  
ms  
ns  
Delay from VOFFSET settled at recommended operating voltage to  
VBIAS power up  
1
2
Delay2  
PG_OFFSET hold time after EN_OFFSET goes low  
100  
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9.3 Restrictions on Hot Plugging and Hot Swapping  
The DLP670S uses a state-of-the-art pixel node which enables smaller optics, higher resolution, and overall  
great performance and reliability as long as certain design-for-assembly methods are used. To maximize DMD  
reliability, Hot plugging or hot swapping DMDs voids the DMD warranty conditions and must be avoided at  
all times.  
9.3.1 No Hot Plugging  
Avoid hot plugging, the act of connecting the DMD to power supplies or data inputs that are already energized,  
to ensure maximum reliability of the DMD. Do not add or remove the DMD from a DMD socket unless all input  
power supplies of the DMD are at a potential equal to the local ground potential (VSS). This applies to a DMD  
incoming test station, a partially assembled product, a completed product under test, and a product in the field.  
This also applies to any cables, flex cables, or PCB connections which provide power to the DMD. Provide  
power as defined in the power-up scenario detailed in 9.1. Perform power down as defined in 9.2.  
9.3.2 No Hot Swapping  
To ensure maximum reliability of the DMD, avoid hot swapping, which is removing and replacing the DMD with  
DMD power supplies or data inputs that are already energized. Never add or remove the DMD from a DMD  
socket unless all input power supplies of the DMD are at a potential equal to the local ground potential (VSS).  
This applies to a DMD incoming test station, a partially assembled product, a completed product under test, and  
a product in the field. This also applies to any cables, flex cables, or PCB connections that provide power to the  
DMD. Provide power as defined in the power-up scenario detailed in 9.1. Perform power-down as defined in  
9.2 .  
9.3.3 Intermittent or Voltage Power Spike Avoidance  
When DMD power or data and clock inputs are energized, twisting of the DMD, DMD socket, or DMD board  
must be avoided when trying to align the DMD within an optical engine. This twisting motion can create power  
intermittences or voltage spikes exceeding input power and data specifications of the DMD which may ultimately  
affect the DMD reliability. PCB power, data, clock, and control circuits must be de-energized before making or  
removing connections, including cables, connectors, probes, and bed-of-nails connections.  
PCB and system design considerations must take into account ways to prevent external influence of DMD input  
power clock, data and control signals. Robust connectors must be used which are resistant to intermittent  
connections or noise spikes if jostled or vibrated. Connectors must be used which are rated to exceed the  
number of insertion or removal cycles expected in the application. External electromagnetic emitters must not be  
placed nearby these sensitive circuits unless adequate EMI shielding is properly used. Sufficient bulk decoupling  
and component decoupling capacitance as well as appropriate PCB layout techniques must be available for all  
electrical components within the DMD based "system" such that ground bounce does not occur. See the section  
on 10.1 for more layout information.  
10 Layout  
10.1 Layout Guidelines  
10.1.1 Critical Signal Guidelines  
The DLP670S DMD is one device in a chipset controlled by the DLPC900 controller. The following guidelines are  
targeted at designing a functioning PCB using this DLP670S DMD chipset. The DLP670S DMD board must be a  
high-speed multilayer PCB containing high-speed digital logic utilizing dual edge (DDR) LVDS signals at 400-  
MHz clock rates. 10-1 shows the DLP670S signals and the recommendations needed from and to the  
DLPC900 controller devices. The DLPC900 device provides the data and control to the DMD. The TPS65145,  
LP38513 or equivalent devices supply power to the DMD.  
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10-1. DLP670S DMD System Connections  
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10-1. Layout Restrictions for 10-1  
Note  
Signal Type  
Guideline  
Prevent signal noise  
Route 100 ±10-Ωresistor  
Intra-pair (P-to-N) length tolerance is ±12-mils.  
DD and SCTRL must be matched to the DCLK within ±150-mils.  
DCLK_C must be matched to DCLK_D within ±1.25-ns.  
DCLK_A must be matched to DCLK_B within ±1.25-ns.  
Do not switch routing layers except at the beginning and end of trace.  
Signal routing length must not exceed 375-mm.  
Prevent signal noise  
A
Differential  
B
C
Single-ended  
Power  
Route single-ended signals 50 ±5-Ω  
No length match requirement  
VRESET, VOFFSET, VBIAS, and VCC at the DMD must be kept within the operating limits  
specified in the data sheet.  
Provide proper amount of decoupling capacitance for each voltage at the DMD  
10.1.2 Power Connection Guidelines  
The following are recommendations for the power connections to the DMD or DMD PCB:  
Solid planes are required for DMD_P3P3V(3.3V), DMD_P1P8V and Ground.  
TI strongly recommends partial power planes are used for VOFFSET, VRESET, and VBIAS.  
VOFFSET, VBIAS, VRESET, VCC, and VCCI power rails must be kept within the specified operating range.  
This includes effects from ripple and DC error.  
To accommodate power supply transient current requirements, adequate decoupling capacitance must be  
placed as near the DMD VOFFSET, VBIAS, VRESET, VCC, and VCCI pins as possible.  
Do not swap DMDs while the DMD is still powered on (this is called hot swapping). All DMD power supply  
rails and signals must be 0 volts (not driven) before connecting or disconnecting the DMD physical interface.  
Do not allow power to be applied to the DMD when one or more signal pins are not being driven.  
Decoupling capacitor locations for the DMD must be as close as possible to the DMD. The pads of the  
capacitors must be connected to at least two or three vias to get a very low impedance to ground as shown in  
10-3. Furthermore, the capacitor must be in the flow of the power trace as it goes to the input of the DMD.  
It is extremely important to adhere to the 9.1 and 9.2 and do not allow the DMD power-supply levels to  
be outside of the recommended operating conditions specified in the DMD data sheet.  
These figures show examples of bypass decoupling capacitor layout.  
10-3. Good Layout  
10-2. Poor Layout  
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10.1.3 Noise Coupling Avoidance  
During operation, it is critical to prevent the coupling of noise or intermittent power connections onto the following  
signals because irreversible DMD micromirror array damage or lesser effects of image disruption can occur:  
SCTRL_DN, SCTRL_DP  
DCLK_DN, DCLK_DP  
SCPCLK  
SCPDI  
RESET_SEL(0), RESET_SEL(1)  
PG_OFFSET  
In this context, the following conditions are considered noise:  
Shorting to another signal  
Shorting to power  
Shorting to ground  
Intermittent connection (includes hot swapping)  
An electrical open condition  
An electrical floating condition  
Inducing electromagnetic interference that is strong enough to affect the integrity of the signals  
Unstable inputs (conditions outside of the specified operating range) to any of the device power rails  
Voltage fluctuations on the device ground pins  
10.2 Layout Example  
10.2.1 Layers  
The layer stack-up and copper weight for each layer is shown in 10-2. Small subplanes are allowed on signal  
routing layers to connect components to major sub-planes on top or bottom layers if necessary.  
10-2. Layer Stack-Up  
LAYER  
NO.  
LAYER NAME  
COPPER WT. (oz.)  
COMMENTS  
1
1.5  
1
DMD, escapes, low frequency signals, power subplanes  
Solid ground plane (net GND)  
Side A DMD only  
2
Ground  
3
Signal  
0.5  
1
50-Ωand 100-Ωdifferential signals  
4
Ground  
Solid ground plane (net GND)  
5
DMD_P3P3V  
1
+3.3-V power plane (net DMD_P3P3V)  
50-Ωand 100-Ωdifferential signals  
6
Signal  
0.5  
1
7
Ground  
Solid ground plane (net GND)  
8
Side B - All other Components  
1.5  
Discrete components, low frequency signals, power subplanes  
10.2.2 Impedance Requirements  
TI recommends that the board has matched impedance of 50 Ω ±10% for all signals. The exceptions are listed  
in 10-1 and repeated for convenience in 10-3.  
10-3. Special Impedance Requirements  
Signal Type  
Signal Name  
Impedance (ohms)  
D_AP(0:15), D_AN(0:15)  
DCLK_AP, DCLK_AN  
SCTRL_AP, SCTRL_AN  
D_BP(0:15), D_BN(0:15)  
DCLK_BP, DCLK_BN  
SCTRL_BP, SCTRL_BN  
100 ±10% differential across  
each pair  
A channel LVDS differential pairs  
100 ±10% differential across  
each pair  
B channel LVDS differential pairs  
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10-3. Special Impedance Requirements (continued)  
Signal Type  
Signal Name  
Impedance (ohms)  
D_CP(0:15), D_CN(0:15)  
DCLK_CP, DCLK_CN  
SCTRL_CP, SCTRL_CN  
D_DP(0:15), D_DN(0:15)  
DCLK_DP, DCLK_DN  
SCTRL_DP, SCTRL_DN  
100 ±10% differential across  
each pair  
C channel LVDS differential pairs  
100 ±10% differential across  
each pair  
D channel LVDS differential pairs  
10.2.3 Trace Width, Spacing  
Unless otherwise specified, TI recommends that all signals follow the 0.005 in./0.005 in. design rule. Minimum  
trace clearance from the ground ring around the PWB has a 0.1-in. minimum. An analysis of impedance and  
stack-up requirements determine the actual trace widths and clearances.  
10.2.3.1 Voltage Signals  
Below are additional voltage supply layout examples from the power planes to the individual DMD pins. In  
general, power supply trace widths must be as wide as possible to reduce impedances.  
10-4. Special Trace Widths, Spacing Requirements  
MINIMUM TRACE WIDTH TO  
SIGNAL NAME  
GND  
LAYOUT REQUIREMENT  
Maximize trace width to connecting pin  
PINS (MIL)  
15  
15  
15  
15  
15  
15  
DMD_P3P3V  
DMD_P1P8V  
VOFFSET  
VRESET  
Maximize trace width to connecting pin  
Maximize trace width to connecting pin  
Create mini plane from the power generation to the DMD input  
Create mini plane from the power generation to the DMD input  
Create mini plane from the power generation to the DMD input  
VBIAS  
All DMD control input/  
output connections  
10  
Use 10 mil etch to connect all signals/voltages to DMD pads  
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11 Device and Documentation Support  
11.1 第三方产品免责声明  
TI 发布的与第三方产品或服务有关的信息不能构成与此类产品或服务或保修的适用性有关的认可不能构成此  
类产品或服务单独或与任TI 产品或服务一起的表示或认可。  
11.2 Device Support  
11.2.1 Device Nomenclature  
DLP670S  
FYR  
Package  
TI Internal Numbering  
Device Descriptor  
11-1. Part Number Description  
11.2.2 Device Markings  
The device markings include both human-readable information and a 2-dimensional matrix code. The human-  
readable information is described in 11-2. The 2-dimensional matrix code is an alpha-numeric character string  
that contains the DMD part number, Part 1 of Serial Number, and Part 2 of Serial Number. The first character of  
the DMD Serial Number (part 1) is the manufacturing year. The second character of the DMD Serial Number  
(part 1) is the manufacturing month.  
Example: DLP670SFYR GHXXXXX LLLLLLM  
TI Internal Numbering  
2-Dimension Matrix Code  
(Part Number and  
Serial Number)  
DMD Part Number  
YYYYYYY  
DLP670S FYR  
GHXXXXX LLLLLLM  
Part 1 of Serial Number  
(7 characters)  
Part 2 of Serial Number  
(7 characters)  
11-2. DMD Marking Locations  
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DLP670S  
www.ti.com.cn  
ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
11.3 Documentation Support  
11.3.1 Related Documentation  
The following documents contain additional information related to the chipset components used with the  
DLP670S DMD:  
DLP670S Product Folder  
DLPC900 Product Folder  
DLPC900 Programmers Guide  
DMD Optical Efficiency for Visible Wavelengths  
DMD 101: Introduction to Digital Micromirror Device (DMD) Technology  
11.4 接收文档更新通知  
要接收文档更新通知请导航至 ti.com 上的器件产品文件夹。点击订阅更新 进行注册即可每周接收产品信息更  
改摘要。有关更改的详细信息请查看任何已修订文档中包含的修订历史记录。  
11.5 支持资源  
TI E2E支持论坛是工程师的重要参考资料可直接从专家获得快速、经过验证的解答和设计帮助。搜索现有解  
答或提出自己的问题可获得所需的快速设计帮助。  
链接的内容由各个贡献者“按原样”提供。这些内容并不构成 TI 技术规范并且不一定反映 TI 的观点请参阅  
TI 《使用条款》。  
11.6 Trademarks  
TI E2Eis a trademark of Texas Instruments.  
DLP® is a registered trademark of Texas Instruments.  
is a registered trademark of Texas Instruments.  
所有商标均为其各自所有者的财产。  
11.7 Electrostatic Discharge Caution  
This integrated circuit can be damaged by ESD. Texas Instruments recommends that all integrated circuits be handled  
with appropriate precautions. Failure to observe proper handling and installation procedures can cause damage.  
ESD damage can range from subtle performance degradation to complete device failure. Precision integrated circuits may  
be more susceptible to damage because very small parametric changes could cause the device not to meet its published  
specifications.  
11.8 术语表  
TI 术语表  
本术语表列出并解释了术语、首字母缩略词和定义。  
Copyright © 2022 Texas Instruments Incorporated  
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DLP670S  
www.ti.com.cn  
ZHCSKV8A NOVEMBER 2020 REVISED JUNE 2022  
12 Mechanical, Packaging, and Orderable Information  
The following pages include mechanical, packaging, and orderable information. This information is the most  
current data available for the designated devices. This data is subject to change without notice and revision of  
this document. For browser-based versions of this data sheet, refer to the left-hand navigation.  
Copyright © 2022 Texas Instruments Incorporated  
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Product Folder Links: DLP670S  
 
PACKAGE OPTION ADDENDUM  
www.ti.com  
31-Oct-2021  
PACKAGING INFORMATION  
Orderable Device  
Status Package Type Package Pins Package  
Eco Plan  
Lead finish/  
Ball material  
MSL Peak Temp  
Op Temp (°C)  
Device Marking  
Samples  
Drawing  
Qty  
(1)  
(2)  
(3)  
(4/5)  
(6)  
DLP670SFYR  
ACTIVE  
CPGA  
FYR  
350  
21  
RoHS & Green  
NI-PD-AU  
N / A for Pkg Type  
0 to 70  
(1) The marketing status values are defined as follows:  
ACTIVE: Product device recommended for new designs.  
LIFEBUY: TI has announced that the device will be discontinued, and a lifetime-buy period is in effect.  
NRND: Not recommended for new designs. Device is in production to support existing customers, but TI does not recommend using this part in a new design.  
PREVIEW: Device has been announced but is not in production. Samples may or may not be available.  
OBSOLETE: TI has discontinued the production of the device.  
(2) RoHS: TI defines "RoHS" to mean semiconductor products that are compliant with the current EU RoHS requirements for all 10 RoHS substances, including the requirement that RoHS substance  
do not exceed 0.1% by weight in homogeneous materials. Where designed to be soldered at high temperatures, "RoHS" products are suitable for use in specified lead-free processes. TI may  
reference these types of products as "Pb-Free".  
RoHS Exempt: TI defines "RoHS Exempt" to mean products that contain lead but are compliant with EU RoHS pursuant to a specific EU RoHS exemption.  
Green: TI defines "Green" to mean the content of Chlorine (Cl) and Bromine (Br) based flame retardants meet JS709B low halogen requirements of <=1000ppm threshold. Antimony trioxide based  
flame retardants must also meet the <=1000ppm threshold requirement.  
(3) MSL, Peak Temp. - The Moisture Sensitivity Level rating according to the JEDEC industry standard classifications, and peak solder temperature.  
(4) There may be additional marking, which relates to the logo, the lot trace code information, or the environmental category on the device.  
(5) Multiple Device Markings will be inside parentheses. Only one Device Marking contained in parentheses and separated by a "~" will appear on a device. If a line is indented then it is a continuation  
of the previous line and the two combined represent the entire Device Marking for that device.  
(6)  
Lead finish/Ball material - Orderable Devices may have multiple material finish options. Finish options are separated by a vertical ruled line. Lead finish/Ball material values may wrap to two  
lines if the finish value exceeds the maximum column width.  
Important Information and Disclaimer:The information provided on this page represents TI's knowledge and belief as of the date that it is provided. TI bases its knowledge and belief on information  
provided by third parties, and makes no representation or warranty as to the accuracy of such information. Efforts are underway to better integrate information from third parties. TI has taken and  
continues to take reasonable steps to provide representative and accurate information but may not have conducted destructive testing or chemical analysis on incoming materials and chemicals.  
TI and TI suppliers consider certain information to be proprietary, and thus CAS numbers and other limited information may not be available for release.  
In no event shall TI's liability arising out of such information exceed the total purchase price of the TI part(s) at issue in this document sold by TI to Customer on an annual basis.  
Addendum-Page 1  
重要声明和免责声明  
TI“按原样提供技术和可靠性数据(包括数据表)、设计资源(包括参考设计)、应用或其他设计建议、网络工具、安全信息和其他资源,  
不保证没有瑕疵且不做出任何明示或暗示的担保,包括但不限于对适销性、某特定用途方面的适用性或不侵犯任何第三方知识产权的暗示担  
保。  
这些资源可供使用 TI 产品进行设计的熟练开发人员使用。您将自行承担以下全部责任:(1) 针对您的应用选择合适的 TI 产品,(2) 设计、验  
证并测试您的应用,(3) 确保您的应用满足相应标准以及任何其他功能安全、信息安全、监管或其他要求。  
这些资源如有变更,恕不另行通知。TI 授权您仅可将这些资源用于研发本资源所述的 TI 产品的应用。严禁对这些资源进行其他复制或展示。  
您无权使用任何其他 TI 知识产权或任何第三方知识产权。您应全额赔偿因在这些资源的使用中对 TI 及其代表造成的任何索赔、损害、成  
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TI 反对并拒绝您可能提出的任何其他或不同的条款。IMPORTANT NOTICE  
邮寄地址:Texas Instruments, Post Office Box 655303, Dallas, Texas 75265  
Copyright © 2022,德州仪器 (TI) 公司  

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